{"id":2322,"date":"2026-05-29T02:28:31","date_gmt":"2026-05-29T02:28:31","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&p=2322"},"modified":"2026-05-29T02:44:45","modified_gmt":"2026-05-29T02:44:45","slug":"silicon-carbide-cantilever-paddle-for-semiconductor-photovoltaic-high-temperature-furnace-systems","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/cs\/product\/silicon-carbide-cantilever-paddle-for-semiconductor-photovoltaic-high-temperature-furnace-systems\/","title":{"rendered":"Karbid k\u0159em\u00edku - konzolov\u00e1 lopatka pro vysokoteplotn\u00ed pecn\u00ed syst\u00e9my pro polovodi\u010de a fotovoltaiku"},"content":{"rendered":"

\"\"Karbid k\u0159em\u00edku Cantilever Paddle (SiC Cantilever Paddle) je vysoce v\u00fdkonn\u00e1 konstruk\u010dn\u00ed sou\u010d\u00e1st vyroben\u00e1 z reak\u010dn\u011b v\u00e1zan\u00e9ho karbidu k\u0159em\u00edku (RB-SiC). Je navr\u017eena speci\u00e1ln\u011b pro vysokoteplotn\u00ed za\u0159\u00edzen\u00ed na zpracov\u00e1n\u00ed polovodi\u010d\u016f a fotovoltaick\u00fdch panel\u016f a poskytuje vynikaj\u00edc\u00ed tepelnou stabilitu, mechanickou pevnost, odolnost proti korozi a rozm\u011brovou p\u0159esnost v extr\u00e9mn\u00edch provozn\u00edch podm\u00ednk\u00e1ch.<\/p>\n

D\u00edky sv\u00e9 konzolov\u00e9 konstrukci m\u016f\u017ee lopatka bezpe\u010dn\u011b podp\u00edrat a p\u0159epravovat v\u00edce desti\u010dek uvnit\u0159 difuzn\u00edch pec\u00ed, oxida\u010dn\u00edch pec\u00ed, syst\u00e9m\u016f LPCVD a za\u0159\u00edzen\u00ed pro nan\u00e1\u0161en\u00ed povlak\u016f. V porovn\u00e1n\u00ed s b\u011b\u017en\u00fdmi k\u0159emenn\u00fdmi nebo kovov\u00fdmi nosn\u00fdmi syst\u00e9my nab\u00edzej\u00ed konzolov\u00e1 p\u00e1dla SiC v\u00fdrazn\u011b del\u0161\u00ed \u017eivotnost, ni\u017e\u0161\u00ed riziko kontaminace a vy\u0161\u0161\u00ed odolnost v\u016f\u010di tepeln\u00fdm deformac\u00edm.<\/p>\n

D\u00edky n\u00edzk\u00e9mu koeficientu tepeln\u00e9 rozta\u017enosti a vysok\u00e9 tepeln\u00e9 vodivosti si lopatka zachov\u00e1v\u00e1 vynikaj\u00edc\u00ed struktur\u00e1ln\u00ed integritu b\u011bhem opakovan\u00fdch cykl\u016f oh\u0159evu a chlazen\u00ed, tak\u017ee je ide\u00e1ln\u00ed pro nep\u0159etr\u017eit\u00e9 pr\u016fmyslov\u00e9 v\u00fdrobn\u00ed prost\u0159ed\u00ed s vysok\u00fdmi teplotami.<\/p>\n

\n
\n<\/div>\n

Kl\u00ed\u010dov\u00e9 vlastnosti SiC konzolov\u00e9ho p\u00e1dla<\/h2>\n

Vynikaj\u00edc\u00ed odolnost proti vysok\u00fdm teplot\u00e1m<\/h3>\n

SiC konzolov\u00e1 lopatka m\u016f\u017ee pracovat nep\u0159etr\u017eit\u011b p\u0159i teplot\u00e1ch a\u017e 1380 \u00b0C bez deformace nebo struktur\u00e1ln\u00edho selh\u00e1n\u00ed. D\u00edky tomu je velmi vhodn\u00e1 pro difuzn\u00ed, oxida\u010dn\u00ed, nitrida\u010dn\u00ed, \u017e\u00edhac\u00ed a LPCVD procesy pracuj\u00edc\u00ed p\u0159i teplot\u00e1ch 1000-1300 \u00b0C.<\/p>\n

Vynikaj\u00edc\u00ed mechanick\u00e1 pevnost<\/h3>\n

Materi\u00e1l RB-SiC poskytuje v\u00fdjime\u010dnou pevnost v ohybu a tuhost i p\u0159i zv\u00fd\u0161en\u00fdch teplot\u00e1ch. Stabiln\u00ed konstrukce pr\u016f\u0159ezu zaji\u0161\u0165uje spolehlivou podporu desti\u010dek o velk\u00e9m pr\u016fm\u011bru a z\u00e1rove\u0148 minimalizuje vibrace a proh\u00fdb\u00e1n\u00ed b\u011bhem provozu pece.<\/p>\n

Velmi n\u00edzk\u00e1 kontaminace<\/h3>\n

Na rozd\u00edl od kovov\u00fdch nosi\u010d\u016f neuvol\u0148uje karbid k\u0159em\u00edku p\u0159i vysokoteplotn\u00edm zpracov\u00e1n\u00ed kovov\u00e9 ionty nebo \u010d\u00e1stice. To pom\u00e1h\u00e1 udr\u017eovat \u010distotu desti\u010dek a zlep\u0161uje v\u00fdt\u011b\u017enost v\u00fdroby polovodi\u010d\u016f.<\/p>\n

Vynikaj\u00edc\u00ed odolnost proti teplotn\u00edm \u0161ok\u016fm<\/h3>\n

Lopatka odol\u00e1v\u00e1 rychl\u00fdm cykl\u016fm zah\u0159\u00edv\u00e1n\u00ed a ochlazov\u00e1n\u00ed, ani\u017e by praskla nebo se zdeformovala. Jej\u00ed vysok\u00e1 odolnost proti tepeln\u00fdm \u0161ok\u016fm v\u00fdrazn\u011b prodlu\u017euje provozn\u00ed \u017eivotnost a sni\u017euje \u010detnost \u00fadr\u017eby.<\/p>\n

Vynikaj\u00edc\u00ed odolnost proti korozi<\/h3>\n

Materi\u00e1l SiC vykazuje vynikaj\u00edc\u00ed odolnost v\u016f\u010di kyselin\u00e1m, louh\u016fm, oxidaci a korozivn\u00edm procesn\u00edm plyn\u016fm, tak\u017ee je vhodn\u00fd do n\u00e1ro\u010dn\u00fdch podm\u00ednek chemick\u00e9ho zpracov\u00e1n\u00ed.<\/p>\n

Kompatibilita procesu LPCVD<\/h3>\n

Koeficient tepeln\u00e9 rozta\u017enosti karbidu k\u0159em\u00edku se bl\u00ed\u017e\u00ed b\u011b\u017en\u00fdm povlakov\u00fdm materi\u00e1l\u016fm LPCVD, co\u017e \u00fa\u010dinn\u011b sni\u017euje tepeln\u00e9 nam\u00e1h\u00e1n\u00ed, delaminaci povlaku a kontaminaci \u010d\u00e1sticemi.<\/p>\n

Dlouh\u00e1 \u017eivotnost<\/h3>\n

V porovn\u00e1n\u00ed s k\u0159emenn\u00fdmi a kovov\u00fdmi lopatkami nab\u00edzej\u00ed SiC konzolov\u00e9 lopatky v\u00fdrazn\u011b lep\u0161\u00ed \u017eivotnost a ni\u017e\u0161\u00ed \u010detnost v\u00fdm\u011bny, co\u017e sni\u017euje dlouhodob\u00e9 provozn\u00ed n\u00e1klady.<\/p>\n

\n
\n<\/div>\n

Technick\u00e9 specifikace<\/h2>\n\n\n\n\n\n\n\n\n\n\n\n\n
Polo\u017eka<\/th>\nJednotka<\/th>\nData<\/th>\n<\/tr>\n
Maxim\u00e1ln\u00ed provozn\u00ed teplota<\/td>\n\u2103<\/td>\n1380<\/td>\n<\/tr>\n
Hustota<\/td>\ng\/cm\u00b3<\/td>\n3.04\u20133.08<\/td>\n<\/tr>\n
Otev\u0159en\u00e1 p\u00f3rovitost<\/td>\n%<\/td>\n<0.1<\/td>\n<\/tr>\n
Pevnost v ohybu<\/td>\nMPa<\/td>\n250 (20\u2103) \/ 280 (1200\u2103)<\/td>\n<\/tr>\n
Modul pru\u017enosti<\/td>\nGPa<\/td>\n330 (20\u2103) \/ 300 (1200\u2103)<\/td>\n<\/tr>\n
Tepeln\u00e1 vodivost<\/td>\nW\/m-K<\/td>\n45 (1200\u2103)<\/td>\n<\/tr>\n
Koeficient tepeln\u00e9 rozta\u017enosti<\/td>\nK-\u00b9\u00d710-\u2076<\/td>\n4.5<\/td>\n<\/tr>\n
Tvrdost (Vickers)<\/td>\nHV2<\/td>\n\u22652100<\/td>\n<\/tr>\n
Odolnost v\u016f\u010di kyselin\u00e1m a z\u00e1sad\u00e1m<\/td>\n\u2014<\/td>\nVynikaj\u00edc\u00ed<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n
\n<\/div>\n

Standardn\u00ed rozm\u011bry<\/h2>\n

K dispozici jsou standardn\u00ed d\u00e9lky:<\/p>\n

    \n
  • 2378 mm<\/li>\n
  • 2550 mm<\/li>\n
  • 2660 mm<\/li>\n<\/ul>\n

    Podle n\u00e1vrh\u016f pec\u00ed a procesn\u00edch po\u017eadavk\u016f z\u00e1kazn\u00edka jsou k dispozici vlastn\u00ed velikosti, struktury \u0161t\u011brbin, kapacity desti\u010dek a konfigurace mont\u00e1\u017ee.<\/p>\n

    \n
    \n<\/div>\n

    Typick\u00e9 aplikace<\/h2>\n

    \"\"Polovodi\u010dov\u00fd pr\u016fmysl<\/h3>\n

    SiC konzolov\u00e9 lopatky se \u0161iroce pou\u017e\u00edvaj\u00ed v procesech v\u00fdroby polovodi\u010d\u016f, v\u010detn\u011b:<\/p>\n

      \n
    • Dif\u00faze desti\u010dek<\/li>\n
    • Oxidace<\/li>\n
    • LPCVD depozice<\/li>\n
    • Nitridace<\/li>\n
    • \u017d\u00edh\u00e1n\u00ed<\/li>\n
    • P\u0159eprava a nakl\u00e1d\u00e1n\u00ed oplatek<\/li>\n<\/ul>\n

      Jejich vysok\u00e1 \u010distota a rozm\u011brov\u00e1 stabilita pom\u00e1haj\u00ed sni\u017eovat rizika kontaminace a zlep\u0161uj\u00ed konzistenci procesu.<\/p>\n

      \"\"Fotovoltaick\u00fd pr\u016fmysl<\/h3>\n

      P\u0159i v\u00fdrob\u011b sol\u00e1rn\u00edch \u010dl\u00e1nk\u016f slou\u017e\u00ed lopatka jako vysokoteplotn\u00ed nosi\u010d desti\u010dek pro:<\/p>\n

        \n
      • Polykrystalick\u00e9 k\u0159em\u00edkov\u00e9 desti\u010dky<\/li>\n
      • Monokrystalick\u00e9 k\u0159em\u00edkov\u00e9 desti\u010dky<\/li>\n
      • Difuzn\u00ed pece<\/li>\n
      • PECVD a povlakovac\u00ed syst\u00e9my<\/li>\n<\/ul>\n

        Materi\u00e1l si zachov\u00e1v\u00e1 stabilitu p\u0159i opakovan\u00fdch tepeln\u00fdch cyklech, kter\u00e9 se b\u011b\u017en\u011b vyskytuj\u00ed ve fotovoltaick\u00fdch v\u00fdrobn\u00edch link\u00e1ch.<\/p>\n

        Chemick\u00e9 a pr\u016fmyslov\u00e9 aplikace<\/h3>\n

        D\u00edky vynikaj\u00edc\u00ed odolnosti proti korozi lze SiC konzolov\u00e9 p\u00e1dlo pou\u017e\u00edt tak\u00e9 v:<\/p>\n

          \n
        • \u017d\u00edrav\u00e9 chemick\u00e9 reaktory<\/li>\n
        • Vysokoteplotn\u00ed ob\u011bhov\u00e9 syst\u00e9my<\/li>\n
        • Za\u0159\u00edzen\u00ed pro pr\u016fmyslov\u00e9 tepeln\u00e9 zpracov\u00e1n\u00ed<\/li>\n
        • Agresivn\u00ed plynn\u00e9 prost\u0159ed\u00ed<\/li>\n<\/ul>\n
          \n
          \n<\/div>\n

          V\u00fdhody ve srovn\u00e1n\u00ed s kovov\u00fdmi nebo k\u0159emenn\u00fdmi p\u00e1dly<\/h2>\n\n\n\n\n\n\n\n\n\n\n
          Majetek<\/td>\nSiC p\u00e1dlo<\/td>\nK\u0159emenn\u00e9 p\u00e1dlo<\/td>\nKovov\u00e9 p\u00e1dlo<\/td>\n<\/tr>\n
          Odolnost proti vysok\u00fdm teplot\u00e1m<\/td>\nVynikaj\u00edc\u00ed<\/td>\nM\u00edrn\u00e1<\/td>\nM\u00edrn\u00e1<\/td>\n<\/tr>\n
          Odolnost proti teplotn\u00edm \u0161ok\u016fm<\/td>\nVynikaj\u00edc\u00ed<\/td>\n\u0160patn\u00fd<\/td>\nM\u00edrn\u00e1<\/td>\n<\/tr>\n
          Odolnost proti korozi<\/td>\nVynikaj\u00edc\u00ed<\/td>\nDobr\u00fd<\/td>\n\u0160patn\u00fd<\/td>\n<\/tr>\n
          Mechanick\u00e1 pevnost<\/td>\nVelmi vysok\u00e1<\/td>\nN\u00edzk\u00e1<\/td>\nVysok\u00e1<\/td>\n<\/tr>\n
          Kontaminace \u010d\u00e1sticemi<\/td>\nVelmi n\u00edzk\u00e1<\/td>\nM\u00edrn\u00e1<\/td>\nVysok\u00e1<\/td>\n<\/tr>\n
          \u017divotnost<\/td>\nLong<\/td>\nKr\u00e1tk\u00e9<\/td>\nM\u00edrn\u00e1<\/td>\n<\/tr>\n
          Velk\u00e1 podpora oplatek<\/td>\nVynikaj\u00edc\u00ed<\/td>\nOmezen\u00e9<\/td>\nM\u00edrn\u00e1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
          \n
          \n<\/div>\n

          \u010casto kladen\u00e9 ot\u00e1zky - Karbid k\u0159em\u00edku Cantilever Paddle<\/h2>\n

          1. Jak\u00e1 je maxim\u00e1ln\u00ed provozn\u00ed teplota?<\/h3>\n

          Maxim\u00e1ln\u00ed provozn\u00ed teplota je 1380 \u00b0C. Spolehliv\u011b funguje p\u0159i vysokoteplotn\u00edch procesech v oblasti polovodi\u010d\u016f a fotovoltaiky v rozmez\u00ed 1000-1300 \u00b0C.<\/p>\n

          2. Pro\u010d zvolit karbid k\u0159em\u00edku m\u00edsto kovov\u00fdch lopatek?<\/h3>\n

          Kovov\u00e9 lopatky mohou p\u0159i vysok\u00fdch teplot\u00e1ch oxidovat, deformovat se nebo uvol\u0148ovat kovov\u00e9 ne\u010distoty. Karbid k\u0159em\u00edku nab\u00edz\u00ed vynikaj\u00edc\u00ed tvrdost, tepelnou stabilitu, odolnost proti korozi a velmi n\u00edzkou \u00farove\u0148 zne\u010di\u0161t\u011bn\u00ed.<\/p>\n

          3. Je lopatka vhodn\u00e1 pro velk\u00e9 oplatky, jako jsou 12palcov\u00e9 oplatky?<\/h3>\n

          Ano. Konzolov\u00e1 konstrukce a vysok\u00e1 mechanick\u00e1 pevnost umo\u017e\u0148uj\u00ed stabiln\u00ed podep\u0159en\u00ed desti\u010dek o velk\u00e9m pr\u016fm\u011bru p\u0159i zachov\u00e1n\u00ed rozm\u011brov\u00e9 p\u0159esnosti.<\/p>\n

          4. Lze jej p\u0159izp\u016fsobit?<\/h3>\n

          Ano. Na z\u00e1klad\u011b po\u017eadavk\u016f z\u00e1kazn\u00edka jsou k dispozici vlastn\u00ed rozm\u011bry, tlou\u0161\u0165ky, kapacity desti\u010dek, proveden\u00ed dr\u00e1\u017eek a mont\u00e1\u017en\u00ed struktury.<\/p>\n

           <\/p>","protected":false},"excerpt":{"rendered":"

          Karbid k\u0159em\u00edku Cantilever Paddle je pokro\u010dil\u00e9 vysokoteplotn\u00ed \u0159e\u0161en\u00ed nosi\u010de pro polovodi\u010de, fotovoltaiku a pr\u016fmyslov\u00e9 pece. Kombinuje v\u00fdjime\u010dnou tepelnou stabilitu, vysokou mechanickou pevnost, odolnost proti korozi a vlastnosti s velmi n\u00edzk\u00fdm zne\u010di\u0161t\u011bn\u00edm a poskytuje spolehliv\u00fd v\u00fdkon p\u0159i manipulaci s desti\u010dkami v n\u00e1ro\u010dn\u00fdch procesn\u00edch prost\u0159ed\u00edch.<\/p>\n

          D\u00edky p\u0159izp\u016fsobiteln\u00fdm rozm\u011br\u016fm a kompatibilit\u011b s modern\u00edmi difuzn\u00edmi a LPCVD syst\u00e9my se SiC konzolov\u00e9 lopatky st\u00e1vaj\u00ed nezbytnou sou\u010d\u00e1st\u00ed pro vysokoteplotn\u00ed v\u00fdrobn\u00ed procesy nov\u00e9 generace.<\/p>","protected":false},"featured_media":2323,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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