{"id":2100,"date":"2026-05-12T03:59:56","date_gmt":"2026-05-12T03:59:56","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2100"},"modified":"2026-05-12T03:59:56","modified_gmt":"2026-05-12T03:59:56","slug":"customized-sic-ceramic-end-effector-for-wafer-handling","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/cs\/product\/customized-sic-ceramic-end-effector-for-wafer-handling\/","title":{"rendered":"Keramick\u00fd koncov\u00fd efektor SiC na m\u00edru pro manipulaci s oplatkami"},"content":{"rendered":"<p data-start=\"737\" data-end=\"989\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2101 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Keramick\u00fd koncov\u00fd efektor z karbidu k\u0159em\u00edku (SiC) je vysoce p\u0159esn\u00e1 sou\u010d\u00e1stka pro manipulaci s desti\u010dkami ur\u010den\u00e1 pro polovodi\u010dov\u00e9 automatiza\u010dn\u00ed syst\u00e9my, v\u010detn\u011b robot\u016f pro p\u0159enos desti\u010dek, syst\u00e9m\u016f AMHS, za\u0159\u00edzen\u00ed pro EUV litografii a vysokoteplotn\u00edch procesn\u00edch n\u00e1stroj\u016f.<\/p>\n<p data-start=\"991\" data-end=\"1308\">Tento koncov\u00fd efektor je vyroben z vysoce \u010dist\u00e9ho CVD SiC nebo upraven\u00e9ho SSiC a vyzna\u010duje se v\u00fdjime\u010dnou tuhost\u00ed, velmi n\u00edzkou tvorbou \u010d\u00e1stic a vynikaj\u00edc\u00ed tepelnou a chemickou stabilitou. Je \u0161iroce pou\u017e\u00edv\u00e1n v 300mm a pokro\u010dil\u00fdch uzlech polovodi\u010dov\u00fdch tov\u00e1ren, kde je kontrola kontaminace a p\u0159esnost polohov\u00e1n\u00ed kritick\u00e1.<\/p>\n<p data-start=\"1310\" data-end=\"1470\">V porovn\u00e1n\u00ed s tradi\u010dn\u00edmi hlin\u00edkov\u00fdmi nebo k\u0159emenn\u00fdmi koncov\u00fdmi efektory \u0159e\u0161en\u00ed z keramiky SiC v\u00fdrazn\u011b zlep\u0161uj\u00ed stabilitu procesu, bezpe\u010dnost desti\u010dek a \u017eivotnost za\u0159\u00edzen\u00ed.<\/p>\n<hr data-start=\"1472\" data-end=\"1475\" \/>\n<h2 data-section-id=\"ruuu6i\" data-start=\"1477\" data-end=\"1494\">Hlavn\u00ed v\u00fdhody<\/h2>\n<h3 data-section-id=\"1igp1it\" data-start=\"1496\" data-end=\"1532\">Velmi n\u00edzk\u00e1 kontaminace \u010d\u00e1sticemi<\/h3>\n<ul data-start=\"1533\" data-end=\"1664\">\n<li data-section-id=\"1lx1qmw\" data-start=\"1533\" data-end=\"1587\">Generov\u00e1n\u00ed \u010d\u00e1stic: &lt;(v souladu s normou SEMI F57).<\/li>\n<li data-section-id=\"8gkyog\" data-start=\"1588\" data-end=\"1618\">\u017d\u00e1dn\u00e1 kontaminace kovov\u00fdmi ionty<\/li>\n<li data-section-id=\"m28nyw\" data-start=\"1619\" data-end=\"1664\">Ide\u00e1ln\u00ed pro procesy EUV a pokro\u010dil\u00e9 uzly<\/li>\n<\/ul>\n<hr data-start=\"1666\" data-end=\"1669\" \/>\n<h3 data-section-id=\"nha58o\" data-start=\"1671\" data-end=\"1710\">Vysok\u00e1 tuhost a p\u0159esn\u00e1 stabilita<\/h3>\n<ul data-start=\"1711\" data-end=\"1837\">\n<li data-section-id=\"n58wtx\" data-start=\"1711\" data-end=\"1740\">Young\u016fv modul: ~420 GPa<\/li>\n<li data-section-id=\"wiw01d\" data-start=\"1741\" data-end=\"1790\">Zabra\u0148uje nesouososti desti\u010dek zp\u016fsoben\u00e9 vibracemi<\/li>\n<li data-section-id=\"kx1hzh\" data-start=\"1791\" data-end=\"1837\">Zaji\u0161\u0165uje stabiln\u00ed vysokorychlostn\u00ed robotick\u00fd p\u0159enos<\/li>\n<\/ul>\n<hr data-start=\"1839\" data-end=\"1842\" \/>\n<h3 data-section-id=\"2ge170\" data-start=\"1844\" data-end=\"1875\">Vynikaj\u00edc\u00ed tepeln\u00e1 stabilita<\/h3>\n<ul data-start=\"1876\" data-end=\"2015\">\n<li data-section-id=\"ibg0yp\" data-start=\"1876\" data-end=\"1927\">Provozn\u00ed teplota: a\u017e 1600 \u00b0C (oxida\u010dn\u00ed)<\/li>\n<li data-section-id=\"1e7mmjn\" data-start=\"1928\" data-end=\"1963\">Do 1950 \u00b0C (inertn\u00ed atmosf\u00e9ra)<\/li>\n<li data-section-id=\"j5ees9\" data-start=\"1964\" data-end=\"2015\">Vhodn\u00e9 pro extr\u00e9mn\u00ed prost\u0159ed\u00ed polovodi\u010d\u016f<\/li>\n<\/ul>\n<hr data-start=\"2017\" data-end=\"2020\" \/>\n<h3 data-section-id=\"1twxua8\" data-start=\"2022\" data-end=\"2063\">Vynikaj\u00edc\u00ed odolnost proti chemik\u00e1li\u00edm a plazmatu<\/h3>\n<ul data-start=\"2064\" data-end=\"2212\">\n<li data-section-id=\"x6lsw\" data-start=\"2064\" data-end=\"2120\">Odolnost v\u016f\u010di kyselin\u00e1m, louh\u016fm a plazmov\u00e9mu prost\u0159ed\u00ed.<\/li>\n<li data-section-id=\"1c1d6qm\" data-start=\"2121\" data-end=\"2169\">\u017d\u00e1dn\u00e1 koroze v CVD \/ PVD \/ leptac\u00edch komor\u00e1ch<\/li>\n<li data-section-id=\"1o7zcce\" data-start=\"2170\" data-end=\"2212\">Stabiln\u00ed v procesn\u00edch plynech SiH\u2084, NH\u2083, HCl<\/li>\n<\/ul>\n<hr data-start=\"2214\" data-end=\"2217\" \/>\n<h3 data-section-id=\"14bamzt\" data-start=\"2219\" data-end=\"2252\">Bez opot\u0159eben\u00ed a s dlouhou \u017eivotnost\u00ed<\/h3>\n<ul data-start=\"2253\" data-end=\"2380\">\n<li data-section-id=\"10g9b8f\" data-start=\"2253\" data-end=\"2283\">Tvrdost podle Vickerse: ~2800 HV<\/li>\n<li data-section-id=\"14dvdy4\" data-start=\"2284\" data-end=\"2335\">\u017d\u00e1dn\u00fd \u00falet \u010d\u00e1stic p\u0159i dlouhodob\u00e9m provozu<\/li>\n<li data-section-id=\"12rqc97\" data-start=\"2336\" data-end=\"2380\">Vynikaj\u00edc\u00ed odolnost povrchu (Ra &lt; 0,2 \u03bcm)<\/li>\n<\/ul>\n<hr data-start=\"2382\" data-end=\"2385\" \/>\n<h2 data-section-id=\"1xqplm3\" data-start=\"2387\" data-end=\"2418\">Konstruk\u010dn\u00ed a designov\u00e9 prvky<\/h2>\n<h3 data-section-id=\"1nh5g76\" data-start=\"2420\" data-end=\"2457\">P\u0159esn\u00e1 geometrie manipulace s desti\u010dkami<\/h3>\n<p data-start=\"2458\" data-end=\"2467\">Podporuje:<\/p>\n<ul data-start=\"2468\" data-end=\"2596\">\n<li data-section-id=\"15tpg53\" data-start=\"2468\" data-end=\"2508\">150mm \/ 200mm \/ 300mm \/ 450mm desti\u010dky<\/li>\n<li data-section-id=\"1rnwp5m\" data-start=\"2509\" data-end=\"2563\">Konstrukce pro uchopen\u00ed hran \/ vyrovn\u00e1n\u00ed z\u00e1\u0159ez\u016f \/ ploch\u00e9 podp\u011bry<\/li>\n<li data-section-id=\"qm27un\" data-start=\"2564\" data-end=\"2596\">Integrace robotick\u00e9ho ramene na zak\u00e1zku<\/li>\n<\/ul>\n<hr data-start=\"2598\" data-end=\"2601\" \/>\n<h3 data-section-id=\"1yw23gm\" data-start=\"2603\" data-end=\"2643\">Lehk\u00e1 konstrukce s vysokou tuhost\u00ed<\/h3>\n<ul data-start=\"2644\" data-end=\"2768\">\n<li data-section-id=\"tt3pyh\" data-start=\"2644\" data-end=\"2677\">Vysok\u00fd pom\u011br tuhosti k hmotnosti<\/li>\n<li data-section-id=\"1sb17em\" data-start=\"2678\" data-end=\"2721\">Vhodn\u00e9 pro vysokorychlostn\u00ed robotick\u00e9 syst\u00e9my<\/li>\n<li data-section-id=\"1j6yie2\" data-start=\"2722\" data-end=\"2768\">Minimalizuje dynamick\u00e9 vych\u00fdlen\u00ed b\u011bhem pohybu<\/li>\n<\/ul>\n<hr data-start=\"2770\" data-end=\"2773\" \/>\n<h3 data-section-id=\"97w9la\" data-start=\"2775\" data-end=\"2809\">Zpracov\u00e1n\u00ed ultra\u010dist\u00e9ho povrchu<\/h3>\n<ul data-start=\"2810\" data-end=\"2905\">\n<li data-section-id=\"1lu1i7j\" data-start=\"2810\" data-end=\"2844\">P\u0159esn\u00e9 brou\u0161en\u00ed a le\u0161t\u011bn\u00ed<\/li>\n<li data-section-id=\"1amctgl\" data-start=\"2845\" data-end=\"2870\">N\u00edzk\u00e1 drsnost povrchu<\/li>\n<li data-section-id=\"1js4nxo\" data-start=\"2871\" data-end=\"2905\">Konstrukce kompatibiln\u00ed s \u010dist\u00fdmi prostory<\/li>\n<\/ul>\n<hr data-start=\"2907\" data-end=\"2910\" \/>\n<h3 data-section-id=\"50i47d\" data-start=\"2912\" data-end=\"2944\">Vlastn\u00ed technick\u00e9 rozhran\u00ed<\/h3>\n<ul data-start=\"2945\" data-end=\"3063\">\n<li data-section-id=\"1dle0c1\" data-start=\"2945\" data-end=\"2981\">Kompatibilita s ramenem robota<\/li>\n<li data-section-id=\"19fhsyz\" data-start=\"2982\" data-end=\"3018\">Integrace OEM pro syst\u00e9my AMHS<\/li>\n<li data-section-id=\"3wahd3\" data-start=\"3019\" data-end=\"3063\">Vlastn\u00ed pozice otvor\u016f a konstrukce p\u0159\u00edpravk\u016f<\/li>\n<\/ul>\n<hr data-start=\"3065\" data-end=\"3068\" \/>\n<h2 data-section-id=\"rb24ym\" data-start=\"3070\" data-end=\"3089\">Mo\u017enosti materi\u00e1lu<\/h2>\n<h3 data-section-id=\"87v3o9\" data-start=\"3091\" data-end=\"3124\">CVD karbid k\u0159em\u00edku (CVD SiC)<\/h3>\n<ul data-start=\"3125\" data-end=\"3232\">\n<li data-section-id=\"1qjlbs6\" data-start=\"3125\" data-end=\"3146\">Velmi vysok\u00e1 \u010distota<\/li>\n<li data-section-id=\"1856ohe\" data-start=\"3147\" data-end=\"3198\">Nejlep\u0161\u00ed pro EUV \/ pokro\u010dil\u00e9 polovodi\u010dov\u00e9 procesy<\/li>\n<li data-section-id=\"1lwpzbt\" data-start=\"3199\" data-end=\"3232\">Velmi n\u00edzk\u00e1 \u00farove\u0148 kontaminace<\/li>\n<\/ul>\n<hr data-start=\"3234\" data-end=\"3237\" \/>\n<h3 data-section-id=\"gwj4n0\" data-start=\"3239\" data-end=\"3274\">Slinut\u00fd karbid k\u0159em\u00edku (SSiC)<\/h3>\n<ul data-start=\"3275\" data-end=\"3402\">\n<li data-section-id=\"1hi8oju\" data-start=\"3275\" data-end=\"3312\">Vysok\u00e1 pevnost a odolnost proti opot\u0159eben\u00ed<\/li>\n<li data-section-id=\"1rnk9x7\" data-start=\"3313\" data-end=\"3363\">Vhodn\u00e9 pro pr\u016fmyslov\u00e9 syst\u00e9my manipulace s desti\u010dkami<\/li>\n<li data-section-id=\"67fp04\" data-start=\"3364\" data-end=\"3402\">Vynikaj\u00edc\u00ed pom\u011br n\u00e1klad\u016f a v\u00fdkonu<\/li>\n<\/ul>\n<hr data-start=\"3404\" data-end=\"3407\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"3409\" data-end=\"3436\">Technick\u00e9 specifikace<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3438\" data-end=\"3888\">\n<thead data-start=\"3438\" data-end=\"3462\">\n<tr data-start=\"3438\" data-end=\"3462\">\n<th class=\"last:pe-10\" data-start=\"3438\" data-end=\"3445\" data-col-size=\"sm\">Polo\u017eka<\/th>\n<th class=\"last:pe-10\" data-start=\"3445\" data-end=\"3462\" data-col-size=\"sm\">Specifikace<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3487\" data-end=\"3888\">\n<tr data-start=\"3487\" data-end=\"3516\">\n<td data-start=\"3487\" data-end=\"3498\" data-col-size=\"sm\">Materi\u00e1l<\/td>\n<td data-col-size=\"sm\" data-start=\"3498\" data-end=\"3516\">CVD SiC \/ SSiC<\/td>\n<\/tr>\n<tr data-start=\"3517\" data-end=\"3536\">\n<td data-start=\"3517\" data-end=\"3526\" data-col-size=\"sm\">Purity<\/td>\n<td data-start=\"3526\" data-end=\"3536\" data-col-size=\"sm\">&gt;99.5%<\/td>\n<\/tr>\n<tr data-start=\"3537\" data-end=\"3561\">\n<td data-start=\"3537\" data-end=\"3550\" data-col-size=\"sm\">Velikost zrna<\/td>\n<td data-col-size=\"sm\" data-start=\"3550\" data-end=\"3561\">4-10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"3562\" data-end=\"3587\">\n<td data-start=\"3562\" data-end=\"3572\" data-col-size=\"sm\">Hustota<\/td>\n<td data-col-size=\"sm\" data-start=\"3572\" data-end=\"3587\">&gt;3,14 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"3588\" data-end=\"3611\">\n<td data-start=\"3588\" data-end=\"3599\" data-col-size=\"sm\">Tvrdost<\/td>\n<td data-col-size=\"sm\" data-start=\"3599\" data-end=\"3611\">~2800 HV<\/td>\n<\/tr>\n<tr data-start=\"3612\" data-end=\"3643\">\n<td data-start=\"3612\" data-end=\"3632\" data-col-size=\"sm\">Pevnost v ohybu<\/td>\n<td data-col-size=\"sm\" data-start=\"3632\" data-end=\"3643\">450 MPa<\/td>\n<\/tr>\n<tr data-start=\"3644\" data-end=\"3673\">\n<td data-start=\"3644\" data-end=\"3662\" data-col-size=\"sm\">Modul pru\u017enosti<\/td>\n<td data-col-size=\"sm\" data-start=\"3662\" data-end=\"3673\">420 GPa<\/td>\n<\/tr>\n<tr data-start=\"3674\" data-end=\"3710\">\n<td data-start=\"3674\" data-end=\"3697\" data-col-size=\"sm\">Tepeln\u00e1 vodivost<\/td>\n<td data-col-size=\"sm\" data-start=\"3697\" data-end=\"3710\">160 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"3711\" data-end=\"3768\">\n<td data-start=\"3711\" data-end=\"3729\" data-col-size=\"sm\">Maxim\u00e1ln\u00ed teplota<\/td>\n<td data-col-size=\"sm\" data-start=\"3729\" data-end=\"3768\">1600 \u00b0C (oxidace) \/ 1950 \u00b0C (inertn\u00ed)<\/td>\n<\/tr>\n<tr data-start=\"3769\" data-end=\"3810\">\n<td data-start=\"3769\" data-end=\"3794\" data-col-size=\"sm\">Elektrick\u00fd odpor<\/td>\n<td data-col-size=\"sm\" data-start=\"3794\" data-end=\"3810\">10\u2076-10\u2078 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"3811\" data-end=\"3851\">\n<td data-start=\"3811\" data-end=\"3828\" data-col-size=\"sm\">Povrchov\u00e1 \u00faprava<\/td>\n<td data-col-size=\"sm\" data-start=\"3828\" data-end=\"3851\">Velmi jemn\u00e9 le\u0161t\u011bn\u00ed<\/td>\n<\/tr>\n<tr data-start=\"3852\" data-end=\"3888\">\n<td data-start=\"3852\" data-end=\"3859\" data-col-size=\"sm\">Velikost<\/td>\n<td data-start=\"3859\" data-end=\"3888\" data-col-size=\"sm\">Na zak\u00e1zku (150-450mm desti\u010dky)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3890\" data-end=\"3893\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3895\" data-end=\"3910\">Aplikace<\/h2>\n<h3 data-section-id=\"6yu2ul\" data-start=\"3912\" data-end=\"3943\">V\u00fdroba polovodi\u010d\u016f<\/h3>\n<ul data-start=\"3944\" data-end=\"4097\">\n<li data-section-id=\"49bdmt\" data-start=\"3944\" data-end=\"3978\">Manipulace s desti\u010dkami p\u0159i EUV litografii<\/li>\n<li data-section-id=\"11xdzhh\" data-start=\"3979\" data-end=\"4017\">Robotick\u00e9 syst\u00e9my pro p\u0159enos 300mm desti\u010dek<\/li>\n<li data-section-id=\"ox84z0\" data-start=\"4018\" data-end=\"4060\">Automatizace CVD \/ PVD \/ leptac\u00ed komory<\/li>\n<li data-section-id=\"teg2xm\" data-start=\"4061\" data-end=\"4097\">P\u0159eprava iontov\u00fdch implant\u00e1t\u016f na desti\u010dky<\/li>\n<\/ul>\n<hr data-start=\"4099\" data-end=\"4102\" \/>\n<h3 data-section-id=\"sf9357\" data-start=\"4104\" data-end=\"4140\">Pokro\u010dil\u00e9 polovodi\u010dov\u00e9 materi\u00e1ly<\/h3>\n<ul data-start=\"4141\" data-end=\"4248\">\n<li data-section-id=\"iiuum6\" data-start=\"4141\" data-end=\"4176\">Manipulace s v\u00fdkonov\u00fdmi za\u0159\u00edzen\u00edmi SiC<\/li>\n<li data-section-id=\"se94ot\" data-start=\"4177\" data-end=\"4211\">V\u00fdrobn\u00ed syst\u00e9my pro epitaxi GaN<\/li>\n<li data-section-id=\"3yciq1\" data-start=\"4212\" data-end=\"4248\">Vysokoteplotn\u00ed procesy MOCVD<\/li>\n<\/ul>\n<hr data-start=\"4250\" data-end=\"4253\" \/>\n<h3 data-section-id=\"11khwnl\" data-start=\"4255\" data-end=\"4286\">Fotovoltaick\u00fd a LED pr\u016fmysl<\/h3>\n<ul data-start=\"4287\" data-end=\"4389\">\n<li data-section-id=\"q29bxq\" data-start=\"4287\" data-end=\"4319\">Automatiza\u010dn\u00ed linky na sol\u00e1rn\u00ed desti\u010dky<\/li>\n<li data-section-id=\"10mww1v\" data-start=\"4320\" data-end=\"4361\">P\u0159enosov\u00e9 syst\u00e9my Micro-LED \/ Mini-LED<\/li>\n<li data-section-id=\"dp5vhg\" data-start=\"4362\" data-end=\"4389\">Manipulace se saf\u00edrov\u00fdmi desti\u010dkami<\/li>\n<\/ul>\n<hr data-start=\"4391\" data-end=\"4394\" \/>\n<h3 data-section-id=\"j366yc\" data-start=\"4396\" data-end=\"4428\">Automatizace a robotika (AMHS)<\/h3>\n<ul data-start=\"4429\" data-end=\"4533\">\n<li data-section-id=\"fpj2it\" data-start=\"4429\" data-end=\"4459\">Ramena robot\u016f pro p\u0159epravu desti\u010dek<\/li>\n<li data-section-id=\"e4e8u3\" data-start=\"4460\" data-end=\"4492\">Syst\u00e9my automatizace \u010dist\u00fdch prostor<\/li>\n<li data-section-id=\"k0rhy6\" data-start=\"4493\" data-end=\"4533\">Vysokorychlostn\u00ed syst\u00e9my pro manipulaci s materi\u00e1lem<\/li>\n<\/ul>\n<hr data-start=\"4535\" data-end=\"4538\" \/>\n<h3 data-section-id=\"1c5bbdr\" data-start=\"4540\" data-end=\"4573\">V\u00fdzkum a \u0161pi\u010dkov\u00e9 vybaven\u00ed<\/h3>\n<ul data-start=\"4574\" data-end=\"4679\">\n<li data-section-id=\"1sbej07\" data-start=\"4574\" data-end=\"4604\">V\u00fdroba kvantov\u00fdch za\u0159\u00edzen\u00ed<\/li>\n<li data-section-id=\"5u37w7\" data-start=\"4605\" data-end=\"4641\">Kryogenn\u00ed syst\u00e9my pro manipulaci s desti\u010dkami<\/li>\n<li data-section-id=\"i12e24\" data-start=\"4642\" data-end=\"4679\">Pokro\u010dil\u00e9 balen\u00ed (3D IC \/ MEMS)<\/li>\n<\/ul>\n<hr data-start=\"4681\" data-end=\"4684\" \/>\n<h2 data-section-id=\"vm5qii\" data-start=\"4686\" data-end=\"4715\">Shrnut\u00ed v\u00fdhod produktu<\/h2>\n<ul data-start=\"4717\" data-end=\"4996\">\n<li data-section-id=\"r4wmoo\" data-start=\"4717\" data-end=\"4750\">Nulov\u00e9 riziko kontaminace kovy<\/li>\n<li data-section-id=\"w80eyq\" data-start=\"4751\" data-end=\"4797\">Velmi vysok\u00e1 tuhost pro p\u0159esnou manipulaci<\/li>\n<li data-section-id=\"ovhb2l\" data-start=\"4798\" data-end=\"4842\">Vynikaj\u00edc\u00ed tepeln\u00e1 a chemick\u00e1 stabilita<\/li>\n<li data-section-id=\"1pry50x\" data-start=\"4843\" data-end=\"4878\">Dlouh\u00e1 \u017eivotnost s minim\u00e1ln\u00edm opot\u0159eben\u00edm<\/li>\n<li data-section-id=\"16clm2x\" data-start=\"4879\" data-end=\"4919\">Kompatibiln\u00ed s automatizac\u00ed \u010dist\u00fdch prostor<\/li>\n<li data-section-id=\"1usfebt\" data-start=\"4920\" data-end=\"4956\">Mo\u017enost p\u0159izp\u016fsoben\u00ed pro v\u0161echny velikosti oplatek<\/li>\n<li data-section-id=\"whnxc2\" data-start=\"4957\" data-end=\"4996\">Vhodn\u00e9 pro EUV a pokro\u010dil\u00e9 uzly<\/li>\n<\/ul>\n<hr data-start=\"4998\" data-end=\"5001\" \/>\n<h2 data-section-id=\"rnyyeg\" data-start=\"5003\" data-end=\"5027\">Mo\u017enosti p\u0159izp\u016fsoben\u00ed<img decoding=\"async\" class=\"size-medium wp-image-2102 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/h2>\n<p data-start=\"5029\" data-end=\"5067\">Podporujeme \u00fapln\u00e9 p\u0159izp\u016fsoben\u00ed OEM\/ODM:<\/p>\n<ul data-start=\"5069\" data-end=\"5319\">\n<li data-section-id=\"pzy3qt\" data-start=\"5069\" data-end=\"5127\">Geometrie koncov\u00e9ho efektoru (ploch\u00fd \/ \u00fachop na hran\u011b \/ zarovn\u00e1n\u00ed z\u00e1\u0159ez\u016f)<\/li>\n<li data-section-id=\"173oufn\" data-start=\"5128\" data-end=\"5168\">Kompatibilita s velikost\u00ed desti\u010dek (150-450 mm)<\/li>\n<li data-section-id=\"1sh3bgb\" data-start=\"5169\" data-end=\"5195\">N\u00e1vrh rozhran\u00ed robota<\/li>\n<li data-section-id=\"1ma3ck\" data-start=\"5196\" data-end=\"5252\">Povrchov\u00e1 \u00faprava (antistatick\u00e1 \/ hydrofobn\u00ed voliteln\u011b)<\/li>\n<li data-section-id=\"7mw706\" data-start=\"5253\" data-end=\"5289\">Optimalizace p\u0159esn\u00e9 tolerance<\/li>\n<li data-section-id=\"w4j63d\" data-start=\"5290\" data-end=\"5319\">Povrchov\u00e1 \u00faprava v \u010dist\u00fdch prostor\u00e1ch<\/li>\n<\/ul>\n<hr data-start=\"5321\" data-end=\"5324\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"5326\" data-end=\"5332\">\u010cASTO KLADEN\u00c9 DOTAZY<\/h2>\n<h3 data-section-id=\"1mpzh4o\" data-start=\"5334\" data-end=\"5384\">Ot\u00e1zka 1: Pro\u010d pou\u017e\u00edvat SiC m\u00edsto hlin\u00edku nebo k\u0159emene?<\/h3>\n<ul data-start=\"5385\" data-end=\"5556\">\n<li data-section-id=\"1xvhlf0\" data-start=\"5385\" data-end=\"5437\">Hlin\u00edk: tvorba \u010d\u00e1stic + probl\u00e9my s oxidac\u00ed<\/li>\n<li data-section-id=\"1q7gghy\" data-start=\"5438\" data-end=\"5489\">K\u0159emen: k\u0159ehk\u00fd + \u0161patn\u00e1 odolnost proti tepeln\u00fdm \u0161ok\u016fm<\/li>\n<li data-section-id=\"vgt2b3\" data-start=\"5490\" data-end=\"5556\">SiC: nejlep\u0161\u00ed kombinace tuhosti, \u010distoty a trvanlivosti<\/li>\n<\/ul>\n<hr data-start=\"5558\" data-end=\"5561\" \/>\n<h3 data-section-id=\"1cxfupn\" data-start=\"5563\" data-end=\"5599\">Ot\u00e1zka 2: M\u016f\u017ee podporovat 450mm wafery?<\/h3>\n<p data-start=\"5600\" data-end=\"5667\">Ano, pro syst\u00e9my pro manipulaci s 450mm desti\u010dkami jsou k dispozici zak\u00e1zkov\u00e9 konstrukce.<\/p>\n<hr data-start=\"5669\" data-end=\"5672\" \/>\n<h3 data-section-id=\"a4nxop\" data-start=\"5674\" data-end=\"5717\">Ot\u00e1zka 3: Je vhodn\u00fd pro EUV litografii?<\/h3>\n<p data-start=\"5718\" data-end=\"5803\">Ano, koncov\u00e9 efektory SiC spl\u0148uj\u00ed po\u017eadavky na kompatibilitu s ultra n\u00edzk\u00fdmi emisemi \u010d\u00e1stic a vakuem.<\/p>\n<hr data-start=\"5805\" data-end=\"5808\" \/>\n<h3 data-section-id=\"1ajqsm3\" data-start=\"5810\" data-end=\"5872\">Ot\u00e1zka 4: Lze jej pou\u017e\u00edt ve vakuov\u00fdch a vysokoteplotn\u00edch syst\u00e9mech?<\/h3>\n<p data-start=\"5873\" data-end=\"5951\">Ano, SiC stabiln\u011b funguje ve vakuu, plazmatu a vysokoteplotn\u00edm prost\u0159ed\u00ed.<\/p>","protected":false},"excerpt":{"rendered":"<p>The Silicon Carbide (SiC) Ceramic End Effector is a high-precision wafer handling component designed for semiconductor automation systems, including wafer transfer robots, AMHS systems, EUV lithography equipment, and high-temperature process tools. Made from high-purity CVD SiC or engineered SSiC, this end effector delivers exceptional rigidity, ultra-low particle generation, and outstanding thermal and chemical stability. It [&hellip;]<\/p>\n","protected":false},"featured_media":2104,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[23],"product_tag":[192,191,190,193,194,195,188,104,189,187],"class_list":["post-2100","product","type-product","status-publish","has-post-thumbnail","product_cat-silicon-carbide-sic","product_tag-300mm-wafer-robot-arm","product_tag-amhs-wafer-transfer-tool","product_tag-cvd-sic-end-effector","product_tag-euv-wafer-handling-component","product_tag-high-precision-ceramic-end-effector","product_tag-semiconductor-automation-parts","product_tag-semiconductor-robot-arm","product_tag-sic-ceramic-end-effector","product_tag-silicon-carbide-wafer-handler","product_tag-wafer-handling-end-effector","desktop-align-left","tablet-align-left","mobile-align-left","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/product\/2100","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/comments?post=2100"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/media\/2104"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/media?parent=2100"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/product_brand?post=2100"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/product_cat?post=2100"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/product_tag?post=2100"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}