{"id":2041,"date":"2026-05-08T05:45:52","date_gmt":"2026-05-08T05:45:52","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&p=2041"},"modified":"2026-05-08T05:45:52","modified_gmt":"2026-05-08T05:45:52","slug":"sic-ceramic-end-effector-for-precision-wafer-handling-in-semiconductor-equipment","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/cs\/product\/sic-ceramic-end-effector-for-precision-wafer-handling-in-semiconductor-equipment\/","title":{"rendered":"Keramick\u00fd koncov\u00fd efektor SiC pro p\u0159esnou manipulaci s desti\u010dkami v polovodi\u010dov\u00fdch za\u0159\u00edzen\u00edch"},"content":{"rendered":"

\"\"Na str\u00e1nk\u00e1ch Keramick\u00fd koncov\u00fd efektor SiC<\/strong> je vysoce v\u00fdkonn\u00e1 sou\u010d\u00e1stka pro manipulaci s desti\u010dkami ur\u010den\u00e1 pro automatizaci polovodi\u010d\u016f a p\u0159esn\u00e9 robotick\u00e9 syst\u00e9my. Vyr\u00e1b\u00ed se z velmi \u010dist\u00e9ho karbidu k\u0159em\u00edku (SiC), kter\u00fd nab\u00edz\u00ed vynikaj\u00edc\u00ed mechanickou pevnost, tepelnou stabilitu a chemickou odolnost v extr\u00e9mn\u00edch procesn\u00edch prost\u0159ed\u00edch.<\/p>\n

V porovn\u00e1n\u00ed s b\u011b\u017en\u00fdmi koncov\u00fdmi efektory z hlin\u00edku, nerezov\u00e9 oceli nebo k\u0159emene jsou koncov\u00e9 efektory Keramick\u00fd koncov\u00fd efektor SiC<\/strong> poskytuje v\u00fdrazn\u011b ni\u017e\u0161\u00ed tvorbu \u010d\u00e1stic, vynikaj\u00edc\u00ed rozm\u011brovou stabilitu a vynikaj\u00edc\u00ed odolnost proti tepeln\u00e9 deformaci. Je \u0161iroce pou\u017e\u00edv\u00e1n v syst\u00e9mech p\u0159enosu desti\u010dek, kde je rozhoduj\u00edc\u00ed p\u0159esnost, \u010distota a spolehlivost.<\/p>\n

Tento v\u00fdrobek je vhodn\u00fd pro pokro\u010dil\u00e9 prost\u0159ed\u00ed v\u00fdroby polovodi\u010d\u016f v\u010detn\u011b vakuov\u00fdch komor, plazmov\u00fdch proces\u016f a vysokoteplotn\u00edch za\u0159\u00edzen\u00ed.<\/p>\n

\n

Technick\u00e9 specifikace<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Majetek<\/th>\nJednotka<\/th>\nHodnota<\/th>\n<\/tr>\n<\/thead>\n
Krystalov\u00e1 struktura<\/td>\n-<\/td>\nFCC \u03b2 F\u00e1ze<\/td>\n<\/tr>\n
Hustota<\/td>\ng\/cm\u00b3<\/td>\n3.21<\/td>\n<\/tr>\n
Chemick\u00e1 \u010distota<\/td>\n%<\/td>\n99.99995<\/td>\n<\/tr>\n
Tvrdost<\/td>\nHV<\/td>\n2500<\/td>\n<\/tr>\n
Pevnost v ohybu<\/td>\nMPa<\/td>\n415<\/td>\n<\/tr>\n
Young\u016fv modul<\/td>\nGPa<\/td>\n430<\/td>\n<\/tr>\n
Tepeln\u00e1 vodivost<\/td>\nW\/m-K<\/td>\n300<\/td>\n<\/tr>\n
Koeficient tepeln\u00e9 rozta\u017enosti<\/td>\n10-\u2076\/K<\/td>\n4.5<\/td>\n<\/tr>\n
Maxim\u00e1ln\u00ed provozn\u00ed teplota<\/td>\n\u00b0C<\/td>\n2700<\/td>\n<\/tr>\n
Tepeln\u00e1 kapacita<\/td>\nJ-kg-\u00b9-K-\u00b9<\/td>\n640<\/td>\n<\/tr>\n
Velikost zrna<\/td>\n\u03bcm<\/td>\n2-10<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

\"\"Kl\u00ed\u010dov\u00e9 vlastnosti<\/h2>\n

Materi\u00e1l s velmi vysokou \u010distotou<\/strong>
Zaji\u0161\u0165uje minim\u00e1ln\u00ed kontaminaci \u010d\u00e1sticemi v prost\u0159ed\u00ed \u010dist\u00fdch prostor.<\/p>\n

Vynikaj\u00edc\u00ed tepeln\u00e1 stabilita<\/strong>
Zachov\u00e1v\u00e1 struktur\u00e1ln\u00ed integritu p\u0159i opakovan\u00e9m tepeln\u00e9m cyklov\u00e1n\u00ed a vysokoteplotn\u00edm zpracov\u00e1n\u00ed.<\/p>\n

N\u00edzk\u00e1 tepeln\u00e1 rozta\u017enost<\/strong>
Zaji\u0161\u0165uje vysokou rozm\u011brovou p\u0159esnost p\u0159i p\u0159en\u00e1\u0161en\u00ed desti\u010dek.<\/p>\n

Vysok\u00e1 mechanick\u00e1 pevnost<\/strong>
Odolnost proti lomu, opot\u0159eben\u00ed a dlouhodob\u00e9 \u00fanav\u011b v nep\u0159etr\u017eit\u00fdch v\u00fdrobn\u00edch syst\u00e9mech.<\/p>\n

Chemick\u00e1 odolnost<\/strong>
Stabiln\u00ed v plazmatu, korozivn\u00edch plynech a vakuu.<\/p>\n

Velmi hladk\u00e1 povrchov\u00e1 \u00faprava<\/strong>
Sni\u017euje po\u0161kr\u00e1b\u00e1n\u00ed oplatek a zvy\u0161uje bezpe\u010dnost manipulace.<\/p>\n

Dlouh\u00e1 \u017eivotnost<\/strong>
Navr\u017eeno pro vysoce v\u00fdkonn\u00e9 syst\u00e9my v\u00fdroby polovodi\u010d\u016f.<\/p>\n

\n

V\u00fdrobn\u00ed proces<\/h2>\n

Na str\u00e1nk\u00e1ch Keramick\u00fd koncov\u00fd efektor SiC<\/strong> se vyr\u00e1b\u00ed pomoc\u00ed pokro\u010dil\u00fdch keramick\u00fdch technik.<\/p>\n

Pr\u00e1\u0161ek karbidu k\u0159em\u00edku vysok\u00e9 \u010distoty je vyb\u00edr\u00e1n a p\u0159\u00edsn\u011b kontrolov\u00e1n, aby byla zaji\u0161t\u011bna konzistence materi\u00e1lu.<\/p>\n

P\u0159esn\u00e9 tv\u00e1\u0159en\u00ed se prov\u00e1d\u00ed pomoc\u00ed izostatick\u00e9ho lisov\u00e1n\u00ed za studena nebo vst\u0159ikov\u00e1n\u00ed pro dosa\u017een\u00ed slo\u017eit\u00fdch geometri\u00ed.<\/p>\n

Vysokoteplotn\u00ed slinov\u00e1n\u00ed p\u0159i teplot\u011b nad 2000 \u00b0C zaji\u0161\u0165uje pln\u00e9 zhu\u0161t\u011bn\u00ed a strukturn\u00ed stabilitu.<\/p>\n

Pro dosa\u017een\u00ed p\u0159esnosti na \u00farovni mikron\u016f a rovinnosti na \u00farovni desti\u010dek se pou\u017e\u00edv\u00e1 obr\u00e1b\u011bn\u00ed diamantem CNC.<\/p>\n

Kone\u010dn\u00e9 le\u0161t\u011bn\u00ed a kontrola zaji\u0161\u0165uj\u00ed shodu s normami pro polovodi\u010de.<\/p>\n

Ka\u017ed\u00fd v\u00fdrobek proch\u00e1z\u00ed p\u0159ed dod\u00e1n\u00edm p\u0159\u00edsnou rozm\u011brovou kontrolou, testov\u00e1n\u00edm kvality povrchu a nedestruktivn\u00edm hodnocen\u00edm.<\/p>\n

\n

Aplikace<\/h2>\n

Na str\u00e1nk\u00e1ch Keramick\u00fd koncov\u00fd efektor SiC<\/strong> se \u0161iroce pou\u017e\u00edv\u00e1 v polovodi\u010dov\u00fdch a vysoce p\u0159esn\u00fdch automatiza\u010dn\u00edch syst\u00e9mech.<\/p>\n

Syst\u00e9my pro p\u0159enos desti\u010dek pro 6palcov\u00e9, 8palcov\u00e9 a 12palcov\u00e9 desti\u010dky<\/p>\n

Robotick\u00e9 syst\u00e9my pro manipulaci s desti\u010dkami ve vakuov\u00fdch komor\u00e1ch<\/p>\n

Za\u0159\u00edzen\u00ed pro CVD, ALD, lept\u00e1n\u00ed a nan\u00e1\u0161en\u00ed<\/p>\n

Automatizovan\u00e9 nakl\u00e1dac\u00ed a vykl\u00e1dac\u00ed syst\u00e9my FOUP a FOSB<\/p>\n

V\u00fdrobn\u00ed linky pro automatizaci v\u00fdroby desti\u010dek v \u010dist\u00fdch prostor\u00e1ch<\/p>\n

Syst\u00e9my pro laserov\u00e9 zpracov\u00e1n\u00ed a tepeln\u00e9 \u017e\u00edh\u00e1n\u00ed<\/p>\n

\"\"<\/p>\n

\n

V\u00fdhody ve srovn\u00e1n\u00ed s tradi\u010dn\u00edmi materi\u00e1ly<\/h2>\n

V porovn\u00e1n\u00ed s hlin\u00edkov\u00fdmi koncov\u00fdmi efektory poskytuje keramika SiC lep\u0161\u00ed tepelnou stabilitu a eliminuje riziko kontaminace kovem.<\/p>\n

Ve srovn\u00e1n\u00ed s k\u0159emenem m\u00e1 vy\u0161\u0161\u00ed mechanickou pevnost a ni\u017e\u0161\u00ed tvorbu \u010d\u00e1stic.<\/p>\n

V porovn\u00e1n\u00ed s nerezovou ocel\u00ed funguje spolehliv\u011bji v plazmov\u00e9m a vysokoteplotn\u00edm prost\u0159ed\u00ed.<\/p>\n

\n

\u010cASTO KLADEN\u00c9 DOTAZY<\/h2>\n

Pro\u010d zvolit keramick\u00fd koncov\u00fd efektor SiC m\u00edsto kovov\u00e9ho nebo k\u0159emenn\u00e9ho?<\/strong>
Keramika SiC poskytuje vynikaj\u00edc\u00ed tepelnou stabilitu, chemickou odolnost a velmi n\u00edzkou tvorbu \u010d\u00e1stic, tak\u017ee je ide\u00e1ln\u00ed pro pokro\u010dil\u00e9 polovodi\u010dov\u00e9 procesy.<\/p>\n

Lze ji p\u0159izp\u016fsobit?<\/strong>
Ano, podporujeme \u00fapln\u00e9 p\u0159izp\u016fsoben\u00ed v\u010detn\u011b geometrie, d\u00e9lky ramene, mont\u00e1\u017en\u00edho rozhran\u00ed a kompatibility s velikost\u00ed desti\u010dek.<\/p>\n

Je vhodn\u00fd pro vakuov\u00e9 a plazmov\u00e9 syst\u00e9my?<\/strong>
Ano, keramika SiC je chemicky inertn\u00ed a spolehliv\u011b funguje v prost\u0159ed\u00ed ultravysok\u00e9ho vakua a plazmatu.<\/p>\n

Jak\u00e1 je \u017eivotnost?<\/strong>
Ve srovn\u00e1n\u00ed s b\u011b\u017en\u00fdmi kovov\u00fdmi nebo k\u0159emenn\u00fdmi koncov\u00fdmi efektory nab\u00edz\u00ed za standardn\u00edch provozn\u00edch podm\u00ednek v\u00fdrazn\u011b del\u0161\u00ed \u017eivotnost.<\/p>\n

Poskytujete inspek\u010dn\u00ed zpr\u00e1vy?<\/strong>
Ano, na vy\u017e\u00e1d\u00e1n\u00ed poskytujeme rozm\u011brov\u00e9 protokoly, certifik\u00e1ty materi\u00e1lu a dokumentaci o kontrole kvality.<\/p>","protected":false},"excerpt":{"rendered":"

Na str\u00e1nk\u00e1ch Keramick\u00fd koncov\u00fd efektor SiC<\/strong> je vysoce v\u00fdkonn\u00e1 sou\u010d\u00e1stka pro manipulaci s desti\u010dkami ur\u010den\u00e1 pro automatizaci polovodi\u010d\u016f a p\u0159esn\u00e9 robotick\u00e9 syst\u00e9my. Vyr\u00e1b\u00ed se z velmi \u010dist\u00e9ho karbidu k\u0159em\u00edku (SiC), kter\u00fd nab\u00edz\u00ed vynikaj\u00edc\u00ed mechanickou pevnost, tepelnou stabilitu a chemickou odolnost v extr\u00e9mn\u00edch procesn\u00edch prost\u0159ed\u00edch.<\/p>","protected":false},"featured_media":2045,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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