![\"\"](\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/AL2O3.jpg\")
<\/figure>\n\n\n\nPro\u010d je hlin\u00edkov\u00e1 keramika d\u016fle\u017eit\u00e1 p\u0159i v\u00fdrob\u011b polovodi\u010d\u016f?<\/h1>\n\n\n\n
V\u00fdroba polovodi\u010d\u016f zahrnuje \u0159adu vysoce kontrolovan\u00fdch proces\u016f, jako jsou:<\/p>\n\n\n\n
- \n
- Plazmov\u00e9 lept\u00e1n\u00ed<\/li>\n\n\n\n
- Nan\u00e1\u0161en\u00ed tenk\u00fdch vrstev<\/li>\n\n\n\n
- Fotolitografie<\/li>\n\n\n\n
- Chemicko-mechanick\u00e9 le\u0161t\u011bn\u00ed (CMP)<\/li>\n\n\n\n
- Iontov\u00e1 implantace<\/li>\n\n\n\n
- Tepeln\u00e9 \u017e\u00edh\u00e1n\u00ed<\/li>\n\n\n\n
- Oxidace a dif\u00faze<\/li>\n<\/ul>\n\n\n\n
Tyto procesy vystavuj\u00ed vnit\u0159n\u00ed sou\u010d\u00e1sti za\u0159\u00edzen\u00ed:<\/p>\n\n\n\n
- \n
- Vysokoenergetick\u00e9 plazma<\/li>\n\n\n\n
- Vakuov\u00e9 prost\u0159ed\u00ed<\/li>\n\n\n\n
- \u017d\u00edrav\u00e9 plyny a chemik\u00e1lie<\/li>\n\n\n\n
- Vysok\u00e9 teploty<\/li>\n\n\n\n
- Mechanick\u00e9 opot\u0159eben\u00ed a vibrace<\/li>\n<\/ul>\n\n\n\n
Tradi\u010dn\u00ed kovov\u00e9 materi\u00e1ly maj\u00ed v takov\u00e9m prost\u0159ed\u00ed \u010dasto probl\u00e9my kv\u016fli riziku kontaminace, tepeln\u00e9 rozta\u017enosti nebo chemick\u00e9 nestabilit\u011b. Keramika z vysoce \u010dist\u00e9ho oxidu hlinit\u00e9ho \u0159e\u0161\u00ed mnoho z t\u011bchto probl\u00e9m\u016f d\u00edky sv\u00e9 jedine\u010dn\u00e9 kombinaci vlastnost\u00ed.<\/p>\n\n\n\n
Kl\u00ed\u010dov\u00e9 vlastnosti keramiky z vysoce \u010dist\u00e9ho oxidu hlinit\u00e9ho<\/h1>\n\n\n\n
Vysoce \u010dist\u00fd oxid hlinit\u00fd pou\u017e\u00edvan\u00fd v polovodi\u010dov\u00fdch za\u0159\u00edzen\u00edch obvykle p\u0159esahuje \u010distotu 99,5% a nab\u00edz\u00ed:<\/p>\n\n\n\n
Vynikaj\u00edc\u00ed elektrick\u00e1 izolace<\/h2>\n\n\n\n
Hlin\u00edk si zachov\u00e1v\u00e1 vysok\u00fd elektrick\u00fd odpor i p\u0159i zv\u00fd\u0161en\u00fdch teplot\u00e1ch, tak\u017ee je ide\u00e1ln\u00ed pro plazmov\u00e9 komory a elektrostatick\u00e9 syst\u00e9my.<\/p>\n\n\n\n
Vynikaj\u00edc\u00ed odolnost proti plazmatu<\/h2>\n\n\n\n
Materi\u00e1l vykazuje vysokou odolnost proti plazmov\u00e9 erozi a chemick\u00e9mu napaden\u00ed v prost\u0159ed\u00ed s obsahem fluoru a chloru.<\/p>\n\n\n\n
Vysok\u00e1 mechanick\u00e1 pevnost<\/h2>\n\n\n\n
Hlin\u00edkov\u00e1 keramika poskytuje vynikaj\u00edc\u00ed tuhost, tvrdost a struktur\u00e1ln\u00ed stabilitu v n\u00e1ro\u010dn\u00fdch provozn\u00edch podm\u00ednk\u00e1ch.<\/p>\n\n\n\n
Vynikaj\u00edc\u00ed odolnost proti opot\u0159eben\u00ed<\/h2>\n\n\n\n
D\u00edky n\u00edzk\u00fdm vlastnostem opot\u0159eben\u00ed je oxid hlinit\u00fd vhodn\u00fd pro pohybliv\u00e9 mechanick\u00e9 sestavy a kontaktn\u00ed sou\u010d\u00e1sti desti\u010dek.<\/p>\n\n\n\n
Stabilita p\u0159i vysok\u00fdch teplot\u00e1ch<\/h2>\n\n\n\n
Hlin\u00edk spolehliv\u011b funguje ve vakuu a vysokoteplotn\u00edm prost\u0159ed\u00ed, kter\u00e9 se b\u011b\u017en\u011b vyskytuje v polovodi\u010dov\u00fdch za\u0159\u00edzen\u00edch.<\/p>\n\n\n\n
Hlavn\u00ed aplikace hlin\u00edkov\u00e9 keramiky v polovodi\u010dov\u00fdch procesech<\/h1>\n\n\n\n
1. Plazmov\u00e9 leptac\u00ed syst\u00e9my<\/h2>\n\n\n\n
V za\u0159\u00edzen\u00edch pro plazmov\u00e9 lept\u00e1n\u00ed se b\u011b\u017en\u011b pou\u017e\u00edv\u00e1 keramika z oxidu hlinit\u00e9ho pro:<\/p>\n\n\n\n
- \n
- Komorov\u00e9 vlo\u017eky<\/li>\n\n\n\n
- Plazmov\u00e9 \u0161t\u00edty<\/li>\n\n\n\n
- Zaost\u0159ovac\u00ed krou\u017eky<\/li>\n\n\n\n
- Sou\u010d\u00e1sti ochrany hran<\/li>\n<\/ul>\n\n\n\n
Tyto d\u00edly pom\u00e1haj\u00ed sni\u017eovat kontaminaci a chr\u00e1nit struktury komory p\u0159ed plazmovou eroz\u00ed.<\/p>\n\n\n\n
2. Za\u0159\u00edzen\u00ed pro nan\u00e1\u0161en\u00ed tenk\u00fdch vrstev<\/h2>\n\n\n\n
V syst\u00e9mech CVD, PECVD a PVD se keramika z oxidu hlinit\u00e9ho \u0161iroce pou\u017e\u00edv\u00e1 v:<\/p>\n\n\n\n
- \n
- Elektrostatick\u00e1 skl\u00ed\u010didla (ESC)<\/li>\n\n\n\n
- Keramick\u00e1 topn\u00e1 t\u011blesa<\/li>\n\n\n\n
- Komorov\u00e9 izola\u010dn\u00ed konstrukce<\/li>\n\n\n\n
- Sestavy rozvodu plynu<\/li>\n<\/ul>\n\n\n\n
Jejich tepeln\u00e1 stabilita a izola\u010dn\u00ed vlastnosti pom\u00e1haj\u00ed udr\u017eovat rovnom\u011brn\u00e9 podm\u00ednky nan\u00e1\u0161en\u00ed.<\/p>\n\n\n\n
3. Chemicko-mechanick\u00e9 le\u0161t\u011bn\u00ed (CMP)<\/h2>\n\n\n\n
Procesy CMP vy\u017eaduj\u00ed komponenty s:<\/p>\n\n\n\n
- \n
- N\u00edzk\u00e1 m\u00edra opot\u0159eben\u00ed<\/li>\n\n\n\n
- Chemick\u00e1 odolnost<\/li>\n\n\n\n
- Rozm\u011brov\u00e1 stabilita<\/li>\n<\/ul>\n\n\n\n
Keramick\u00e9 komponenty z oxidu hlinit\u00e9ho pou\u017e\u00edvan\u00e9 v za\u0159\u00edzen\u00edch CMP zahrnuj\u00ed:<\/p>\n\n\n\n
- \n
- Le\u0161t\u00edc\u00ed desky<\/li>\n\n\n\n
- Vakuov\u00e9 skl\u00ed\u010didlo<\/li>\n\n\n\n
- P\u0159enosov\u00e1 ramena<\/li>\n\n\n\n
- Pr\u016fvodcovsk\u00e9 struktury<\/li>\n<\/ul>\n\n\n\n
4. Iontov\u00e1 implantace a tepeln\u00e9 zpracov\u00e1n\u00ed<\/h2>\n\n\n\n
V syst\u00e9mech iontov\u00e9 implantace, \u017e\u00edh\u00e1n\u00ed, oxidace a dif\u00faze se keramika z oxidu hlinit\u00e9ho pou\u017e\u00edv\u00e1 d\u00edky sv\u00fdm:<\/p>\n\n\n\n
- \n
- Tepeln\u00e1 odolnost<\/li>\n\n\n\n
- Elektrick\u00e1 izolace<\/li>\n\n\n\n
- Struktur\u00e1ln\u00ed spolehlivost<\/li>\n<\/ul>\n\n\n\n
Tyto vlastnosti podporuj\u00ed stabiln\u00ed zpracov\u00e1n\u00ed pl\u00e1tk\u016f za vysok\u00fdch teplot.<\/p>\n\n\n\n
B\u011b\u017en\u00e9 keramick\u00e9 komponenty z oxidu hlinit\u00e9ho v polovodi\u010dov\u00fdch za\u0159\u00edzen\u00edch<\/h1>\n\n\n\n
Prstencov\u00e9 a v\u00e1lcov\u00e9 sou\u010d\u00e1sti<\/h2>\n\n\n\n
Tato kategorie zahrnuje:<\/p>\n\n\n\n
- \n
- Zaost\u0159ovac\u00ed krou\u017eky<\/li>\n\n\n\n
- Okrajov\u00e9 krou\u017eky<\/li>\n\n\n\n
- Ochrann\u00e9 krou\u017eky<\/li>\n\n\n\n
- Komorov\u00e9 vlo\u017eky<\/li>\n\n\n\n
- Izola\u010dn\u00ed lahve<\/li>\n\n\n\n
- Tepeln\u00e9 ochrann\u00e9 trubky<\/li>\n<\/ul>\n\n\n\n
Tyto komponenty se pou\u017e\u00edvaj\u00ed p\u0159edev\u0161\u00edm k:<\/p>\n\n\n\n
- \n
- Kontrola distribuce plazmy<\/li>\n\n\n\n
- Chr\u00e1nit konstrukce komor<\/li>\n\n\n\n
- Zlep\u0161en\u00ed stability procesu<\/li>\n<\/ul>\n\n\n\n
Komponenty pro \u0159\u00edzen\u00ed pr\u016ftoku plynu<\/h2>\n\n\n\n
Keramick\u00e9 trysky<\/h3>\n\n\n\n
Pou\u017e\u00edv\u00e1 se pro p\u0159\u00edvod procesn\u00edho plynu a sm\u011brov\u00e9 \u0159\u00edzen\u00ed plynu v depozi\u010dn\u00edch a leptac\u00edch komor\u00e1ch.<\/p>\n\n\n\n
Plynov\u00e9 rozvodn\u00e9 desky<\/h3>\n\n\n\n
Pom\u00e1h\u00e1 udr\u017eovat rovnom\u011brn\u00fd pr\u016ftok plynu a stabiln\u00ed hustotu plazmatu na povrchu desti\u010dky.<\/p>\n\n\n\n
Kryty trysek<\/h3>\n\n\n\n
Podporuj\u00ed sestavy pro vst\u0159ikov\u00e1n\u00ed plynu a z\u00e1rove\u0148 sni\u017euj\u00ed hromad\u011bn\u00ed zbytk\u016f uvnit\u0159 komory.<\/p>\n\n\n\n
Konstruk\u010dn\u00ed a podp\u016frn\u00e9 prvky<\/h2>\n\n\n\n
Platformy pro podporu desti\u010dek<\/h3>\n\n\n\n
Pou\u017e\u00edvaj\u00ed se jako nosn\u00e9 struktury pro desti\u010dky p\u0159i zpracov\u00e1n\u00ed.<\/p>\n\n\n\n
Zdvihac\u00ed kol\u00edky<\/h3>\n\n\n\n
Umo\u017e\u0148uje nakl\u00e1d\u00e1n\u00ed a vykl\u00e1d\u00e1n\u00ed desti\u010dek uvnit\u0159 polovodi\u010dov\u00fdch komor.<\/p>\n\n\n\n
Keramick\u00e9 vodic\u00ed li\u0161ty a lo\u017eiska<\/h3>\n\n\n\n
Podporuj\u00ed p\u0159esn\u00fd mechanick\u00fd pohyb p\u0159i zachov\u00e1n\u00ed odolnosti proti opot\u0159eben\u00ed a izolace.<\/p>\n\n\n\n
Keramick\u00e9 upev\u0148ovac\u00ed prvky<\/h3>\n\n\n\n
Keramick\u00e9 \u0161rouby a upev\u0148ovac\u00ed d\u00edly nahrazuj\u00ed kovy v oblastech s vysok\u00fdmi teplotami nebo v elektricky izolovan\u00fdch oblastech.<\/p>\n\n\n\n
Manipulace s desti\u010dkami a izola\u010dn\u00ed komponenty<\/h2>\n\n\n\n
Ramena pro manipulaci s oplatkami<\/h3>\n\n\n\n
Vysokopevnostn\u00ed keramick\u00e1 robotick\u00e1 ramena se pou\u017e\u00edvaj\u00ed pro p\u0159enos desti\u010dek ve vakuov\u00e9m prost\u0159ed\u00ed.<\/p>\n\n\n\n
Keramick\u00e9 izola\u010dn\u00ed desky<\/h3>\n\n\n\n
Zabra\u0148te ne\u017e\u00e1douc\u00edmu veden\u00ed elektrick\u00e9ho proudu mezi strukturami komory.<\/p>\n\n\n\n
Keramick\u00e9 d\u00edly pro odvod tepla<\/h3>\n\n\n\n
Pom\u00e1hat s tepeln\u00fdm managementem a lok\u00e1ln\u00edm chlazen\u00edm.<\/p>\n\n\n\n
Pokro\u010dil\u00e9 keramick\u00e9 moduly z oxidu hlinit\u00e9ho<\/h1>\n\n\n\n
Vakuov\u00e1 skl\u00ed\u010didla<\/h2>\n\n\n\n
Vakuov\u00e9 skl\u00ed\u010didlo udr\u017euje desti\u010dky v ploch\u00e9 poloze d\u00edky vakuov\u00e9mu s\u00e1n\u00ed b\u011bhem:<\/p>\n\n\n\n
- \n
- Lept\u00e1n\u00ed<\/li>\n\n\n\n
- CMP<\/li>\n\n\n\n
- Kontroln\u00ed procesy<\/li>\n<\/ul>\n\n\n\n
Integrovan\u00e9 chladic\u00ed kan\u00e1ly pom\u00e1haj\u00ed zlep\u0161it tepelnou kontrolu a konzistenci procesu.<\/p>\n\n\n\n
Elektrostatick\u00e1 skl\u00ed\u010didla (ESC)<\/h2>\n\n\n\n
Elektrostatick\u00e1 skl\u00ed\u010didla vyu\u017e\u00edvaj\u00ed elektrostatickou s\u00edlu k udr\u017een\u00ed desti\u010dek p\u0159i plazmov\u00e9m zpracov\u00e1n\u00ed.<\/p>\n\n\n\n
Hlin\u00edkov\u00e1 keramika se hojn\u011b pou\u017e\u00edv\u00e1, proto\u017ee poskytuje:<\/p>\n\n\n\n
- \n
- Elektrick\u00e1 izolace<\/li>\n\n\n\n
- Odolnost plazmy<\/li>\n\n\n\n
- Tepeln\u00e1 stabilita<\/li>\n<\/ul>\n\n\n\n
Syst\u00e9my ESC maj\u00ed z\u00e1sadn\u00ed v\u00fdznam v pokro\u010dil\u00fdch leptac\u00edch a depozi\u010dn\u00edch za\u0159\u00edzen\u00edch.<\/p>\n\n\n\n
Keramick\u00e1 topn\u00e1 t\u011blesa<\/h2>\n\n\n\n
Keramick\u00e9 oh\u0159\u00edva\u010de zaji\u0161\u0165uj\u00ed stabiln\u00ed a rovnom\u011brn\u00fd oh\u0159ev desti\u010dek v:<\/p>\n\n\n\n
- \n
- Depozi\u010dn\u00ed syst\u00e9my<\/li>\n\n\n\n
- \u017d\u00edhac\u00ed za\u0159\u00edzen\u00ed<\/li>\n\n\n\n
- N\u00e1stroje pro tepeln\u00e9 zpracov\u00e1n\u00ed<\/li>\n<\/ul>\n\n\n\n
A\u010dkoli se \u0161iroce pou\u017e\u00edv\u00e1 oxid hlinit\u00fd, v p\u0159\u00edpad\u011b pot\u0159eby vy\u0161\u0161\u00ed tepeln\u00e9 vodivosti se \u010dasto vol\u00ed topn\u00e1 t\u011blesa z nitridu hlin\u00edku (AlN).<\/p>\n\n\n\n
Le\u0161tic\u00ed desky CMP<\/h2>\n\n\n\n
Le\u0161tic\u00ed komponenty z oxidu hlinit\u00e9ho si zachov\u00e1vaj\u00ed vynikaj\u00edc\u00ed rovinnost a odolnost proti opot\u0159eben\u00ed p\u0159i dlouhodob\u00e9m le\u0161t\u011bn\u00ed.<\/p>\n\n\n\n
Pro\u010d se v polovodi\u010dov\u00fdch za\u0159\u00edzen\u00edch pou\u017e\u00edv\u00e1 keramika s vysokou \u010distotou<\/h1>\n\n\n\n
Ve srovn\u00e1n\u00ed s tradi\u010dn\u00edmi technick\u00fdmi materi\u00e1ly poskytuje pokro\u010dil\u00e1 keramika n\u011bkolik v\u00fdhod:<\/p>\n\n\n\n
Majetek<\/th> V\u00fdhody keramick\u00e9ho oxidu hlinit\u00e9ho<\/th><\/tr><\/thead> Elektrick\u00e1 izolace<\/td> Vynikaj\u00edc\u00ed<\/td><\/tr> Odolnost plazmy<\/td> Vysok\u00e1<\/td><\/tr> Odolnost proti opot\u0159eben\u00ed<\/td> Vynikaj\u00edc\u00ed<\/td><\/tr> Tepeln\u00e1 stabilita<\/td> Siln\u00fd<\/td><\/tr> Chemick\u00e1 odolnost<\/td> Vynikaj\u00edc\u00ed<\/td><\/tr> \u0158\u00edzen\u00ed \u010d\u00e1stic<\/td> N\u00edzk\u00e1 kontaminace<\/td><\/tr> Kompatibilita s vakuem<\/td> Vynikaj\u00edc\u00ed<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n D\u00edky t\u011bmto v\u00fdhod\u00e1m je korundov\u00e1 keramika nepostradateln\u00e1 v modern\u00edch polovodi\u010dov\u00fdch za\u0159\u00edzen\u00edch.<\/p>\n\n\n\n
Trendy na trhu a v\u00fdhled odv\u011btv\u00ed<\/h1>\n\n\n\n
Vzhledem k tomu, \u017ee v\u00fdroba polovodi\u010d\u016f pokra\u010duje sm\u011brem k:<\/p>\n\n\n\n
- \n
- Pokro\u010dil\u00e9 procesn\u00ed uzly<\/li>\n\n\n\n
- Vy\u0161\u0161\u00ed propustnost wafer\u016f<\/li>\n\n\n\n
- Agresivn\u011bj\u0161\u00ed plazmatick\u00e9 chemik\u00e1lie<\/li>\n\n\n\n
- \u010cist\u0161\u00ed procesn\u00ed prost\u0159ed\u00ed<\/li>\n<\/ul>\n\n\n\n
O\u010dek\u00e1v\u00e1 se, \u017ee popt\u00e1vka po p\u0159esn\u00fdch keramick\u00fdch sou\u010d\u00e1stk\u00e1ch bude trvale r\u016fst.<\/p>\n\n\n\n
V\u00fdroba sou\u010d\u00e1stek z oxidu hlinit\u00e9ho pro polovodi\u010de vy\u017eaduje:<\/p>\n\n\n\n
- \n
- Vysoce \u010dist\u00e9 suroviny<\/li>\n\n\n\n
- Mo\u017enost p\u0159esn\u00e9ho obr\u00e1b\u011bn\u00ed<\/li>\n\n\n\n
- P\u0159\u00edsn\u00e1 kontrola kontaminace<\/li>\n\n\n\n
- Pokro\u010dil\u00e1 technologie zpracov\u00e1n\u00ed keramiky<\/li>\n<\/ul>\n\n\n\n
Vzhledem k t\u011bmto vysok\u00fdm technick\u00fdm p\u0159ek\u00e1\u017ek\u00e1m z\u016fst\u00e1vaj\u00ed polovodi\u010dov\u00e9 keramick\u00e9 sou\u010d\u00e1stky specializovan\u00fdm a technologicky n\u00e1ro\u010dn\u00fdm trhem.<\/p>\n\n\n\n
Z\u00e1v\u011br<\/h1>\n\n\n\n
Keramick\u00e9 sou\u010d\u00e1sti z oxidu hlinit\u00e9ho s vysokou \u010distotou se staly z\u00e1kladn\u00edm materi\u00e1lem v za\u0159\u00edzen\u00edch pro v\u00fdrobu polovodi\u010d\u016f. Jejich vynikaj\u00edc\u00ed izola\u010dn\u00ed vlastnosti, odolnost proti plazmatu, odolnost proti opot\u0159eben\u00ed a tepeln\u00e1 stabilita umo\u017e\u0148uj\u00ed spolehliv\u00fd provoz polovodi\u010dov\u00fdch n\u00e1stroj\u016f v extr\u00e9mn\u00edch podm\u00ednk\u00e1ch zpracov\u00e1n\u00ed.<\/p>\n\n\n\n
Keramika z oxidu hlinit\u00e9ho hraje i nad\u00e1le z\u00e1sadn\u00ed roli p\u0159i zaji\u0161\u0165ov\u00e1n\u00ed stabiln\u00ed, p\u0159esn\u00e9 a kontaminovan\u00e9 v\u00fdroby polovodi\u010d\u016f, od plazmov\u00fdch leptac\u00edch komor a elektrostatick\u00fdch skl\u00ed\u010didel a\u017e po ramena pro manipulaci s desti\u010dkami a keramick\u00e9 oh\u0159\u00edva\u010de.<\/p>\n\n\n\n
S dal\u0161\u00edm rozvojem polovodi\u010dov\u00fdch technologi\u00ed bude v\u00fdznam pokro\u010dil\u00fdch keramick\u00fdch materi\u00e1l\u016f v polovodi\u010dov\u00fdch za\u0159\u00edzen\u00edch nad\u00e1le stoupat.<\/p>","protected":false},"excerpt":{"rendered":"
As semiconductor devices continue evolving toward smaller nodes, higher integration density, and greater processing precision, the demand for ultra-clean, heat-resistant, and plasma-stable materials inside semiconductor equipment has increased significantly. Among advanced engineering ceramics, high-purity alumina ceramic (Al\u2082O\u2083) remains one of the most widely used materials across semiconductor manufacturing systems. From plasma etching chambers to wafer […]<\/p>\n","protected":false},"author":1,"featured_media":2148,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[269,268,266,267,270,271,265],"class_list":["post-2147","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-and-wafer-handling-systems-learn-about-their-properties","tag-ceramic-heaters","tag-cmp","tag-deposition","tag-discover-how-high-purity-alumina-ceramic-components-are-used-in-semiconductor-manufacturing-equipment-including-plasma-etching","tag-electrostatic-chucks","tag-functions"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/posts\/2147","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/comments?post=2147"}],"version-history":[{"count":1,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/posts\/2147\/revisions"}],"predecessor-version":[{"id":2149,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/posts\/2147\/revisions\/2149"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/media\/2148"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/media?parent=2147"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/categories?post=2147"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/cs\/wp-json\/wp\/v2\/tags?post=2147"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}