{"id":2110,"date":"2026-05-12T06:26:35","date_gmt":"2026-05-12T06:26:35","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2110"},"modified":"2026-05-12T06:28:57","modified_gmt":"2026-05-12T06:28:57","slug":"full-cvd-sic-wafer-carrier-tray-plate-for-semiconductor-mocvd-etching-equipment","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/ar\/product\/full-cvd-sic-wafer-carrier-tray-plate-for-semiconductor-mocvd-etching-equipment\/","title":{"rendered":"\u0635\u0641\u064a\u062d\u0629 \u062d\u0627\u0645\u0644 \u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u062d\u0627\u0645\u0644\u0629 \u0644\u0631\u0642\u0627\u0642\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a MOCVD \u0648\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062d\u0641\u0631"},"content":{"rendered":"<p data-start=\"199\" data-end=\"387\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2111 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u0627\u0644\u0644\u0648\u062d\u0629 \u0627\u0644\u062e\u0632\u0641\u064a\u0629 \u0627\u0644\u0645\u0635\u0646\u0648\u0639\u0629 \u0645\u0646 \u0633\u064a\u0631\u0627\u0645\u064a\u0643 SiC \u0639\u0628\u0627\u0631\u0629 \u0639\u0646 \u062d\u0627\u0645\u0644 \u0631\u0642\u0627\u0642\u0629 \u0639\u0627\u0644\u064a \u0627\u0644\u0623\u062f\u0627\u0621 \u0645\u0635\u0645\u0645 \u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0645\u062b\u0644 MOCVD\u060c \u0648\u0627\u0644\u0646\u0642\u0634 \u0641\u0648\u0642 \u0627\u0644\u0635\u0644\u0628\u060c \u0648\u0627\u0644\u062d\u0641\u0631 \u0628\u0627\u0644\u0628\u0637\u0627\u0642\u0629 \u0627\u0644\u0645\u0642\u0627\u0631\u0646\u0629 \u0627\u0644\u062f\u0648\u0644\u064a\u0629. \u0648\u0647\u064a \u0645\u062a\u0648\u0641\u0631\u0629 \u0641\u064a \u0647\u064a\u0643\u0644\u064a\u0646:<\/p>\n<ul data-start=\"389\" data-end=\"486\">\n<li data-section-id=\"1a2m83y\" data-start=\"389\" data-end=\"434\">\u0631\u0643\u064a\u0632\u0629 \u0645\u0646 \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a \u0645\u0639 \u0637\u0644\u0627\u0621 \u0633\u064a \u0633\u064a CVD<\/li>\n<li data-section-id=\"h6gq41\" data-start=\"435\" data-end=\"486\">\u0635\u064a\u0646\u064a\u0629 \u0645\u062a\u062c\u0627\u0646\u0633\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0646\u0642\u0627\u0621 \u0628\u062a\u0642\u0646\u064a\u0629 CVD SiC (\u226599.99%)<\/li>\n<\/ul>\n<p data-start=\"488\" data-end=\"728\">\u0628\u0627\u0644\u0645\u0642\u0627\u0631\u0646\u0629 \u0645\u0639 \u062d\u0627\u0645\u0644\u0627\u062a \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629\u060c \u064a\u0648\u0641\u0631 \u0647\u0630\u0627 \u0627\u0644\u0645\u0646\u062a\u062c \u062b\u0628\u0627\u062a\u064b\u0627 \u062d\u0631\u0627\u0631\u064a\u064b\u0627 \u0645\u062d\u0633\u0646\u064b\u0627 \u0628\u0634\u0643\u0644 \u0643\u0628\u064a\u0631 \u0648\u0645\u0642\u0627\u0648\u0645\u0629 \u0644\u0644\u062a\u0622\u0643\u0644 \u0648\u0639\u0645\u0631 \u062e\u062f\u0645\u0629 \u0623\u0641\u0636\u0644\u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647 \u0645\u062b\u0627\u0644\u064a\u064b\u0627 \u0644\u0628\u064a\u0626\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0630\u0627\u062a \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629.<\/p>\n<p data-start=\"730\" data-end=\"847\">\u0648\u064a\u064f\u0633\u062a\u062e\u062f\u0645 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0645\u0635\u0627\u0628\u064a\u062d LED \u0645\u0646 \u0627\u0644\u063a\u0627\u0644\u064a\u062b\u064a\u0648\u0645 \u0627\u0644\u063a\u0627\u0644\u064a\u062b\u064a\u0648\u0645\u060c \u0648\u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629\u060c \u0648\u0623\u0646\u0638\u0645\u0629 \u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u062f\u0642\u064a\u0642\u0629.<\/p>\n<hr data-start=\"849\" data-end=\"852\" \/>\n<h1 data-section-id=\"1j1pcx4\" data-start=\"854\" data-end=\"885\"><span role=\"text\">\u0627\u0644\u0645\u064a\u0632\u0627\u062a \u0648\u0627\u0644\u0645\u0632\u0627\u064a\u0627 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/span><\/h1>\n<h3 data-section-id=\"1alapmz\" data-start=\"887\" data-end=\"931\"><span role=\"text\">1. \u0645\u0642\u0627\u0648\u0645\u0629 \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u062c\u062f\u064b\u0627<\/span><\/h3>\n<ul data-start=\"932\" data-end=\"1084\">\n<li data-section-id=\"n8q3t9\" data-start=\"932\" data-end=\"970\">\u062a\u0634\u063a\u064a\u0644 \u0645\u0633\u062a\u0642\u0631 \u0639\u0646\u062f \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 1100-1200 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 \u0641\u0623\u0643\u062b\u0631<\/li>\n<li data-section-id=\"zbjl5k\" data-start=\"971\" data-end=\"1033\">\u0645\u0646\u0627\u0633\u0628 \u0644\u0644\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u0642\u0627\u0633\u064a\u0629 MOCVD \u0648\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u0646\u0645\u0648 \u0627\u0644\u0641\u0648\u0642\u064a \u0627\u0644\u0642\u0627\u0633\u064a<\/li>\n<li data-section-id=\"1p7r2f0\" data-start=\"1034\" data-end=\"1084\">\u0644\u0627 \u062a\u0634\u0648\u0647 \u0641\u064a \u0638\u0644 \u0627\u0644\u062a\u062f\u0648\u064a\u0631 \u0627\u0644\u062d\u0631\u0627\u0631\u064a \u0637\u0648\u064a\u0644 \u0627\u0644\u0623\u0645\u062f<\/li>\n<\/ul>\n<h3 data-section-id=\"1xbme7x\" data-start=\"1086\" data-end=\"1132\"><span role=\"text\">2. \u062d\u0645\u0627\u064a\u0629 \u0641\u0627\u0626\u0642\u0629 \u0628\u0637\u0628\u0642\u0629 \u0637\u0644\u0627\u0621 \u0633\u064a \u0633\u064a \u0627\u0644\u0645\u062a\u0641\u0648\u0642\u0629<\/span><\/h3>\n<ul data-start=\"1133\" data-end=\"1295\">\n<li data-section-id=\"1yg8xxq\" data-start=\"1133\" data-end=\"1163\">\u062f\u0631\u062c\u0629 \u0646\u0642\u0627\u0621 \u062a\u0635\u0644 \u0625\u0644\u0649 99.999% SiC<\/li>\n<li data-section-id=\"fof224\" data-start=\"1164\" data-end=\"1228\">\u0637\u0644\u0627\u0621 \u0643\u062b\u064a\u0641 \u064a\u0645\u0646\u0639 \u062a\u063a\u0644\u063a\u0644 \u0627\u0644\u063a\u0627\u0632 \u0648\u062a\u0622\u0643\u0644 \u0627\u0644\u0631\u0643\u064a\u0632\u0629<\/li>\n<li data-section-id=\"i9f016\" data-start=\"1229\" data-end=\"1295\">\u064a\u0632\u064a\u0644 \u062a\u0644\u0648\u062b \u062c\u0633\u064a\u0645\u0627\u062a \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a \u0641\u064a \u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a<\/li>\n<\/ul>\n<h3 data-section-id=\"r23teu\" data-start=\"1297\" data-end=\"1349\"><span role=\"text\">3. \u0645\u0642\u0627\u0648\u0645\u0629 \u0645\u0645\u062a\u0627\u0632\u0629 \u0644\u0644\u062a\u0622\u0643\u0644 \u0648\u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0629<\/span><\/h3>\n<ul data-start=\"1350\" data-end=\"1472\">\n<li data-section-id=\"jgfj1d\" data-start=\"1350\" data-end=\"1412\">\u0645\u0642\u0627\u0648\u0645 \u0644 HF\u060c \u0648H\u2082SO\u2084SO\u2084\u060c \u0648HCl \u0648\u063a\u0627\u0632\u0627\u062a \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u064a\u0629<\/li>\n<li data-section-id=\"1yalk8d\" data-start=\"1413\" data-end=\"1472\">\u0645\u062b\u0627\u0644\u064a\u0629 \u0644\u0628\u064a\u0626\u0627\u062a \u062d\u0641\u0631 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0639\u062f\u0648\u0627\u0646\u064a\u0629<\/li>\n<\/ul>\n<h3 data-section-id=\"ughzy4\" data-start=\"1474\" data-end=\"1528\"><span role=\"text\">4. \u0645\u0648\u0635\u0644\u064a\u0629 \u062d\u0631\u0627\u0631\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0648\u062a\u0633\u062e\u064a\u0646 \u0645\u0646\u062a\u0638\u0645<\/span><\/h3>\n<ul data-start=\"1529\" data-end=\"1642\">\n<li data-section-id=\"10oy89q\" data-start=\"1529\" data-end=\"1594\">\u064a\u0636\u0645\u0646 \u062a\u0648\u0632\u064a\u0639 \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0628\u0634\u0643\u0644 \u0645\u0648\u062d\u062f \u0639\u0628\u0631 \u0633\u0637\u062d \u0627\u0644\u0631\u0642\u0627\u0642\u0629<\/li>\n<li data-section-id=\"1rsv4ef\" data-start=\"1595\" data-end=\"1642\">\u064a\u062d\u0633\u0646 \u062c\u0648\u062f\u0629 \u0627\u0644\u0641\u064a\u0644\u0645 \u0648\u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0627\u0644\u0639\u0645\u0644\u064a\u0629<\/li>\n<\/ul>\n<h3 data-section-id=\"rhgagc\" data-start=\"1644\" data-end=\"1672\"><span role=\"text\">5. \u0639\u0645\u0631 \u062e\u062f\u0645\u0629 \u0637\u0648\u064a\u0644<\/span><\/h3>\n<ul data-start=\"1673\" data-end=\"1796\">\n<li data-section-id=\"1wgev4f\" data-start=\"1673\" data-end=\"1743\">\u0639\u0645\u0631 \u0627\u0641\u062a\u0631\u0627\u0636\u064a \u0623\u0637\u0648\u0644 \u062d\u062a\u0649 4 \u0623\u0636\u0639\u0627\u0641 \u0645\u0646 \u0627\u0644\u0635\u0648\u0627\u0646\u064a \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629 \u0627\u0644\u0642\u0627\u0626\u0645\u0629 \u0639\u0644\u0649 \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a<\/li>\n<li data-section-id=\"tsrdbt\" data-start=\"1744\" data-end=\"1796\">\u062a\u0642\u0644\u064a\u0644 \u0648\u0642\u062a \u0627\u0644\u062a\u0639\u0637\u0644 \u0648\u0627\u0646\u062e\u0641\u0627\u0636 \u0645\u0639\u062f\u0644 \u0627\u0644\u0627\u0633\u062a\u0628\u062f\u0627\u0644<\/li>\n<\/ul>\n<p><img decoding=\"async\" class=\"alignnone size-medium wp-image-2114\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/> <img decoding=\"async\" class=\"alignnone size-medium wp-image-2113\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/> <img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-2112\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<hr data-start=\"1798\" data-end=\"1801\" \/>\n<h1 data-section-id=\"10k15yz\" data-start=\"1803\" data-end=\"1833\"><span role=\"text\">\u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u0641\u0646\u064a\u0629<\/span><\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1835\" data-end=\"2207\">\n<thead data-start=\"1835\" data-end=\"1856\">\n<tr data-start=\"1835\" data-end=\"1856\">\n<th class=\"last:pe-10\" data-start=\"1835\" data-end=\"1847\" data-col-size=\"sm\">\u0627\u0644\u0645\u0639\u0644\u0645\u0629<\/th>\n<th class=\"last:pe-10\" data-start=\"1847\" data-end=\"1856\" data-col-size=\"md\">\u0627\u0644\u0642\u064a\u0645\u0629<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1877\" data-end=\"2207\">\n<tr data-start=\"1877\" data-end=\"1938\">\n<td data-start=\"1877\" data-end=\"1893\" data-col-size=\"sm\">\u0646\u0648\u0639 \u0627\u0644\u0645\u0627\u062f\u0629<\/td>\n<td data-start=\"1893\" data-end=\"1938\" data-col-size=\"md\">\u062c\u0631\u0627\u0641\u064a\u062a + \u0637\u0644\u0627\u0621 \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a + \u0637\u0644\u0627\u0621 CVD SiC \/ \u0637\u0644\u0627\u0621 CVD SiC \u0643\u0627\u0645\u0644<\/td>\n<\/tr>\n<tr data-start=\"1939\" data-end=\"1993\">\n<td data-start=\"1939\" data-end=\"1952\" data-col-size=\"sm\">\u0646\u0642\u0627\u0648\u0629 SiC<\/td>\n<td data-start=\"1952\" data-end=\"1993\" data-col-size=\"md\">\u226599.9% (\u0645\u063a\u0644\u0641\u0629)\u060c \u226599.99% (\u0645\u062a\u062c\u0627\u0646\u0633\u0629)<\/td>\n<\/tr>\n<tr data-start=\"1994\" data-end=\"2032\">\n<td data-start=\"1994\" data-end=\"2011\" data-col-size=\"sm\">\u0646\u0637\u0627\u0642 \u0627\u0644\u0642\u0637\u0631<\/td>\n<td data-start=\"2011\" data-end=\"2032\" data-col-size=\"md\">\u03a6380 \u0645\u0645 - \u03a6600 \u0645\u0645<\/td>\n<\/tr>\n<tr data-start=\"2033\" data-end=\"2072\">\n<td data-start=\"2033\" data-end=\"2057\" data-col-size=\"sm\">\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u062a\u0634\u063a\u064a\u0644<\/td>\n<td data-col-size=\"md\" data-start=\"2057\" data-end=\"2072\">1100-1200\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"2073\" data-end=\"2104\">\n<td data-start=\"2073\" data-end=\"2096\" data-col-size=\"sm\">\u0627\u0644\u062a\u0648\u0635\u064a\u0644 \u0627\u0644\u062d\u0631\u0627\u0631\u064a<\/td>\n<td data-col-size=\"md\" data-start=\"2096\" data-end=\"2104\">\u0639\u0627\u0644\u064a\u0629<\/td>\n<\/tr>\n<tr data-start=\"2105\" data-end=\"2163\">\n<td data-start=\"2105\" data-end=\"2128\" data-col-size=\"sm\">\u0645\u0642\u0627\u0648\u0645\u0629 \u0627\u0644\u062a\u0622\u0643\u0644<\/td>\n<td data-col-size=\"md\" data-start=\"2128\" data-end=\"2163\">\u0645\u0645\u062a\u0627\u0632 (HF\u060c H\u2082SO\u2084 \u0645\u0642\u0627\u0648\u0645\u0629 H\u2082SO\u2084SO\u2084)<\/td>\n<\/tr>\n<tr data-start=\"2164\" data-end=\"2207\">\n<td data-start=\"2164\" data-end=\"2179\" data-col-size=\"sm\">\u0639\u0645\u0631 \u0627\u0644\u062e\u062f\u0645\u0629<\/td>\n<td data-start=\"2179\" data-end=\"2207\" data-col-size=\"md\">~4 \u00d7 \u00d7 \u0635\u0648\u0627\u0646\u064a \u0645\u0646 \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2209\" data-end=\"2212\" \/>\n<h1 data-section-id=\"18cvqw\" data-start=\"2214\" data-end=\"2237\"><span role=\"text\">\u0645\u062c\u0627\u0644\u0627\u062a \u0627\u0644\u062a\u0637\u0628\u064a\u0642<\/span><\/h1>\n<h3 data-section-id=\"bm5nu5\" data-start=\"2239\" data-end=\"2274\"><span role=\"text\">\u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/span><\/h3>\n<ul data-start=\"2275\" data-end=\"2438\">\n<li data-section-id=\"pooj76\" data-start=\"2275\" data-end=\"2326\">MOCVD (\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0627\u0644\u0639\u0636\u0648\u064a \u0627\u0644\u0645\u0639\u062f\u0646\u064a)<\/li>\n<li data-section-id=\"c8v0nb\" data-start=\"2327\" data-end=\"2370\">\u0646\u0645\u0648 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0641\u0648\u0642 \u0627\u0644\u0644\u0645\u0639\u0627\u0646 (GaN\u060c SiC\u060c \u0625\u0644\u062e)<\/li>\n<li data-section-id=\"15uw81h\" data-start=\"2371\" data-end=\"2396\">\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u062d\u0641\u0631 \u0628\u0627\u0644\u0643\u0628\u0631\u064a\u062a \u0627\u0644\u0645\u0642\u0627\u0631\u0646 \u0627\u0644\u062f\u0642\u064a\u0642 \u0627\u0644\u0645\u0642\u0627\u0631\u0646<\/li>\n<li data-section-id=\"1xtyszn\" data-start=\"2397\" data-end=\"2438\">\u0623\u0646\u0638\u0645\u0629 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062f\u0642\u0629<\/li>\n<\/ul>\n<h3 data-section-id=\"yf7wep\" data-start=\"2440\" data-end=\"2460\"><span role=\"text\">\u0635\u0646\u0627\u0639\u0629 \u0627\u0644\u0635\u0645\u0627\u0645 \u0627\u0644\u062b\u0646\u0627\u0626\u064a \u0627\u0644\u0628\u0627\u0639\u062b \u0644\u0644\u0636\u0648\u0621<\/span><\/h3>\n<ul data-start=\"2461\" data-end=\"2545\">\n<li data-section-id=\"b1ebdf\" data-start=\"2461\" data-end=\"2508\">\u0625\u0646\u062a\u0627\u062c \u0645\u0635\u0627\u0628\u064a\u062d LED \u0632\u0631\u0642\u0627\u0621 \u0648\u0628\u064a\u0636\u0627\u0621 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0633\u0637\u0648\u0639<\/li>\n<li data-section-id=\"9w14a9\" data-start=\"2509\" data-end=\"2545\">\u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0627\u0644\u0642\u0627\u0626\u0645\u0629 \u0639\u0644\u0649 GaN<\/li>\n<\/ul>\n<h3 data-section-id=\"d5g3k9\" data-start=\"2547\" data-end=\"2575\"><span role=\"text\">\u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629<\/span><\/h3>\n<ul data-start=\"2576\" data-end=\"2670\">\n<li data-section-id=\"14t88vj\" data-start=\"2576\" data-end=\"2600\">\u0623\u0634\u0628\u0627\u0647 \u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629<\/li>\n<li data-section-id=\"8rvytg\" data-start=\"2601\" data-end=\"2627\">\u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062a\u0631\u062f\u062f<\/li>\n<li data-section-id=\"4tdco8\" data-start=\"2628\" data-end=\"2670\">\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u062f\u0642\u064a\u0642 \u0644\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629<\/li>\n<\/ul>\n<hr data-start=\"2672\" data-end=\"2675\" \/>\n<h1 data-section-id=\"1umg5ep\" data-start=\"2677\" data-end=\"2735\"><span role=\"text\">\u0645\u0632\u0627\u064a\u0627 \u0627\u0644\u0623\u062f\u0627\u0621 \u0645\u0642\u0627\u0628\u0644 \u0635\u0648\u0627\u0646\u064a \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629<\/span><\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2737\" data-end=\"3069\">\n<thead data-start=\"2737\" data-end=\"2783\">\n<tr data-start=\"2737\" data-end=\"2783\">\n<th class=\"last:pe-10\" data-start=\"2737\" data-end=\"2744\" data-col-size=\"sm\">\u0627\u0644\u0628\u0646\u062f<\/th>\n<th class=\"last:pe-10\" data-start=\"2744\" data-end=\"2760\" data-col-size=\"sm\">\u0635\u064a\u0646\u064a\u0629 \u062c\u0631\u0627\u0641\u064a\u062a<\/th>\n<th class=\"last:pe-10\" data-start=\"2760\" data-end=\"2783\" data-col-size=\"sm\">\u0635\u064a\u0646\u064a\u0629 \u0645\u063a\u0644\u0641\u0629 \u0628\u0627\u0644\u0633\u064a \u0633\u064a \u0633\u064a CVD<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2831\" data-end=\"3069\">\n<tr data-start=\"2831\" data-end=\"2878\">\n<td data-start=\"2831\" data-end=\"2856\" data-col-size=\"sm\">\u0645\u0642\u0627\u0648\u0645\u0629 \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629<\/td>\n<td data-col-size=\"sm\" data-start=\"2856\" data-end=\"2865\">\u0645\u062a\u0648\u0633\u0637<\/td>\n<td data-col-size=\"sm\" data-start=\"2865\" data-end=\"2878\">\u0639\u0627\u0644\u064a\u0629 \u062c\u062f\u0627\u064b<\/td>\n<\/tr>\n<tr data-start=\"2879\" data-end=\"2922\">\n<td data-start=\"2879\" data-end=\"2902\" data-col-size=\"sm\">\u0645\u0642\u0627\u0648\u0645\u0629 \u0627\u0644\u062a\u0622\u0643\u0644<\/td>\n<td data-col-size=\"sm\" data-start=\"2902\" data-end=\"2909\">\u0641\u0642\u064a\u0631<\/td>\n<td data-col-size=\"sm\" data-start=\"2909\" data-end=\"2922\">\u0645\u0645\u062a\u0627\u0632<\/td>\n<\/tr>\n<tr data-start=\"2923\" data-end=\"2971\">\n<td data-start=\"2923\" data-end=\"2948\" data-col-size=\"sm\">\u0627\u0644\u062a\u0644\u0648\u062b \u0628\u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a<\/td>\n<td data-col-size=\"sm\" data-start=\"2948\" data-end=\"2960\">\u0645\u062e\u0627\u0637\u0631 \u0639\u0627\u0644\u064a\u0629<\/td>\n<td data-col-size=\"sm\" data-start=\"2960\" data-end=\"2971\">\u0627\u0644\u062d\u062f \u0627\u0644\u0623\u062f\u0646\u0649<\/td>\n<\/tr>\n<tr data-start=\"2972\" data-end=\"3010\">\n<td data-start=\"2972\" data-end=\"2987\" data-col-size=\"sm\">\u0639\u0645\u0631 \u0627\u0644\u062e\u062f\u0645\u0629<\/td>\n<td data-col-size=\"sm\" data-start=\"2987\" data-end=\"2995\">\u0642\u0635\u064a\u0631<\/td>\n<td data-col-size=\"sm\" data-start=\"2995\" data-end=\"3010\">3-4\u00d7\u00d7 \u0623\u0637\u0648\u0644<\/td>\n<\/tr>\n<tr data-start=\"3011\" data-end=\"3069\">\n<td data-start=\"3011\" data-end=\"3031\" data-col-size=\"sm\">\u062b\u0628\u0627\u062a \u0627\u0644\u0633\u0637\u062d<\/td>\n<td data-col-size=\"sm\" data-start=\"3031\" data-end=\"3052\">\u064a\u062a\u062d\u0644\u0644 \u0628\u0645\u0631\u0648\u0631 \u0627\u0644\u0648\u0642\u062a<\/td>\n<td data-col-size=\"sm\" data-start=\"3052\" data-end=\"3069\">\u0645\u0633\u062a\u0642\u0631 \u0644\u0644\u063a\u0627\u064a\u0629<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3071\" data-end=\"3074\" \/>\n<h1 data-section-id=\"7pt5v4\" data-start=\"3076\" data-end=\"3102\"><span role=\"text\">\u0627\u0644\u062a\u0639\u0628\u0626\u0629 \u0648\u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0648\u0627\u0644\u0645\u0646\u0627\u0648\u0644\u0629<\/span><\/h1>\n<ul data-start=\"3103\" data-end=\"3313\">\n<li data-section-id=\"a3kyzw\" data-start=\"3103\" data-end=\"3142\">\u062a\u062a\u0648\u0641\u0631 \u0639\u0628\u0648\u0627\u062a \u0645\u0646 \u0641\u0626\u0629 \u063a\u0631\u0641 \u0627\u0644\u0623\u0628\u062d\u0627\u062b<\/li>\n<li data-section-id=\"3ss3f2\" data-start=\"3143\" data-end=\"3193\">\u0635\u0646\u062f\u0648\u0642 \u062e\u0634\u0628\u064a \u0645\u0642\u0627\u0648\u0645 \u0644\u0644\u0635\u062f\u0645\u0627\u062a \u0623\u0648 \u0635\u0646\u062f\u0648\u0642 \u062e\u0634\u0628\u064a \u0645\u0642\u0627\u0648\u0645 \u0644\u0644\u0635\u062f\u0645\u0627\u062a \u0623\u0648 \u0645\u0641\u0631\u063a \u0645\u0646 \u0627\u0644\u0647\u0648\u0627\u0621<\/li>\n<li data-section-id=\"iuz9t\" data-start=\"3194\" data-end=\"3253\">\u0645\u0635\u0645\u0645\u0629 \u0644\u0646\u0642\u0644 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u062e\u0627\u0644\u064a\u0629 \u0645\u0646 \u0627\u0644\u062a\u0644\u0648\u062b<\/li>\n<li data-section-id=\"11l6t4c\" data-start=\"3254\" data-end=\"3313\">\u0623\u062d\u062c\u0627\u0645 \u0645\u062e\u0635\u0635\u0629 \u0645\u062f\u0639\u0648\u0645\u0629 (\u03a6380-\u03a6600 \u0645\u0645 \u0623\u0648 \u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0645\u062e\u0635\u0635\u0629)<\/li>\n<\/ul>\n<hr data-start=\"3315\" data-end=\"3318\" \/>\n<h1 data-section-id=\"62o8y8\" data-start=\"3320\" data-end=\"3349\"><span role=\"text\">\u0644\u0645\u0627\u0630\u0627 \u062a\u062e\u062a\u0627\u0631 \u0647\u0630\u0627 \u0627\u0644\u0645\u0646\u062a\u062c<\/span><\/h1>\n<p data-start=\"3350\" data-end=\"3688\">\u0635\u064f\u0645\u0645\u062a \u0635\u064a\u0646\u064a\u0629 \u062d\u0627\u0645\u0644 \u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0645\u0635\u0646\u0648\u0639\u0629 \u0645\u0646 \u0627\u0644\u0643\u0631\u0628\u0648\u0646 \u0627\u0644\u0647\u064a\u062f\u0631\u0648\u062c\u064a\u0646\u064a \u0647\u0630\u0647 \u0644\u0644\u062c\u064a\u0644 \u0627\u0644\u0642\u0627\u062f\u0645 \u0645\u0646 \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u062d\u064a\u062b \u0627\u0644\u0646\u0642\u0627\u0621 \u0648\u0627\u0644\u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0627\u0644\u062d\u0631\u0627\u0631\u064a \u0648\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u062a\u0644\u0648\u062b \u0623\u0645\u0648\u0631 \u0628\u0627\u0644\u063a\u0629 \u0627\u0644\u0623\u0647\u0645\u064a\u0629. \u0648\u0645\u0646 \u062e\u0644\u0627\u0644 \u0627\u0633\u062a\u0628\u062f\u0627\u0644 \u0627\u0644\u0646\u0627\u0642\u0644\u0627\u062a \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629 \u0627\u0644\u0642\u0627\u0626\u0645\u0629 \u0639\u0644\u0649 \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a\u060c \u0641\u0625\u0646\u0647\u0627 \u062a\u062d\u0633\u0646 \u0628\u0634\u0643\u0644 \u0643\u0628\u064a\u0631 \u0645\u0646 \u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0627\u0644\u0625\u0646\u062a\u0627\u062c\u060c \u0648\u062a\u0642\u0644\u0644 \u0645\u0646 \u062a\u0643\u0627\u0644\u064a\u0641 \u0627\u0644\u0635\u064a\u0627\u0646\u0629\u060c \u0648\u062a\u0636\u0645\u0646 \u0623\u062f\u0627\u0621 \u0645\u0633\u062a\u0642\u0631 \u0637\u0648\u064a\u0644 \u0627\u0644\u0623\u062c\u0644 \u0644\u0644\u0639\u0645\u0644\u064a\u0629.<\/p>\n<hr data-start=\"3690\" data-end=\"3693\" \/>\n<h1 data-section-id=\"1iusff4\" data-start=\"3695\" data-end=\"3704\"><span role=\"text\">\u0627\u0644\u0623\u0633\u0626\u0644\u0629 \u0627\u0644\u0634\u0627\u0626\u0639\u0629<\/span><\/h1>\n<h3 data-section-id=\"1m9x0lv\" data-start=\"3706\" data-end=\"3791\"><span role=\"text\">\u06331: \u0645\u0627 \u0647\u064a \u0627\u0644\u0645\u064a\u0632\u0629 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0644\u0637\u0644\u0627\u0621 CVD SiC \u0645\u0642\u0627\u0631\u0646\u0629\u064b \u0628\u0635\u0648\u0627\u0646\u064a \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a\u061f<\/span><\/h3>\n<p data-start=\"3792\" data-end=\"3978\">\u064a\u0648\u0641\u0631 \u0637\u0644\u0627\u0621 CVD SiC \u0637\u0628\u0642\u0629 \u0648\u0627\u0642\u064a\u0629 \u0643\u062b\u064a\u0641\u0629 \u0648\u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u0646\u0642\u0627\u0621 \u062a\u0645\u0646\u0639 \u062a\u063a\u0644\u063a\u0644 \u0627\u0644\u063a\u0627\u0632 \u0648\u062a\u0633\u0627\u0642\u0637 \u062c\u0633\u064a\u0645\u0627\u062a \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a\u060c \u0645\u0645\u0627 \u064a\u062d\u0633\u0646 \u0627\u0644\u0645\u062a\u0627\u0646\u0629 \u0628\u0634\u0643\u0644 \u0643\u0628\u064a\u0631 \u0648\u064a\u0642\u0644\u0644 \u0645\u0646 \u062a\u0644\u0648\u062b \u0627\u0644\u0631\u0642\u0627\u0642\u0629.<\/p>\n<hr data-start=\"3980\" data-end=\"3983\" \/>\n<h3 data-section-id=\"7rg8ob\" data-start=\"3985\" data-end=\"4059\"><span role=\"text\">\u06332: \u0647\u0644 \u064a\u0645\u0643\u0646 \u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0635\u064a\u0646\u064a\u0629 SiC \u0647\u0630\u0647 \u0641\u064a \u0639\u0645\u0644\u064a\u0627\u062a MOCVD \u0630\u0627\u062a \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629\u061f<\/span><\/h3>\n<p data-start=\"4060\" data-end=\"4219\">\u0646\u0639\u0645\u060c \u0625\u0646\u0647 \u0645\u0635\u0645\u0645 \u062e\u0635\u064a\u0635\u064b\u0627 \u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a MOCVD \u0648\u064a\u0645\u0643\u0646\u0647 \u0627\u0644\u0639\u0645\u0644 \u0628\u0634\u0643\u0644 \u0645\u0648\u062b\u0648\u0642 \u0639\u0646\u062f \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u062a\u062a\u0631\u0627\u0648\u062d \u0628\u064a\u0646 1100 \u06481200 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 \u0645\u0639 \u062b\u0628\u0627\u062a \u062d\u0631\u0627\u0631\u064a \u0645\u0645\u062a\u0627\u0632 \u0648\u062a\u0648\u0632\u064a\u0639 \u062d\u0631\u0627\u0631\u064a \u0645\u0648\u062d\u062f.<\/p>\n<hr data-start=\"4221\" data-end=\"4224\" \/>\n<h3 data-section-id=\"ox8w5l\" data-start=\"4226\" data-end=\"4314\"><span role=\"text\">\u06333: \u0645\u0627 \u0647\u0648 \u0627\u0644\u0641\u0631\u0642 \u0628\u064a\u0646 \u0635\u0648\u0627\u0646\u064a \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a \u0627\u0644\u0645\u063a\u0644\u0641\u0629 \u0648\u0635\u0648\u0627\u0646\u064a \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0627\u0644\u0645\u0637\u0644\u064a \u0628\u0627\u0644\u0633\u064a\u0631 \u0627\u0644\u0630\u0627\u062a\u064a\u0629 \u0627\u0644\u0643\u0627\u0645\u0644\u061f<\/span><\/h3>\n<p data-start=\"4315\" data-end=\"4510\" data-is-last-node=\"\" data-is-only-node=\"\">\u062a\u0633\u062a\u062e\u062f\u0645 \u0635\u0648\u0627\u0646\u064a \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a \u0627\u0644\u0645\u063a\u0644\u0641\u0629 \u0642\u0644\u0628\u064b\u0627 \u0645\u0646 \u0627\u0644\u062c\u0631\u0627\u0641\u064a\u062a \u0645\u0639 \u0637\u0628\u0642\u0629 \u0648\u0627\u0642\u064a\u0629 \u0645\u0646 SiC\u060c \u0641\u064a \u062d\u064a\u0646 \u0623\u0646 \u0635\u0648\u0627\u0646\u064a SiC \u0627\u0644\u0643\u0627\u0645\u0644\u0629 CVD \u0647\u064a \u0647\u064a\u0627\u0643\u0644 \u0645\u062a\u062c\u0627\u0646\u0633\u0629 \u0630\u0627\u062a \u0646\u0642\u0627\u0621 \u0623\u0639\u0644\u0649 \u0648\u0645\u0642\u0627\u0648\u0645\u0629 \u0623\u0641\u0636\u0644 \u0644\u0644\u062a\u0622\u0643\u0644 \u0648\u0639\u0645\u0631 \u062e\u062f\u0645\u0629 \u0623\u0637\u0648\u0644.<\/p>","protected":false},"excerpt":{"rendered":"<p>The SiC ceramic tray plate is a high-performance wafer carrier designed for advanced semiconductor processes such as MOCVD, epitaxy, and ICP etching. It is available in two structures: Graphite substrate with CVD SiC coating Monolithic high-purity CVD SiC tray (\u226599.99%) Compared with conventional graphite carriers, this product offers significantly improved thermal stability, corrosion resistance, and [&hellip;]<\/p>\n","protected":false},"featured_media":2114,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[23],"product_tag":[224,220,209,217,216,218,213,214,221,211,222,226,215,210,212,223,177,219,227,225],"class_list":["post-2110","product","type-product","status-publish","has-post-thumbnail","product_cat-silicon-carbide-sic","product_tag-chemical-vapor-deposition-sic","product_tag-corrosion-resistant-wafer-tray","product_tag-cvd-sic-coated-graphite-tray","product_tag-epitaxy-wafer-carrier","product_tag-etching-tray-icp","product_tag-gan-led-production-tray","product_tag-graphite-sic-coating","product_tag-high-purity-sic-wafer-carrier","product_tag-high-temperature-semiconductor-carrier","product_tag-mocvd-susceptor","product_tag-precision-ceramic-substrate","product_tag-semiconductor-mocvd-parts","product_tag-semiconductor-processing-equipment","product_tag-semiconductor-wafer-tray","product_tag-sic-ceramic-tray-plate","product_tag-sic-coated-susceptor-plate","product_tag-sic-wafer-carrier","product_tag-thermal-cvd-sic","product_tag-ultra-high-purity-sic-materials","product_tag-wafer-handling-equipment","desktop-align-left","tablet-align-left","mobile-align-left","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/product\/2110","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/comments?post=2110"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/media\/2114"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/media?parent=2110"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/product_brand?post=2110"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/product_cat?post=2110"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/product_tag?post=2110"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}