{"id":2201,"date":"2026-05-15T06:27:55","date_gmt":"2026-05-15T06:27:55","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2201"},"modified":"2026-05-15T06:32:41","modified_gmt":"2026-05-15T06:32:41","slug":"sic-keramische-vakuumspannplatte-mit-hoher-ebenheit-fur-hybride-klebeanwendungen","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/de\/product\/high-flatness-sic-ceramic-vacuum-chuck-for-hybrid-bonding-applications\/","title":{"rendered":"SiC-Keramik-Vakuumspannplatte mit hoher Ebenheit f\u00fcr Hybrid-Bonding-Anwendungen"},"content":{"rendered":"<p data-start=\"769\" data-end=\"950\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2204 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Der SiC Vacuum Chuck f\u00fcr Wafer Bonding ist ein hochleistungsf\u00e4higes, keramisches Pr\u00e4zisions-Adsorptionsbauteil, das f\u00fcr fortschrittliche Halbleiterverpackungs- und Wafer Bonding-Anwendungen entwickelt wurde.<\/p>\n<p data-start=\"952\" data-end=\"1201\">Hergestellt aus hochreinem CVD-Siliziumkarbid (SiC) oder fortschrittlichen gesinterten SiC-Technologien, bietet diese Vakuum-Spannvorrichtung au\u00dfergew\u00f6hnliche thermische Stabilit\u00e4t, ultrahohe Steifigkeit und Oberfl\u00e4chenpr\u00e4zision im Submikrometerbereich f\u00fcr kritische Klebeprozesse.<\/p>\n<p data-start=\"1203\" data-end=\"1454\">Durch Pr\u00e4zisions-Vakuum-Adsorptionsstrukturen und ultraflache Oberfl\u00e4chenbearbeitung h\u00e4lt der Chuck Wafer sicher bei Wafer-to-Wafer (W2W), Chip-to-Wafer (C2W), Hybrid-Bonding, MEMS-Packaging und fortschrittlichen Halbleitermontageverfahren.<\/p>\n<p data-start=\"1456\" data-end=\"1626\">Die geringe thermische Ausdehnung und die \u00fcberragende Dimensionsstabilit\u00e4t gew\u00e4hrleisten eine genaue Positionierung der Wafer und minimieren gleichzeitig die thermische Verformung bei Prozessen mit hohen Temperaturen.<\/p>\n<hr data-start=\"1628\" data-end=\"1631\" \/>\n<h2 data-section-id=\"1ma7m6t\" data-start=\"1633\" data-end=\"1648\">Wesentliche Merkmale<\/h2>\n<h3 data-section-id=\"1ag5n0f\" data-start=\"1650\" data-end=\"1689\">Ultraflache Wafer-Adsorptionsfl\u00e4che<\/h3>\n<ul data-start=\"1691\" data-end=\"1822\">\n<li data-section-id=\"1squslp\" data-start=\"1691\" data-end=\"1718\">Ebenheit der Oberfl\u00e4che \u2264 1 \u03bcm<\/li>\n<li data-section-id=\"82w5jk\" data-start=\"1719\" data-end=\"1741\">Parallelit\u00e4t \u2264 1 \u03bcm<\/li>\n<li data-section-id=\"i3icbd\" data-start=\"1742\" data-end=\"1782\">Gew\u00e4hrleistet einen sehr gleichm\u00e4\u00dfigen Waferkontakt<\/li>\n<li data-section-id=\"10gawis\" data-start=\"1783\" data-end=\"1822\">Verbessert die Genauigkeit der Klebeausrichtung<\/li>\n<\/ul>\n<p data-start=\"1824\" data-end=\"1914\">Die spiegelglatte Oberfl\u00e4che minimiert lokale Spannungen und verringert die Verformung des Wafers w\u00e4hrend des Bondens.<\/p>\n<h3 data-section-id=\"1bjp15b\" data-start=\"1921\" data-end=\"1954\"><img decoding=\"async\" class=\"size-medium wp-image-2205 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/High-Flatness-SiC-Ceramic-Vacuum-Chuck-for-Hybrid-Bonding-Applications-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Ultraglattes Hochglanzpolieren<\/h3>\n<p data-start=\"1956\" data-end=\"1974\">Oberfl\u00e4chenrauhigkeit:<\/p>\n<p data-start=\"1976\" data-end=\"1992\">Ra \u2264 0,01 \u03bcm<\/p>\n<p data-start=\"1994\" data-end=\"2003\">Vorteile:<\/p>\n<ul data-start=\"2005\" data-end=\"2141\">\n<li data-section-id=\"14nn914\" data-start=\"2005\" data-end=\"2037\">Geringere Partikelverschmutzung<\/li>\n<li data-section-id=\"yvq0gc\" data-start=\"2038\" data-end=\"2075\">Verbesserte Leistung der Vakuumversiegelung<\/li>\n<li data-section-id=\"wg8ubp\" data-start=\"2076\" data-end=\"2101\">Stabile Wafer-Adsorption<\/li>\n<li data-section-id=\"1f2d1o7\" data-start=\"2102\" data-end=\"2141\">Halbleiter-Reinraumkompatibilit\u00e4t<\/li>\n<\/ul>\n<h3 data-section-id=\"1il5hua\" data-start=\"2148\" data-end=\"2181\">Au\u00dfergew\u00f6hnliche thermische Stabilit\u00e4t<\/h3>\n<p data-start=\"2183\" data-end=\"2208\">Siliziumkarbid weist auf:<\/p>\n<ul data-start=\"2210\" data-end=\"2322\">\n<li data-section-id=\"10kjbpo\" data-start=\"2210\" data-end=\"2260\">Niedriger W\u00e4rmeausdehnungskoeffizient (~4,5\u00d710-\u2076\/\u00b0C)<\/li>\n<li data-section-id=\"1yezcgi\" data-start=\"2261\" data-end=\"2288\">Hohe W\u00e4rmeleitf\u00e4higkeit<\/li>\n<li data-section-id=\"1yzox84\" data-start=\"2289\" data-end=\"2322\">Ausgezeichnete Dimensionsstabilit\u00e4t<\/li>\n<\/ul>\n<p data-start=\"2324\" data-end=\"2424\">Dadurch kann das Spannfutter auch bei hohen Temperaturen pr\u00e4zise positioniert werden.<\/p>\n<h3 data-section-id=\"1pd5p6e\" data-start=\"2431\" data-end=\"2459\">Hohe mechanische Steifigkeit<\/h3>\n<p data-start=\"2461\" data-end=\"2477\">Elastischer Modul:<\/p>\n<p data-start=\"2479\" data-end=\"2491\">&gt;400 GPa<\/p>\n<p data-start=\"2493\" data-end=\"2504\">Vorteile:<\/p>\n<ul data-start=\"2506\" data-end=\"2613\">\n<li data-section-id=\"1hg45f6\" data-start=\"2506\" data-end=\"2543\">Verhindert Verformung unter Druck<\/li>\n<li data-section-id=\"1ms13ye\" data-start=\"2544\" data-end=\"2582\">Unterst\u00fctzt hohe Wafer-Ladegenauigkeit<\/li>\n<li data-section-id=\"1ao73lw\" data-start=\"2583\" data-end=\"2613\">Verbessert die Prozesskonsistenz<\/li>\n<\/ul>\n<p data-start=\"2615\" data-end=\"2677\">Eine hohe Steifigkeit ist entscheidend f\u00fcr Ausrichtungsprozesse im Submikrometerbereich.<\/p>\n<h3 data-section-id=\"17thkoo\" data-start=\"2684\" data-end=\"2719\">Pr\u00e4zisions-Vakuumkanal-Design<\/h3>\n<p data-start=\"2721\" data-end=\"2760\">Hochpr\u00e4zise Vakuum-Nutbearbeitung:<\/p>\n<p data-start=\"2762\" data-end=\"2771\">Genauigkeit:<\/p>\n<p data-start=\"2773\" data-end=\"2782\">\u00b15 \u03bcm<\/p>\n<p data-start=\"2784\" data-end=\"2792\">Gew\u00e4hrleistet:<\/p>\n<ul data-start=\"2794\" data-end=\"2894\">\n<li data-section-id=\"1slsamk\" data-start=\"2794\" data-end=\"2833\">Gleichm\u00e4\u00dfige Adsorptionskraftverteilung<\/li>\n<li data-section-id=\"4ffymg\" data-start=\"2834\" data-end=\"2857\">Stabile Fixierung des Wafers<\/li>\n<li data-section-id=\"1ev6db4\" data-start=\"2858\" data-end=\"2894\">Geringere lokale Spannungskonzentration<\/li>\n<\/ul>\n<hr data-start=\"2896\" data-end=\"2899\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"2901\" data-end=\"2928\">Technische Daten<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2930\" data-end=\"3354\">\n<thead data-start=\"2930\" data-end=\"2954\">\n<tr data-start=\"2930\" data-end=\"2954\">\n<th class=\"last:pe-10\" data-start=\"2930\" data-end=\"2937\" data-col-size=\"sm\">Artikel<\/th>\n<th class=\"last:pe-10\" data-start=\"2937\" data-end=\"2954\" data-col-size=\"sm\">Spezifikation<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2965\" data-end=\"3354\">\n<tr data-start=\"2965\" data-end=\"3007\">\n<td data-start=\"2965\" data-end=\"2976\" data-col-size=\"sm\">Material<\/td>\n<td data-start=\"2976\" data-end=\"3007\" data-col-size=\"sm\">Hochreines Siliziumkarbid<\/td>\n<\/tr>\n<tr data-start=\"3008\" data-end=\"3033\">\n<td data-start=\"3008\" data-end=\"3021\" data-col-size=\"sm\">SiC-Reinheit<\/td>\n<td data-col-size=\"sm\" data-start=\"3021\" data-end=\"3033\">\u226599.999%<\/td>\n<\/tr>\n<tr data-start=\"3034\" data-end=\"3062\">\n<td data-start=\"3034\" data-end=\"3053\" data-col-size=\"sm\">Ebenheit der Oberfl\u00e4che<\/td>\n<td data-col-size=\"sm\" data-start=\"3053\" data-end=\"3062\">\u22641 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3063\" data-end=\"3098\">\n<td data-start=\"3063\" data-end=\"3083\" data-col-size=\"sm\">Oberfl\u00e4chenrauhigkeit<\/td>\n<td data-col-size=\"sm\" data-start=\"3083\" data-end=\"3098\">Ra \u22640,01 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3099\" data-end=\"3129\">\n<td data-start=\"3099\" data-end=\"3117\" data-col-size=\"sm\">Elastischer Modul<\/td>\n<td data-col-size=\"sm\" data-start=\"3117\" data-end=\"3129\">&gt;400 GPa<\/td>\n<\/tr>\n<tr data-start=\"3130\" data-end=\"3167\">\n<td data-start=\"3130\" data-end=\"3153\" data-col-size=\"sm\">W\u00e4rmeleitf\u00e4higkeit<\/td>\n<td data-col-size=\"sm\" data-start=\"3153\" data-end=\"3167\">~120 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"3168\" data-end=\"3192\">\n<td data-start=\"3168\" data-end=\"3178\" data-col-size=\"sm\">Dichte<\/td>\n<td data-col-size=\"sm\" data-start=\"3178\" data-end=\"3192\">\u22653,1 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"3193\" data-end=\"3215\">\n<td data-start=\"3193\" data-end=\"3199\" data-col-size=\"sm\">CTE<\/td>\n<td data-col-size=\"sm\" data-start=\"3199\" data-end=\"3215\">~4.5\u00d710-\u2076\/\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"3216\" data-end=\"3243\">\n<td data-start=\"3216\" data-end=\"3234\" data-col-size=\"sm\">Rillengenauigkeit<\/td>\n<td data-col-size=\"sm\" data-start=\"3234\" data-end=\"3243\">\u00b15 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3244\" data-end=\"3280\">\n<td data-start=\"3244\" data-end=\"3268\" data-col-size=\"sm\">Betriebstemperatur<\/td>\n<td data-col-size=\"sm\" data-start=\"3268\" data-end=\"3280\">RT-400\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"3281\" data-end=\"3320\">\n<td data-start=\"3281\" data-end=\"3301\" data-col-size=\"sm\">Oberfl\u00e4chenbehandlung<\/td>\n<td data-start=\"3301\" data-end=\"3320\" data-col-size=\"sm\">Hochglanzpoliert<\/td>\n<\/tr>\n<tr data-start=\"3321\" data-end=\"3354\">\n<td data-start=\"3321\" data-end=\"3334\" data-col-size=\"sm\">Wafer Gr\u00f6\u00dfe<\/td>\n<td data-start=\"3334\" data-end=\"3354\" data-col-size=\"sm\">Benutzerdefiniert verf\u00fcgbar<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3356\" data-end=\"3359\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3361\" data-end=\"3376\">Anwendungen<\/h2>\n<h3 data-section-id=\"wjbzos\" data-start=\"3378\" data-end=\"3414\">Fortschrittliches Halbleiter-Packaging<\/h3>\n<p data-start=\"3416\" data-end=\"3431\"><img decoding=\"async\" class=\"size-medium wp-image-2207 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-300x174.png\" alt=\"\" width=\"300\" height=\"174\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-300x174.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-18x10.png 18w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590-600x349.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/20250922113244_25590.png 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Weit verbreitet in:<\/p>\n<ul data-start=\"3433\" data-end=\"3600\">\n<li data-section-id=\"123uv47\" data-start=\"3433\" data-end=\"3465\">Wafer-zu-Wafer-Verbindung (W2W)<\/li>\n<li data-section-id=\"c7s92\" data-start=\"3466\" data-end=\"3497\">Chip-to-Wafer (C2W)-Bonding<\/li>\n<li data-section-id=\"1bqwewz\" data-start=\"3498\" data-end=\"3516\">Hybride Bindung<\/li>\n<li data-section-id=\"1nykrz3\" data-start=\"3517\" data-end=\"3554\">Cu-Cu Thermokompressionsverfahren<\/li>\n<li data-section-id=\"35sgx6\" data-start=\"3555\" data-end=\"3574\">3D-IC-Verpackung<\/li>\n<li data-section-id=\"at340r\" data-start=\"3575\" data-end=\"3600\">System-in-Package (SiP)<\/li>\n<\/ul>\n<h3 data-section-id=\"1a9kliv\" data-start=\"3607\" data-end=\"3632\">MEMS-Bauelemente-Verpackung<\/h3>\n<p data-start=\"3634\" data-end=\"3668\">Bietet eine stabile Waferauflage f\u00fcr:<\/p>\n<ul data-start=\"3670\" data-end=\"3730\">\n<li data-section-id=\"1sdgegm\" data-start=\"3670\" data-end=\"3688\">Vakuumverklebung<\/li>\n<li data-section-id=\"1qjfpoh\" data-start=\"3689\" data-end=\"3707\">Anodische Bindung<\/li>\n<li data-section-id=\"dbgga8\" data-start=\"3708\" data-end=\"3730\">Sensor-Kapselung<\/li>\n<\/ul>\n<p data-start=\"3732\" data-end=\"3822\">Die starre Struktur sch\u00fctzt empfindliche MEMS-Bauteile vor thermischer oder mechanischer Verformung.<\/p>\n<h3 data-section-id=\"1qt18ux\" data-start=\"3829\" data-end=\"3860\">Leistungshalbleiterger\u00e4te<\/h3>\n<p data-start=\"3862\" data-end=\"3875\">Geeignet f\u00fcr:<\/p>\n<ul data-start=\"3877\" data-end=\"3966\">\n<li data-section-id=\"mfu7zo\" data-start=\"3877\" data-end=\"3901\">SiC-Modul-Verpackung<\/li>\n<li data-section-id=\"1yt7ywp\" data-start=\"3902\" data-end=\"3931\">Montage von GaN-Leistungsbauelementen<\/li>\n<li data-section-id=\"p9njc8\" data-start=\"3932\" data-end=\"3952\">Sintern von Silber<\/li>\n<li data-section-id=\"18yr1fr\" data-start=\"3953\" data-end=\"3966\">TLP-Klebung<\/li>\n<\/ul>\n<p data-start=\"3968\" data-end=\"4024\">Hervorragende thermische Stabilit\u00e4t gew\u00e4hrleistet Prozesskonsistenz.<\/p>\n<h3 data-section-id=\"14di4ch\" data-start=\"4031\" data-end=\"4070\">Photonik und Mikro-LED-Herstellung<\/h3>\n<p data-start=\"4072\" data-end=\"4081\">Unterst\u00fctzt:<\/p>\n<ul data-start=\"4083\" data-end=\"4204\">\n<li data-section-id=\"1gtpe27\" data-start=\"4083\" data-end=\"4113\">Mikro-LED-\u00dcbertragungssysteme<\/li>\n<li data-section-id=\"12uwywl\" data-start=\"4114\" data-end=\"4139\">Glas-Silizium-Verbindungen<\/li>\n<li data-section-id=\"6a950i\" data-start=\"4140\" data-end=\"4170\">Integration optischer Ger\u00e4te<\/li>\n<li data-section-id=\"1gp423q\" data-start=\"4171\" data-end=\"4204\">Pr\u00e4zise Substratpositionierung<\/li>\n<\/ul>\n<hr data-start=\"4206\" data-end=\"4209\" \/>\n<h2 data-section-id=\"dysc5y\" data-start=\"4211\" data-end=\"4232\">Produktvorteile<\/h2>\n<ul data-start=\"4234\" data-end=\"4547\">\n<li data-section-id=\"um7u8k\" data-start=\"4234\" data-end=\"4268\">Ultrahochreines SiC-Material<\/li>\n<li data-section-id=\"t9txjh\" data-start=\"4269\" data-end=\"4295\">Ebenheit der Oberfl\u00e4che \u22641 \u03bcm<\/li>\n<li data-section-id=\"1qzleq6\" data-start=\"4296\" data-end=\"4334\">Hochglanzpolierte Adsorptionsfl\u00e4che<\/li>\n<li data-section-id=\"1bdmggy\" data-start=\"4335\" data-end=\"4366\">Ausgezeichnete thermische Stabilit\u00e4t<\/li>\n<li data-section-id=\"ivfffh\" data-start=\"4367\" data-end=\"4398\">Hohe Steifigkeit und Festigkeit<\/li>\n<li data-section-id=\"ua0354\" data-start=\"4399\" data-end=\"4429\">Geringe Partikelverschmutzung<\/li>\n<li data-section-id=\"bp2qqs\" data-start=\"4430\" data-end=\"4468\">Pr\u00e4zisions-Vakuum-Kanalbearbeitung<\/li>\n<li data-section-id=\"xszix1\" data-start=\"4469\" data-end=\"4517\">Geeignet f\u00fcr anspruchsvolle Verpackungsumgebungen<\/li>\n<li data-section-id=\"y0lwwo\" data-start=\"4518\" data-end=\"4547\">Kundenspezifische Geometrie verf\u00fcgbar<\/li>\n<\/ul>\n<hr data-start=\"4549\" data-end=\"4552\" \/>\n<h2 data-section-id=\"rnyyeg\" data-start=\"4554\" data-end=\"4578\">Anpassungsoptionen<\/h2>\n<p data-start=\"4580\" data-end=\"4664\">Wir bieten vollst\u00e4ndige OEM\/ODM-Anpassung auf der Grundlage von Zeichnungen oder Anwendungsanforderungen:<\/p>\n<ul data-start=\"4666\" data-end=\"4878\">\n<li data-section-id=\"6tm948\" data-start=\"4666\" data-end=\"4690\">Kundenspezifische Wafer-Durchmesser<\/li>\n<li data-section-id=\"1vfjaam\" data-start=\"4691\" data-end=\"4714\">Vakuum-Nut-Layouts<\/li>\n<li data-section-id=\"13s8suu\" data-start=\"4715\" data-end=\"4740\">Strukturen mit Durchgangsl\u00f6chern<\/li>\n<li data-section-id=\"1wmws68\" data-start=\"4741\" data-end=\"4767\">Optionen f\u00fcr das Spiegelpolieren<\/li>\n<li data-section-id=\"cox5s3\" data-start=\"4768\" data-end=\"4794\">Spezielle Adsorptionszonen<\/li>\n<li data-section-id=\"1bbm77i\" data-start=\"4795\" data-end=\"4825\">Reinigung in Halbleiterqualit\u00e4t<\/li>\n<li data-section-id=\"14z4bjj\" data-start=\"4826\" data-end=\"4849\">Ultraflache Verarbeitung<\/li>\n<li data-section-id=\"1udm0ti\" data-start=\"4850\" data-end=\"4878\">Komplexe keramische Geometrien<\/li>\n<\/ul>\n<p data-start=\"4880\" data-end=\"4980\">Alle Produkte k\u00f6nnen in Reinraumumgebungen der Klasse 100 f\u00fcr Halbleiteranwendungen verpackt werden.<\/p>\n<hr data-start=\"4982\" data-end=\"4985\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"4987\" data-end=\"4993\">FAQ<\/h2>\n<h3 data-section-id=\"u7k6ec\" data-start=\"4995\" data-end=\"5059\">F1: Warum SiC anstelle von Aluminium- oder Quarz-Vakuumspannplatten verwenden?<\/h3>\n<p data-start=\"5061\" data-end=\"5072\">SiC bietet:<\/p>\n<ul data-start=\"5074\" data-end=\"5212\">\n<li data-section-id=\"1y67fsp\" data-start=\"5074\" data-end=\"5101\">Geringere W\u00e4rmeausdehnung<\/li>\n<li data-section-id=\"1slmg84\" data-start=\"5102\" data-end=\"5121\">H\u00f6here Steifigkeit<\/li>\n<li data-section-id=\"trt37b\" data-start=\"5122\" data-end=\"5155\">Bessere Temperaturbest\u00e4ndigkeit<\/li>\n<li data-section-id=\"1i25w4v\" data-start=\"5156\" data-end=\"5186\">Geringeres Kontaminationsrisiko<\/li>\n<li data-section-id=\"13ilisr\" data-start=\"5187\" data-end=\"5212\">L\u00e4ngere Betriebsdauer<\/li>\n<\/ul>\n<h3 data-section-id=\"cwo9dr\" data-start=\"5219\" data-end=\"5265\">F2: Welche Klebeverfahren werden unterst\u00fctzt?<\/h3>\n<p data-start=\"5267\" data-end=\"5283\">Kompatibel mit:<\/p>\n<ul data-start=\"5285\" data-end=\"5380\">\n<li data-section-id=\"14kpzzx\" data-start=\"5285\" data-end=\"5300\">W2W-Bindung<\/li>\n<li data-section-id=\"1uhw6eh\" data-start=\"5301\" data-end=\"5316\">C2W-Klebung<\/li>\n<li data-section-id=\"1bqwewz\" data-start=\"5317\" data-end=\"5335\">Hybride Bindung<\/li>\n<li data-section-id=\"8fmkq0\" data-start=\"5336\" data-end=\"5365\">Thermokompressionskleben<\/li>\n<li data-section-id=\"cd7995\" data-start=\"5366\" data-end=\"5380\">MEMS-Kleben<\/li>\n<\/ul>\n<h3 data-section-id=\"sqhas4\" data-start=\"5387\" data-end=\"5437\">F3: K\u00f6nnen kundenspezifische Vakuumrillen hergestellt werden?<\/h3>\n<p data-start=\"5439\" data-end=\"5530\">Ja. Rillenmuster, Lochanordnungen, Adsorptionsbereiche und Abmessungen k\u00f6nnen individuell angepasst werden.<\/p>\n<h3 data-section-id=\"1lhq4ur\" data-start=\"5537\" data-end=\"5587\">F4: Ist eine Reinigung in Halbleiterqualit\u00e4t verf\u00fcgbar?<\/h3>\n<p data-start=\"5589\" data-end=\"5665\">Ja. Die Produkte k\u00f6nnen unter Reinraumbedingungen der Klasse 100 gereinigt und verpackt werden.<\/p>","protected":false},"excerpt":{"rendered":"<p data-start=\"769\" data-end=\"950\">Der SiC Vacuum Chuck f\u00fcr Wafer Bonding ist ein hochleistungsf\u00e4higes, keramisches Pr\u00e4zisions-Adsorptionsbauteil, das f\u00fcr fortschrittliche Halbleiterverpackungs- und Wafer Bonding-Anwendungen entwickelt wurde.<\/p>\n<p data-start=\"952\" data-end=\"1201\">Hergestellt aus hochreinem CVD-Siliziumkarbid (SiC) oder fortschrittlichen gesinterten SiC-Technologien, bietet diese Vakuum-Spannvorrichtung au\u00dfergew\u00f6hnliche thermische Stabilit\u00e4t, ultrahohe Steifigkeit und Oberfl\u00e4chenpr\u00e4zision im Submikrometerbereich f\u00fcr kritische Klebeprozesse.<\/p>","protected":false},"featured_media":2206,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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