{"id":2243,"date":"2026-05-19T01:55:23","date_gmt":"2026-05-19T01:55:23","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2243"},"modified":"2026-05-19T01:55:24","modified_gmt":"2026-05-19T01:55:24","slug":"customized-sic-ceramic-boat-carrier-for-semiconductor-wafer-handling","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/fr\/product\/customized-sic-ceramic-boat-carrier-for-semiconductor-wafer-handling\/","title":{"rendered":"Support de bateau en c\u00e9ramique SiC personnalis\u00e9 pour la manipulation de plaquettes de semi-conducteurs"},"content":{"rendered":"<p data-start=\"442\" data-end=\"845\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2247 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Le Customized Silicon Carbide (SiC) Ceramic Boat Carrier est une solution de support et de transport de plaquettes de silicium con\u00e7ue avec pr\u00e9cision pour les environnements de fabrication de semi-conducteurs \u00e0 haute temp\u00e9rature. Fabriqu\u00e9 \u00e0 partir de c\u00e9ramique SiC de haute puret\u00e9, ce support offre une excellente stabilit\u00e9 thermique, une r\u00e9sistance sup\u00e9rieure \u00e0 la corrosion, une grande r\u00e9sistance m\u00e9canique et une tr\u00e8s faible contamination.<\/p>\n<p data-start=\"847\" data-end=\"1072\">Con\u00e7us pour les processus critiques de manipulation des plaquettes, les bateaux en c\u00e9ramique SiC sont largement utilis\u00e9s dans les fours de diffusion, les syst\u00e8mes d'oxydation, les r\u00e9acteurs CVD, les processus RTP, les \u00e9quipements de croissance \u00e9pitaxiale et les lignes de production de semi-conducteurs de pointe.<\/p>\n<p data-start=\"1074\" data-end=\"1373\">Compar\u00e9s aux supports de plaquettes en quartz ou en graphite conventionnels, les supports en c\u00e9ramique SiC offrent une dur\u00e9e de vie nettement plus longue, une production de particules plus faible et une meilleure stabilit\u00e9 des processus, ce qui les rend id\u00e9aux pour les fabs de semi-conducteurs, la fabrication photovolta\u00efque, la production de LED et les industries de l'\u00e9lectronique de puissance.<\/p>\n<p data-start=\"1375\" data-end=\"1538\">Sa conductivit\u00e9 thermique \u00e9lev\u00e9e et son faible coefficient de dilatation thermique permettent une distribution uniforme de la chaleur et minimisent les contraintes subies par la plaquette dans des conditions de traitement extr\u00eames.<\/p>\n<hr data-start=\"1540\" data-end=\"1543\" \/>\n<h2 data-section-id=\"1nexqur\" data-start=\"1545\" data-end=\"1588\">Principales caract\u00e9ristiques du support de bateau en c\u00e9ramique SiC<\/h2>\n<h3 data-section-id=\"r5c1p9\" data-start=\"1590\" data-end=\"1633\">R\u00e9sistance exceptionnelle aux hautes temp\u00e9ratures<\/h3>\n<p data-start=\"1635\" data-end=\"1736\">La structure en c\u00e9ramique SiC conserve une excellente stabilit\u00e9 m\u00e9canique \u00e0 des temp\u00e9ratures extr\u00eamement \u00e9lev\u00e9es :<\/p>\n<ul data-start=\"1738\" data-end=\"1819\">\n<li data-section-id=\"152vloi\" data-start=\"1738\" data-end=\"1780\">Jusqu'\u00e0 <strong data-start=\"1746\" data-end=\"1780\">1600\u00b0C en atmosph\u00e8re oxydante<\/strong><\/li>\n<li data-section-id=\"q7yp51\" data-start=\"1781\" data-end=\"1819\">Jusqu'\u00e0 <strong data-start=\"1789\" data-end=\"1819\">1950\u00b0C en atmosph\u00e8re inerte<\/strong><\/li>\n<\/ul>\n<p data-start=\"1821\" data-end=\"1915\">Le mat\u00e9riau r\u00e9siste \u00e0 la d\u00e9formation, \u00e0 l'affaissement et \u00e0 la fatigue thermique lors de cycles de chauffage r\u00e9p\u00e9t\u00e9s.<\/p>\n<h3 data-section-id=\"af4s6d\" data-start=\"1917\" data-end=\"1950\">Excellente r\u00e9sistance chimique<\/h3>\n<p data-start=\"1952\" data-end=\"2015\">Le carbure de silicium de haute puret\u00e9 pr\u00e9sente une r\u00e9sistance exceptionnelle aux :<\/p>\n<ul data-start=\"2017\" data-end=\"2082\">\n<li data-section-id=\"16yr7f8\" data-start=\"2017\" data-end=\"2024\">Acides<\/li>\n<li data-section-id=\"1dcs0ah\" data-start=\"2025\" data-end=\"2034\">Alcalis<\/li>\n<li data-section-id=\"1dw3jqk\" data-start=\"2035\" data-end=\"2056\">Environnements plasmatiques<\/li>\n<li data-section-id=\"1klpmqy\" data-start=\"2057\" data-end=\"2082\">Gaz de traitement corrosifs<\/li>\n<\/ul>\n<p data-start=\"2084\" data-end=\"2149\">Compatible avec les supports agressifs des processus de semi-conducteurs, y compris<\/p>\n<ul data-start=\"2151\" data-end=\"2184\">\n<li data-section-id=\"1j4dkhq\" data-start=\"2151\" data-end=\"2157\">SiH\u2084<\/li>\n<li data-section-id=\"1o4j71\" data-start=\"2158\" data-end=\"2163\">NH\u2083<\/li>\n<li data-section-id=\"1o44mn\" data-start=\"2164\" data-end=\"2169\">HCl<\/li>\n<li data-section-id=\"175wo8r\" data-start=\"2170\" data-end=\"2177\">POCl\u2083<\/li>\n<li data-section-id=\"1iyfhx0\" data-start=\"2178\" data-end=\"2184\">H\u2082Se<\/li>\n<\/ul>\n<p data-start=\"2186\" data-end=\"2258\">Cela garantit une dur\u00e9e de vie prolong\u00e9e dans les environnements de traitement difficiles.<\/p>\n<h3 data-section-id=\"7jt1w3\" data-start=\"2260\" data-end=\"2293\">G\u00e9n\u00e9ration de particules ultra-faible<\/h3>\n<p data-start=\"2295\" data-end=\"2397\">Le polissage de la surface et la fabrication de pr\u00e9cision minimisent la contamination par les particules pendant le traitement des plaquettes.<\/p>\n<p data-start=\"2399\" data-end=\"2412\">Convient pour :<\/p>\n<ul data-start=\"2414\" data-end=\"2509\">\n<li data-section-id=\"1x4w0z2\" data-start=\"2414\" data-end=\"2444\">N\u0153uds de semi-conducteurs avanc\u00e9s<\/li>\n<li data-section-id=\"cf6qth\" data-start=\"2445\" data-end=\"2467\">D\u00e9p\u00f4t \u00e9pitaxial<\/li>\n<li data-section-id=\"14zk0hf\" data-start=\"2468\" data-end=\"2483\">Proc\u00e9d\u00e9s EUV<\/li>\n<li data-section-id=\"195x9qq\" data-start=\"2484\" data-end=\"2509\">Fabrication en salle blanche<\/li>\n<\/ul>\n<p data-start=\"2511\" data-end=\"2585\">La faible g\u00e9n\u00e9ration de particules permet d'am\u00e9liorer le rendement des plaquettes et de r\u00e9duire les taux de d\u00e9fauts.<\/p>\n<h3 data-section-id=\"e3yx30\" data-start=\"2587\" data-end=\"2616\">Conductivit\u00e9 thermique \u00e9lev\u00e9e<\/h3>\n<p data-start=\"2618\" data-end=\"2639\">Conductivit\u00e9 thermique :<\/p>\n<p data-start=\"2641\" data-end=\"2654\"><strong data-start=\"2641\" data-end=\"2654\">160 W\/m-K<\/strong><\/p>\n<p data-start=\"2656\" data-end=\"2673\">Les avantages comprennent<\/p>\n<ul data-start=\"2675\" data-end=\"2792\">\n<li data-section-id=\"1dtiiz7\" data-start=\"2675\" data-end=\"2698\">Chauffage uniforme des plaquettes<\/li>\n<li data-section-id=\"1cbro8k\" data-start=\"2699\" data-end=\"2733\">Am\u00e9lioration de la constance de la temp\u00e9rature<\/li>\n<li data-section-id=\"1l6j782\" data-start=\"2734\" data-end=\"2761\">R\u00e9duction des gradients thermiques<\/li>\n<li data-section-id=\"1diyf8m\" data-start=\"2762\" data-end=\"2792\">Meilleure r\u00e9p\u00e9tabilit\u00e9 des processus<\/li>\n<\/ul>\n<h3 data-section-id=\"1wy3za\" data-start=\"2794\" data-end=\"2822\">Haute r\u00e9sistance m\u00e9canique<\/h3>\n<p data-start=\"2824\" data-end=\"2845\">La c\u00e9ramique SiC fournit :<\/p>\n<ul data-start=\"2847\" data-end=\"2949\">\n<li data-section-id=\"kmslzs\" data-start=\"2847\" data-end=\"2867\">Excellente duret\u00e9<\/li>\n<li data-section-id=\"7gjuqn\" data-start=\"2868\" data-end=\"2895\">R\u00e9sistance \u00e9lev\u00e9e \u00e0 la compression<\/li>\n<li data-section-id=\"1phs0e7\" data-start=\"2896\" data-end=\"2922\">R\u00e9sistance sup\u00e9rieure \u00e0 l'usure<\/li>\n<li data-section-id=\"1dvb6yk\" data-start=\"2923\" data-end=\"2949\">R\u00e9sistance aux chocs thermiques<\/li>\n<\/ul>\n<p data-start=\"2951\" data-end=\"3025\">Maintient la stabilit\u00e9 dimensionnelle m\u00eame en cas de fonctionnement industriel \u00e0 long terme.<\/p>\n<h3 data-section-id=\"1g7huyn\" data-start=\"3027\" data-end=\"3054\"><img decoding=\"async\" class=\"size-medium wp-image-2246 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Conception enti\u00e8rement personnalis\u00e9e<\/h3>\n<p data-start=\"3056\" data-end=\"3122\">Des solutions personnalis\u00e9es sont disponibles en fonction des besoins des clients :<\/p>\n<p data-start=\"3124\" data-end=\"3140\">Diam\u00e8tre de la plaquette<\/p>\n<p data-start=\"3142\" data-end=\"3157\">Quantit\u00e9 d'emplacements<\/p>\n<p data-start=\"3159\" data-end=\"3173\">Espacement des fentes<\/p>\n<p data-start=\"3175\" data-end=\"3192\">Dimensions du bateau<\/p>\n<p data-start=\"3194\" data-end=\"3210\">Finition de la surface<\/p>\n<p data-start=\"3212\" data-end=\"3236\">Optimisation de la structure<\/p>\n<p data-start=\"3238\" data-end=\"3268\">Les tailles de plaquettes prises en charge sont les suivantes<\/p>\n<ul data-start=\"3270\" data-end=\"3341\">\n<li data-section-id=\"1paoi2x\" data-start=\"3270\" data-end=\"3283\">150 mm (6\u2033)<\/li>\n<li data-section-id=\"1lo46ap\" data-start=\"3284\" data-end=\"3297\">200 mm (8\u2033)<\/li>\n<li data-section-id=\"12bbi6z\" data-start=\"3298\" data-end=\"3312\">300 mm (12\u2033)<\/li>\n<li data-section-id=\"14b1lra\" data-start=\"3313\" data-end=\"3341\">Dimensions personnalis\u00e9es disponibles<\/li>\n<\/ul>\n<hr data-start=\"3343\" data-end=\"3346\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"3348\" data-end=\"3375\">Sp\u00e9cifications techniques<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3377\" data-end=\"3883\">\n<thead data-start=\"3377\" data-end=\"3398\">\n<tr data-start=\"3377\" data-end=\"3398\">\n<th class=\"last:pe-10\" data-start=\"3377\" data-end=\"3386\" data-col-size=\"sm\">Propri\u00e9t\u00e9<\/th>\n<th class=\"last:pe-10\" data-start=\"3386\" data-end=\"3391\" data-col-size=\"sm\">Unit\u00e9<\/th>\n<th class=\"last:pe-10\" data-start=\"3391\" data-end=\"3398\" data-col-size=\"sm\">Valeur<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3415\" data-end=\"3883\">\n<tr data-start=\"3415\" data-end=\"3448\">\n<td data-start=\"3415\" data-end=\"3439\" data-col-size=\"sm\">Teneur en carbure de silicium<\/td>\n<td data-col-size=\"sm\" data-start=\"3439\" data-end=\"3441\">%<\/td>\n<td data-col-size=\"sm\" data-start=\"3441\" data-end=\"3448\">&gt;99.5<\/td>\n<\/tr>\n<tr data-start=\"3449\" data-end=\"3477\">\n<td data-start=\"3449\" data-end=\"3468\" data-col-size=\"sm\">Taille moyenne des grains<\/td>\n<td data-col-size=\"sm\" data-start=\"3468\" data-end=\"3471\">\u03bcm<\/td>\n<td data-col-size=\"sm\" data-start=\"3471\" data-end=\"3477\">4-10<\/td>\n<\/tr>\n<tr data-start=\"3478\" data-end=\"3505\">\n<td data-start=\"3478\" data-end=\"3491\" data-col-size=\"sm\">Densit\u00e9 en vrac<\/td>\n<td data-col-size=\"sm\" data-start=\"3491\" data-end=\"3498\">kg\/dm\u00b3<\/td>\n<td data-col-size=\"sm\" data-start=\"3498\" data-end=\"3505\">&gt;3.14<\/td>\n<\/tr>\n<tr data-start=\"3506\" data-end=\"3536\">\n<td data-start=\"3506\" data-end=\"3524\" data-col-size=\"sm\">Porosit\u00e9 apparente<\/td>\n<td data-col-size=\"sm\" data-start=\"3524\" data-end=\"3530\">Vol %<\/td>\n<td data-col-size=\"sm\" data-start=\"3530\" data-end=\"3536\">&lt;0.5<\/td>\n<\/tr>\n<tr data-start=\"3537\" data-end=\"3567\">\n<td data-start=\"3537\" data-end=\"3554\" data-col-size=\"sm\">Duret\u00e9 Vickers<\/td>\n<td data-col-size=\"sm\" data-start=\"3554\" data-end=\"3561\">Kg\/mm\u00b2<\/td>\n<td data-col-size=\"sm\" data-start=\"3561\" data-end=\"3567\">2800<\/td>\n<\/tr>\n<tr data-start=\"3568\" data-end=\"3595\">\n<td data-start=\"3568\" data-end=\"3586\" data-col-size=\"sm\">R\u00e9sistance \u00e0 la flexion<\/td>\n<td data-col-size=\"sm\" data-start=\"3586\" data-end=\"3590\">MPa<\/td>\n<td data-col-size=\"sm\" data-start=\"3590\" data-end=\"3595\">450<\/td>\n<\/tr>\n<tr data-start=\"3596\" data-end=\"3627\">\n<td data-start=\"3596\" data-end=\"3617\" data-col-size=\"sm\">R\u00e9sistance \u00e0 la compression<\/td>\n<td data-col-size=\"sm\" data-start=\"3617\" data-end=\"3621\">MPa<\/td>\n<td data-col-size=\"sm\" data-start=\"3621\" data-end=\"3627\">3900<\/td>\n<\/tr>\n<tr data-start=\"3628\" data-end=\"3653\">\n<td data-start=\"3628\" data-end=\"3644\" data-col-size=\"sm\">Module d'\u00e9lasticit\u00e9<\/td>\n<td data-col-size=\"sm\" data-start=\"3644\" data-end=\"3648\">GPa<\/td>\n<td data-col-size=\"sm\" data-start=\"3648\" data-end=\"3653\">420<\/td>\n<\/tr>\n<tr data-start=\"3654\" data-end=\"3687\">\n<td data-start=\"3654\" data-end=\"3673\" data-col-size=\"sm\">R\u00e9sistance \u00e0 la rupture<\/td>\n<td data-start=\"3673\" data-end=\"3682\" data-col-size=\"sm\">MPa-m1\/2<\/td>\n<td data-start=\"3682\" data-end=\"3687\" data-col-size=\"sm\">3.5<\/td>\n<\/tr>\n<tr data-start=\"3688\" data-end=\"3720\">\n<td data-start=\"3688\" data-end=\"3709\" data-col-size=\"sm\">Conductivit\u00e9 thermique<\/td>\n<td data-start=\"3709\" data-end=\"3715\" data-col-size=\"sm\">W\/m-K<\/td>\n<td data-start=\"3715\" data-end=\"3720\" data-col-size=\"sm\">160<\/td>\n<\/tr>\n<tr data-start=\"3721\" data-end=\"3760\">\n<td data-start=\"3721\" data-end=\"3744\" data-col-size=\"sm\">R\u00e9sistivit\u00e9 \u00e9lectrique<\/td>\n<td data-start=\"3744\" data-end=\"3751\" data-col-size=\"sm\">Ohm-cm<\/td>\n<td data-start=\"3751\" data-end=\"3760\" data-col-size=\"sm\">10\u2076-10\u2078<\/td>\n<\/tr>\n<tr data-start=\"3761\" data-end=\"3803\">\n<td data-start=\"3761\" data-end=\"3791\" data-col-size=\"sm\">Coefficient de dilatation thermique<\/td>\n<td data-start=\"3791\" data-end=\"3798\" data-col-size=\"sm\">10-\u2076\/K<\/td>\n<td data-start=\"3798\" data-end=\"3803\" data-col-size=\"sm\">4.3<\/td>\n<\/tr>\n<tr data-start=\"3804\" data-end=\"3845\">\n<td data-start=\"3804\" data-end=\"3836\" data-col-size=\"sm\">Temp\u00e9rature maximale (oxydation)<\/td>\n<td data-start=\"3836\" data-end=\"3839\" data-col-size=\"sm\">\u00b0C<\/td>\n<td data-start=\"3839\" data-end=\"3845\" data-col-size=\"sm\">1600<\/td>\n<\/tr>\n<tr data-start=\"3846\" data-end=\"3883\">\n<td data-start=\"3846\" data-end=\"3874\" data-col-size=\"sm\">Temp\u00e9rature maximale (inerte)<\/td>\n<td data-start=\"3874\" data-end=\"3877\" data-col-size=\"sm\">\u00b0C<\/td>\n<td data-start=\"3877\" data-end=\"3883\" data-col-size=\"sm\">1950<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3885\" data-end=\"3888\" \/>\n<h2 data-section-id=\"f3sqp6\" data-start=\"3890\" data-end=\"3933\">Applications du support de bateau en c\u00e9ramique SiC<\/h2>\n<h3 data-section-id=\"6yu2ul\" data-start=\"3935\" data-end=\"3966\"><img decoding=\"async\" class=\"size-medium wp-image-2245 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/SiC-Ceramic-Boat-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Fabrication de semi-conducteurs<\/h3>\n<p data-start=\"3968\" data-end=\"4035\">Largement utilis\u00e9 dans les processus de fabrication de tranches de semi-conducteurs, notamment :<\/p>\n<p data-start=\"4037\" data-end=\"4059\"><strong data-start=\"4037\" data-end=\"4059\">Fours de diffusion<\/strong><\/p>\n<p data-start=\"4061\" data-end=\"4162\">Fournit un support stable pour les plaquettes pendant le traitement \u00e0 haute temp\u00e9rature tout en minimisant la distorsion thermique.<\/p>\n<p data-start=\"4164\" data-end=\"4185\"><strong data-start=\"4164\" data-end=\"4185\">Syst\u00e8mes d'oxydation<\/strong><\/p>\n<p data-start=\"4187\" data-end=\"4254\">Maintient une excellente pr\u00e9cision dimensionnelle et un contr\u00f4le de la contamination.<\/p>\n<p data-start=\"4256\" data-end=\"4284\"><strong data-start=\"4256\" data-end=\"4284\">Traitement thermique rapide<\/strong><\/p>\n<p data-start=\"4286\" data-end=\"4332\">La faible dilatation thermique minimise le gauchissement de la plaquette.<\/p>\n<p data-start=\"4334\" data-end=\"4354\"><strong data-start=\"4334\" data-end=\"4354\">Implantation d'ions<\/strong><\/p>\n<p data-start=\"4356\" data-end=\"4424\">Excellente r\u00e9sistance aux radiations et \u00e0 l'exposition aux particules de haute \u00e9nergie.<\/p>\n<hr data-start=\"4426\" data-end=\"4429\" \/>\n<h3 data-section-id=\"1hvvg8\" data-start=\"4431\" data-end=\"4459\">CVD et croissance \u00e9pitaxiale<\/h3>\n<p data-start=\"4461\" data-end=\"4474\">Convient pour :<\/p>\n<ul data-start=\"4476\" data-end=\"4559\">\n<li data-section-id=\"1qdjn95\" data-start=\"4476\" data-end=\"4489\">\u00c9pitaxie du SiC<\/li>\n<li data-section-id=\"1s4q3v5\" data-start=\"4490\" data-end=\"4502\">Croissance du GaN<\/li>\n<li data-section-id=\"19folxp\" data-start=\"4503\" data-end=\"4523\">D\u00e9p\u00f4t de silicium<\/li>\n<li data-section-id=\"1gymb61\" data-start=\"4524\" data-end=\"4559\">Traitement des semi-conducteurs compos\u00e9s<\/li>\n<\/ul>\n<p data-start=\"4561\" data-end=\"4617\">L'excellente r\u00e9sistance \u00e0 la corrosion des gaz prolonge la dur\u00e9e de vie.<\/p>\n<hr data-start=\"4619\" data-end=\"4622\" \/>\n<h3 data-section-id=\"6dvg1f\" data-start=\"4624\" data-end=\"4662\">Fabrication de SiC et de dispositifs de puissance<\/h3>\n<p data-start=\"4664\" data-end=\"4673\">Utilis\u00e9 pour :<\/p>\n<ul data-start=\"4675\" data-end=\"4752\">\n<li data-section-id=\"f7gyth\" data-start=\"4675\" data-end=\"4694\">Dispositifs de puissance SiC<\/li>\n<li data-section-id=\"70oxiw\" data-start=\"4695\" data-end=\"4707\">GaN-sur-SiC<\/li>\n<li data-section-id=\"120134d\" data-start=\"4708\" data-end=\"4727\">Production de MOSFET<\/li>\n<li data-section-id=\"goqf8g\" data-start=\"4728\" data-end=\"4752\">Modules de puissance avanc\u00e9s<\/li>\n<\/ul>\n<p data-start=\"4754\" data-end=\"4871\">Le coefficient de dilatation thermique correspond \u00e9troitement \u00e0 celui des plaquettes de SiC, ce qui r\u00e9duit les contraintes thermiques lors de la croissance \u00e0 haute temp\u00e9rature.<\/p>\n<hr data-start=\"4873\" data-end=\"4876\" \/>\n<h3 data-section-id=\"itwb0a\" data-start=\"4878\" data-end=\"4903\">Industrie photovolta\u00efque<\/h3>\n<p data-start=\"4905\" data-end=\"4918\">Convient pour :<\/p>\n<p data-start=\"4920\" data-end=\"4940\"><strong data-start=\"4920\" data-end=\"4940\">Cellules solaires PERC<\/strong><\/p>\n<p data-start=\"4942\" data-end=\"4989\">R\u00e9sistant aux environnements de diffusion du phosphore.<\/p>\n<p data-start=\"4991\" data-end=\"5012\"><strong data-start=\"4991\" data-end=\"5012\">TOPCon Production<\/strong><\/p>\n<p data-start=\"5014\" data-end=\"5063\">Stabilit\u00e9 des performances en cas de cycles thermiques r\u00e9p\u00e9t\u00e9s.<\/p>\n<p data-start=\"5065\" data-end=\"5098\"><strong data-start=\"5065\" data-end=\"5098\">Fabrication de panneaux solaires \u00e0 couche mince<\/strong><\/p>\n<p data-start=\"5100\" data-end=\"5162\">Excellente r\u00e9sistance \u00e0 la corrosion dans des atmosph\u00e8res complexes.<\/p>\n<p data-start=\"5164\" data-end=\"5216\">Compar\u00e9es aux barrettes en quartz, les barrettes en SiC offrent les avantages suivants<\/p>\n<ul data-start=\"5218\" data-end=\"5292\">\n<li data-section-id=\"8gshu6\" data-start=\"5218\" data-end=\"5239\">Dur\u00e9e de vie plus longue<\/li>\n<li data-section-id=\"2ks8i6\" data-start=\"5240\" data-end=\"5265\">R\u00e9duction des co\u00fbts de maintenance<\/li>\n<li data-section-id=\"54avg6\" data-start=\"5266\" data-end=\"5292\">Meilleure stabilit\u00e9 du processus<\/li>\n<\/ul>\n<hr data-start=\"5294\" data-end=\"5297\" \/>\n<h3 data-section-id=\"18oec1h\" data-start=\"5299\" data-end=\"5326\">LED et opto\u00e9lectronique<\/h3>\n<p data-start=\"5328\" data-end=\"5336\">Utilis\u00e9 dans :<\/p>\n<ul data-start=\"5338\" data-end=\"5396\">\n<li data-section-id=\"1765k2u\" data-start=\"5338\" data-end=\"5348\">Mini LED<\/li>\n<li data-section-id=\"u64zj3\" data-start=\"5349\" data-end=\"5360\">Micro LED<\/li>\n<li data-section-id=\"ii63cx\" data-start=\"5361\" data-end=\"5396\">Production de semi-conducteurs compos\u00e9s<\/li>\n<\/ul>\n<p data-start=\"5398\" data-end=\"5475\">La conception pr\u00e9cise des fentes r\u00e9duit les dommages aux bords des plaquettes et am\u00e9liore la s\u00e9curit\u00e9 de la manipulation.<\/p>\n<hr data-start=\"5477\" data-end=\"5480\" \/>\n<h2 data-section-id=\"1ipephu\" data-start=\"5482\" data-end=\"5516\">Bateau en c\u00e9ramique SiC et bateau en quartz<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"5518\" data-end=\"5813\">\n<thead data-start=\"5518\" data-end=\"5564\">\n<tr data-start=\"5518\" data-end=\"5564\">\n<th class=\"last:pe-10\" data-start=\"5518\" data-end=\"5534\" data-col-size=\"sm\">\u00c9l\u00e9ment de comparaison<\/th>\n<th class=\"last:pe-10\" data-start=\"5534\" data-end=\"5551\" data-col-size=\"sm\">Bateau en c\u00e9ramique SiC<\/th>\n<th class=\"last:pe-10\" data-start=\"5551\" data-end=\"5564\" data-col-size=\"sm\">Bateau en quartz<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"5581\" data-end=\"5813\">\n<tr data-start=\"5581\" data-end=\"5630\">\n<td data-start=\"5581\" data-end=\"5601\" data-col-size=\"sm\">Temp\u00e9rature maximale<\/td>\n<td data-start=\"5601\" data-end=\"5608\" data-col-size=\"sm\">1950\u00b0C<\/td>\n<td data-start=\"5608\" data-end=\"5630\" data-col-size=\"sm\">Environ 1250\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"5631\" data-end=\"5666\">\n<td data-start=\"5631\" data-end=\"5644\" data-col-size=\"sm\">Dur\u00e9e de vie<\/td>\n<td data-start=\"5644\" data-end=\"5655\" data-col-size=\"sm\">5-10 ans<\/td>\n<td data-start=\"5655\" data-end=\"5666\" data-col-size=\"sm\">1 \u00e0 2 ans<\/td>\n<\/tr>\n<tr data-start=\"5667\" data-end=\"5703\">\n<td data-start=\"5667\" data-end=\"5688\" data-col-size=\"sm\">Conductivit\u00e9 thermique<\/td>\n<td data-start=\"5688\" data-end=\"5698\" data-col-size=\"sm\">Excellent<\/td>\n<td data-start=\"5698\" data-end=\"5703\" data-col-size=\"sm\">Faible<\/td>\n<\/tr>\n<tr data-start=\"5704\" data-end=\"5743\">\n<td data-start=\"5704\" data-end=\"5724\" data-col-size=\"sm\">G\u00e9n\u00e9ration de particules<\/td>\n<td data-start=\"5724\" data-end=\"5733\" data-col-size=\"sm\">Tr\u00e8s faible<\/td>\n<td data-start=\"5733\" data-end=\"5743\" data-col-size=\"sm\">Mod\u00e9r\u00e9<\/td>\n<\/tr>\n<tr data-start=\"5744\" data-end=\"5782\">\n<td data-start=\"5744\" data-end=\"5764\" data-col-size=\"sm\">R\u00e9sistance chimique<\/td>\n<td data-start=\"5764\" data-end=\"5774\" data-col-size=\"sm\">Excellent<\/td>\n<td data-start=\"5774\" data-end=\"5782\" data-col-size=\"sm\">Moyen<\/td>\n<\/tr>\n<tr data-start=\"5783\" data-end=\"5813\">\n<td data-start=\"5783\" data-end=\"5803\" data-col-size=\"sm\">R\u00e9sistance m\u00e9canique<\/td>\n<td data-start=\"5803\" data-end=\"5808\" data-col-size=\"sm\">Haut<\/td>\n<td data-start=\"5808\" data-end=\"5813\" data-col-size=\"sm\">Faible<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<p data-start=\"5815\" data-end=\"5926\">Les bateaux en c\u00e9ramique SiC offrent une durabilit\u00e9 sup\u00e9rieure et des co\u00fbts d'exploitation r\u00e9duits pour la production de semi-conducteurs \u00e0 long terme.<\/p>\n<hr data-start=\"5928\" data-end=\"5931\" \/>\n<h2 data-section-id=\"tu863d\" data-start=\"5933\" data-end=\"5975\">Pourquoi choisir notre porte-bateau en c\u00e9ramique SiC ?<\/h2>\n<ul data-start=\"5977\" data-end=\"6215\">\n<li data-section-id=\"10r613b\" data-start=\"5977\" data-end=\"6010\">Mat\u00e9riau SiC de haute puret\u00e9 &gt;99.5%<\/li>\n<li data-section-id=\"171rsmm\" data-start=\"6011\" data-end=\"6043\">Capacit\u00e9 d'usinage de pr\u00e9cision<\/li>\n<li data-section-id=\"1j149w7\" data-start=\"6044\" data-end=\"6085\">Processus de fabrication \u00e0 faible contamination<\/li>\n<li data-section-id=\"apdpae\" data-start=\"6086\" data-end=\"6109\">Soutien \u00e0 la conception sur mesure<\/li>\n<li data-section-id=\"1wach9l\" data-start=\"6110\" data-end=\"6134\">Contr\u00f4le strict de la qualit\u00e9<\/li>\n<li data-section-id=\"14c4l4v\" data-start=\"6135\" data-end=\"6175\">Capacit\u00e9 de production stable \u00e0 long terme<\/li>\n<li data-section-id=\"180cuaf\" data-start=\"6176\" data-end=\"6215\">R\u00e9ponse rapide pour les projets personnalis\u00e9s<\/li>\n<\/ul>\n<p data-start=\"6217\" data-end=\"6352\">Notre \u00e9quipe d'ing\u00e9nieurs travaille en \u00e9troite collaboration avec nos clients pour d\u00e9velopper des solutions personnalis\u00e9es de manipulation des wafers pour des applications industrielles exigeantes.<\/p>\n<hr data-start=\"6354\" data-end=\"6357\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"6359\" data-end=\"6365\">FAQ<\/h2>\n<h3 data-section-id=\"tkuby5\" data-start=\"6367\" data-end=\"6409\">Q1 : Quelles tailles de plaquettes peuvent \u00eatre prises en charge ?<\/h3>\n<p data-start=\"6411\" data-end=\"6440\">Les tailles de plaquettes standard sont les suivantes<\/p>\n<ul data-start=\"6442\" data-end=\"6481\">\n<li data-section-id=\"16zlieh\" data-start=\"6442\" data-end=\"6454\">150mm (6\u2033)<\/li>\n<li data-section-id=\"9i3f41\" data-start=\"6455\" data-end=\"6467\">200mm (8\u2033)<\/li>\n<li data-section-id=\"1ejpu3f\" data-start=\"6468\" data-end=\"6481\">300mm (12\u2033)<\/li>\n<\/ul>\n<p data-start=\"6483\" data-end=\"6550\">Des dimensions personnalis\u00e9es sont disponibles en fonction des besoins du client.<\/p>\n<h3 data-section-id=\"z8p34v\" data-start=\"6552\" data-end=\"6604\">Q2 : La quantit\u00e9 et l'espacement des fentes peuvent-ils \u00eatre personnalis\u00e9s ?<\/h3>\n<p data-start=\"6606\" data-end=\"6628\">Oui. Nous pouvons personnaliser les produits :<\/p>\n<ul data-start=\"6630\" data-end=\"6716\">\n<li data-section-id=\"12oarjj\" data-start=\"6630\" data-end=\"6643\">Num\u00e9ro de l'emplacement<\/li>\n<li data-section-id=\"1h8wydm\" data-start=\"6644\" data-end=\"6656\">Pas de la fente<\/li>\n<li data-section-id=\"14oisy7\" data-start=\"6657\" data-end=\"6675\">Conception de la structure<\/li>\n<li data-section-id=\"gvudbt\" data-start=\"6676\" data-end=\"6695\">Traitement de surface<\/li>\n<li data-section-id=\"1oljaas\" data-start=\"6696\" data-end=\"6716\">Dimensions g\u00e9n\u00e9rales<\/li>\n<\/ul>\n<hr data-start=\"6718\" data-end=\"6721\" \/>\n<h3 data-section-id=\"2e6a8h\" data-start=\"6723\" data-end=\"6753\">Q3 : Quel est le d\u00e9lai d'ex\u00e9cution ?<\/h3>\n<p data-start=\"6755\" data-end=\"6773\">Produits standard :<\/p>\n<p data-start=\"6775\" data-end=\"6784\">4-6 semaines<\/p>\n<p data-start=\"6786\" data-end=\"6805\">Mod\u00e8les personnalis\u00e9s :<\/p>\n<p data-start=\"6807\" data-end=\"6817\">8-12 semaines<\/p>\n<p data-start=\"6819\" data-end=\"6862\">Le d\u00e9lai d'ex\u00e9cution peut varier en fonction de la complexit\u00e9.<\/p>\n<hr data-start=\"6864\" data-end=\"6867\" \/>\n<h3 data-section-id=\"ls9khi\" data-start=\"6869\" data-end=\"6928\">Q4 : Pourquoi choisir SiC plut\u00f4t que des bateaux en quartz ou en graphite ?<\/h3>\n<p data-start=\"6930\" data-end=\"6987\">Par rapport aux mat\u00e9riaux conventionnels, la c\u00e9ramique SiC offre :<\/p>\n<ul data-start=\"6989\" data-end=\"7135\">\n<li data-section-id=\"nekra8\" data-start=\"6989\" data-end=\"7019\">Temp\u00e9rature de fonctionnement plus \u00e9lev\u00e9e<\/li>\n<li data-section-id=\"1so6ntr\" data-start=\"7020\" data-end=\"7050\">Meilleur contr\u00f4le de la contamination<\/li>\n<li data-section-id=\"8gshu6\" data-start=\"7051\" data-end=\"7072\">Dur\u00e9e de vie plus longue<\/li>\n<li data-section-id=\"1iswh65\" data-start=\"7073\" data-end=\"7104\">Am\u00e9lioration de la r\u00e9sistance \u00e0 la corrosion<\/li>\n<li data-section-id=\"olbvcj\" data-start=\"7105\" data-end=\"7135\">R\u00e9sistance m\u00e9canique sup\u00e9rieure<\/li>\n<\/ul>\n<hr data-start=\"7137\" data-end=\"7140\" \/>\n<h3 data-section-id=\"17bhorh\" data-start=\"7142\" data-end=\"7192\">Q5 : Pouvez-vous fabriquer selon les dessins ?<\/h3>\n<p data-start=\"7194\" data-end=\"7295\">Oui. Nous prenons en charge la fabrication sur mesure \u00e0 partir de dessins, d'\u00e9chantillons ou de sp\u00e9cifications d\u00e9taill\u00e9es du client.<\/p>","protected":false},"excerpt":{"rendered":"<p>Le Customized Silicon Carbide (SiC) Ceramic Boat Carrier est une solution de support et de transport de plaquettes de silicium con\u00e7ue avec pr\u00e9cision pour les environnements de fabrication de semi-conducteurs \u00e0 haute temp\u00e9rature. Fabriqu\u00e9 \u00e0 partir de c\u00e9ramique SiC de haute puret\u00e9, ce support offre une excellente stabilit\u00e9 thermique, une r\u00e9sistance sup\u00e9rieure \u00e0 la corrosion, une grande r\u00e9sistance m\u00e9canique et une tr\u00e8s faible contamination.<\/p>","protected":false},"featured_media":2247,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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