{"id":2100,"date":"2026-05-12T03:59:56","date_gmt":"2026-05-12T03:59:56","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?post_type=product&#038;p=2100"},"modified":"2026-05-12T03:59:56","modified_gmt":"2026-05-12T03:59:56","slug":"customized-sic-ceramic-end-effector-for-wafer-handling","status":"publish","type":"product","link":"https:\/\/www.xkh-ceramics.com\/ar\/product\/customized-sic-ceramic-end-effector-for-wafer-handling\/","title":{"rendered":"\u0645\u0633\u062a\u062c\u064a\u0628 \u0637\u0631\u0641\u064a \u0633\u064a\u0631\u0627\u0645\u064a\u0643 SiC \u0645\u062e\u0635\u0635 \u0644\u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a"},"content":{"rendered":"<p data-start=\"737\" data-end=\"989\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2101 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u0625\u0646 \u0627\u0644\u0645\u0633\u062a\u062c\u064a\u0628 \u0627\u0644\u0637\u0631\u0641\u064a \u0627\u0644\u062e\u0632\u0641\u064a \u0627\u0644\u0645\u0635\u0646\u0648\u0639 \u0645\u0646 \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 (SiC) \u0647\u0648 \u0645\u0643\u0648\u0646 \u0645\u0646\u0627\u0648\u0644\u0629 \u0631\u0642\u0627\u0642\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062f\u0642\u0629 \u0645\u0635\u0645\u0645 \u0644\u0623\u0646\u0638\u0645\u0629 \u0623\u062a\u0645\u062a\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u0628\u0645\u0627 \u0641\u064a \u0630\u0644\u0643 \u0631\u0648\u0628\u0648\u062a\u0627\u062a \u0646\u0642\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0648\u0623\u0646\u0638\u0645\u0629 AMHS \u0648\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0628\u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0623\u0648\u0631\u0648-\u0636\u0648\u0626\u064a\u0629 \u0648\u0623\u062f\u0648\u0627\u062a \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0630\u0627\u062a \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629.<\/p>\n<p data-start=\"991\" data-end=\"1308\">\u0647\u0630\u0627 \u0627\u0644\u0645\u0633\u062a\u062c\u064a\u0628 \u0627\u0644\u0637\u0631\u0641\u064a \u0645\u0635\u0646\u0648\u0639 \u0645\u0646 CVD SiC \u0639\u0627\u0644\u064a \u0627\u0644\u0646\u0642\u0627\u0621 \u0623\u0648 SSiC \u0627\u0644\u0645\u0635\u0645\u0645 \u0647\u0646\u062f\u0633\u064a\u064b\u0627\u060c \u0648\u064a\u0648\u0641\u0631 \u0635\u0644\u0627\u0628\u0629 \u0627\u0633\u062a\u062b\u0646\u0627\u0626\u064a\u0629 \u0648\u062a\u0648\u0644\u064a\u062f \u062c\u0633\u064a\u0645\u0627\u062a \u0645\u0646\u062e\u0641\u0636\u0629 \u0644\u0644\u063a\u0627\u064a\u0629 \u0648\u0627\u0633\u062a\u0642\u0631\u0627\u0631\u064b\u0627 \u062d\u0631\u0627\u0631\u064a\u064b\u0627 \u0648\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u064b\u0627 \u0645\u062a\u0645\u064a\u0632\u064b\u0627. \u064a\u064f\u0633\u062a\u062e\u062f\u0645 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a \u0645\u0635\u0627\u0646\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0630\u0627\u062a \u0627\u0644\u0639\u0642\u062f\u0629 300 \u0645\u0645 \u0648\u0627\u0644\u0639\u0642\u062f\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629\u060c \u062d\u064a\u062b \u064a\u0643\u0648\u0646 \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u062a\u0644\u0648\u062b \u0648\u062f\u0642\u0629 \u062a\u062d\u062f\u064a\u062f \u0627\u0644\u0645\u0648\u0627\u0642\u0639 \u0623\u0645\u0631\u064b\u0627 \u0628\u0627\u0644\u063a \u0627\u0644\u0623\u0647\u0645\u064a\u0629.<\/p>\n<p data-start=\"1310\" data-end=\"1470\">\u0628\u0627\u0644\u0645\u0642\u0627\u0631\u0646\u0629 \u0645\u0639 \u0627\u0644\u0645\u0633\u062a\u062c\u064a\u0628\u0627\u062a \u0627\u0644\u0637\u0631\u0641\u064a\u0629 \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629 \u0627\u0644\u0645\u0635\u0646\u0648\u0639\u0629 \u0645\u0646 \u0627\u0644\u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645 \u0623\u0648 \u0627\u0644\u0643\u0648\u0627\u0631\u062a\u0632\u060c \u062a\u0639\u0645\u0644 \u062d\u0644\u0648\u0644 \u0633\u064a\u0631\u0627\u0645\u064a\u0643 SiC \u0639\u0644\u0649 \u062a\u062d\u0633\u064a\u0646 \u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0648\u0633\u0644\u0627\u0645\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0648\u0639\u0645\u0631 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0628\u0634\u0643\u0644 \u0643\u0628\u064a\u0631.<\/p>\n<hr data-start=\"1472\" data-end=\"1475\" \/>\n<h2 data-section-id=\"ruuu6i\" data-start=\"1477\" data-end=\"1494\">\u0627\u0644\u0645\u0632\u0627\u064a\u0627 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h2>\n<h3 data-section-id=\"1igp1it\" data-start=\"1496\" data-end=\"1532\">\u062a\u0644\u0648\u062b \u062c\u0633\u064a\u0645\u0627\u062a \u0645\u0646\u062e\u0641\u0636\u0629 \u0644\u0644\u063a\u0627\u064a\u0629<\/h3>\n<ul data-start=\"1533\" data-end=\"1664\">\n<li data-section-id=\"1lx1qmw\" data-start=\"1533\" data-end=\"1587\">\u062a\u0648\u0644\u064a\u062f \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a: &lt;0.1\/\u0633\u0645\u00b2 (\u0645\u062a\u0648\u0627\u0641\u0642 \u0645\u0639 SEMI F57)<\/li>\n<li data-section-id=\"8gkyog\" data-start=\"1588\" data-end=\"1618\">\u0639\u062f\u0645 \u0648\u062c\u0648\u062f \u062a\u0644\u0648\u062b \u0623\u064a\u0648\u0646\u0627\u062a \u0627\u0644\u0641\u0644\u0632\u0627\u062a<\/li>\n<li data-section-id=\"m28nyw\" data-start=\"1619\" data-end=\"1664\">\u0645\u062b\u0627\u0644\u064a\u0629 \u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0627\u0644\u0623\u0648\u0631\u0648\u0628\u064a\u0629 \u0648\u0627\u0644\u0639\u0642\u062f \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629<\/li>\n<\/ul>\n<hr data-start=\"1666\" data-end=\"1669\" \/>\n<h3 data-section-id=\"nha58o\" data-start=\"1671\" data-end=\"1710\">\u0635\u0644\u0627\u0628\u0629 \u0639\u0627\u0644\u064a\u0629 \u0648\u062b\u0628\u0627\u062a \u062f\u0642\u064a\u0642<\/h3>\n<ul data-start=\"1711\" data-end=\"1837\">\n<li data-section-id=\"n58wtx\" data-start=\"1711\" data-end=\"1740\">\u0645\u0639\u0627\u0645\u0644 \u064a\u0648\u0646\u063a: \u062d\u0648\u0627\u0644\u064a 420 \u062c\u064a\u062c\u0627 \u0628\u0627\u0633\u0643\u0627\u0644<\/li>\n<li data-section-id=\"wiw01d\" data-start=\"1741\" data-end=\"1790\">\u064a\u0645\u0646\u0639 \u0627\u062e\u062a\u0644\u0627\u0644 \u0645\u062d\u0627\u0630\u0627\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0646\u0627\u062a\u062c \u0639\u0646 \u0627\u0644\u0627\u0647\u062a\u0632\u0627\u0632\u0627\u062a<\/li>\n<li data-section-id=\"kx1hzh\" data-start=\"1791\" data-end=\"1837\">\u064a\u0636\u0645\u0646 \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0622\u0644\u064a \u0627\u0644\u0645\u0633\u062a\u0642\u0631 \u0639\u0627\u0644\u064a \u0627\u0644\u0633\u0631\u0639\u0629<\/li>\n<\/ul>\n<hr data-start=\"1839\" data-end=\"1842\" \/>\n<h3 data-section-id=\"2ge170\" data-start=\"1844\" data-end=\"1875\">\u062b\u0628\u0627\u062a \u062d\u0631\u0627\u0631\u064a \u0645\u0645\u062a\u0627\u0632<\/h3>\n<ul data-start=\"1876\" data-end=\"2015\">\n<li data-section-id=\"ibg0yp\" data-start=\"1876\" data-end=\"1927\">\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u062a\u0634\u063a\u064a\u0644: \u062d\u062a\u0649 1600 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 (\u0645\u0624\u0643\u0633\u062f\u0629)<\/li>\n<li data-section-id=\"1e7mmjn\" data-start=\"1928\" data-end=\"1963\">\u062d\u062a\u0649 1950 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 (\u062c\u0648 \u062e\u0627\u0645\u0644)<\/li>\n<li data-section-id=\"j5ees9\" data-start=\"1964\" data-end=\"2015\">\u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0628\u064a\u0626\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0642\u0627\u0633\u064a\u0629<\/li>\n<\/ul>\n<hr data-start=\"2017\" data-end=\"2020\" \/>\n<h3 data-section-id=\"1twxua8\" data-start=\"2022\" data-end=\"2063\">\u0645\u0642\u0627\u0648\u0645\u0629 \u0641\u0627\u0626\u0642\u0629 \u0644\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/h3>\n<ul data-start=\"2064\" data-end=\"2212\">\n<li data-section-id=\"x6lsw\" data-start=\"2064\" data-end=\"2120\">\u0645\u0642\u0627\u0648\u0645\u0629 \u0644\u0644\u0623\u062d\u0645\u0627\u0636 \u0648\u0627\u0644\u0642\u0644\u0648\u064a\u0627\u062a \u0648\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/li>\n<li data-section-id=\"1c1d6qm\" data-start=\"2121\" data-end=\"2169\">\u0644\u0627 \u064a\u0648\u062c\u062f \u062a\u0622\u0643\u0644 \u0641\u064a \u063a\u0631\u0641 \u0627\u0644\u062d\u0641\u0631 \u0628\u0627\u0644\u062d\u0645\u0636 \u0627\u0644\u0641\u064a\u0632\u064a\u0626\u064a \u0627\u0644\u0642\u0627\u0628\u0644 \u0644\u0644\u062a\u0641\u062a\u064a\u062a\/\u0627\u0644\u062a\u0641\u062d\u064a\u0645 \u0627\u0644\u0637\u064a\u0641\u064a \u0627\u0644\u0645\u0633\u062a\u0645\u0631\/\u0627\u0644\u062d\u0641\u0631 \u0628\u0627\u0644\u062d\u0645\u0636 \u0627\u0644\u0641\u064a\u0632\u064a\u0626\u064a \u0627\u0644\u0645\u062a\u0637\u0627\u064a\u0631<\/li>\n<li data-section-id=\"1o7zcce\" data-start=\"2170\" data-end=\"2212\">\u0645\u0633\u062a\u0642\u0631\u0629 \u0641\u064a \u063a\u0627\u0632\u0627\u062a \u0645\u0639\u0627\u0644\u062c\u0629 SiH\u2084\u060c NH\u2083\u060c HCl<\/li>\n<\/ul>\n<hr data-start=\"2214\" data-end=\"2217\" \/>\n<h3 data-section-id=\"14bamzt\" data-start=\"2219\" data-end=\"2252\">\u0639\u0645\u0631 \u062e\u062f\u0645\u0629 \u0637\u0648\u064a\u0644 \u0648\u062e\u0627\u0644\u064d \u0645\u0646 \u0627\u0644\u062a\u0622\u0643\u0644<\/h3>\n<ul data-start=\"2253\" data-end=\"2380\">\n<li data-section-id=\"10g9b8f\" data-start=\"2253\" data-end=\"2283\">\u0635\u0644\u0627\u0628\u0629 \u0641\u064a\u0643\u0631\u0632: ~ 2800 HV<\/li>\n<li data-section-id=\"14dvdy4\" data-start=\"2284\" data-end=\"2335\">\u0639\u062f\u0645 \u062a\u0633\u0627\u0642\u0637 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0623\u062b\u0646\u0627\u0621 \u0627\u0644\u062a\u0634\u063a\u064a\u0644 \u0637\u0648\u064a\u0644 \u0627\u0644\u0623\u0645\u062f<\/li>\n<li data-section-id=\"12rqc97\" data-start=\"2336\" data-end=\"2380\">\u0645\u062a\u0627\u0646\u0629 \u0645\u0645\u062a\u0627\u0632\u0629 \u0644\u0644\u0633\u0637\u062d (Ra &lt; 0.2 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631)<\/li>\n<\/ul>\n<hr data-start=\"2382\" data-end=\"2385\" \/>\n<h2 data-section-id=\"1xqplm3\" data-start=\"2387\" data-end=\"2418\">\u0627\u0644\u0645\u064a\u0632\u0627\u062a \u0627\u0644\u0647\u064a\u0643\u0644\u064a\u0629 \u0648\u0627\u0644\u062a\u0635\u0645\u064a\u0645\u064a\u0629<\/h2>\n<h3 data-section-id=\"1nh5g76\" data-start=\"2420\" data-end=\"2457\">\u0647\u0646\u062f\u0633\u0629 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u062f\u0642\u064a\u0642\u0629<\/h3>\n<p data-start=\"2458\" data-end=\"2467\">\u064a\u062f\u0639\u0645:<\/p>\n<ul data-start=\"2468\" data-end=\"2596\">\n<li data-section-id=\"15tpg53\" data-start=\"2468\" data-end=\"2508\">\u0631\u0642\u0627\u0642\u0627\u062a 150 \u0645\u0645 \/ 200 \u0645\u0645 \/ 300 \u0645\u0645 \/ 450 \u0645\u0645 \/ 450 \u0645\u0645<\/li>\n<li data-section-id=\"1rnwp5m\" data-start=\"2509\" data-end=\"2563\">\u0642\u0628\u0636\u0629 \u0627\u0644\u062d\u0627\u0641\u0629\/\u0645\u062d\u0627\u0630\u0627\u0629 \u0627\u0644\u0634\u0642\/\u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0627\u0644\u062f\u0639\u0645 \u0627\u0644\u0645\u0633\u0637\u062d<\/li>\n<li data-section-id=\"qm27un\" data-start=\"2564\" data-end=\"2596\">\u062a\u0643\u0627\u0645\u0644 \u0630\u0631\u0627\u0639 \u0627\u0644\u0631\u0648\u0628\u0648\u062a \u0627\u0644\u0645\u062e\u0635\u0635<\/li>\n<\/ul>\n<hr data-start=\"2598\" data-end=\"2601\" \/>\n<h3 data-section-id=\"1yw23gm\" data-start=\"2603\" data-end=\"2643\">\u0647\u064a\u0643\u0644 \u062e\u0641\u064a\u0641 \u0627\u0644\u0648\u0632\u0646 \u0639\u0627\u0644\u064a \u0627\u0644\u0635\u0644\u0627\u0628\u0629<\/h3>\n<ul data-start=\"2644\" data-end=\"2768\">\n<li data-section-id=\"tt3pyh\" data-start=\"2644\" data-end=\"2677\">\u0646\u0633\u0628\u0629 \u0635\u0644\u0627\u0628\u0629 \u0639\u0627\u0644\u064a\u0629 \u0625\u0644\u0649 \u0627\u0644\u0648\u0632\u0646<\/li>\n<li data-section-id=\"1sb17em\" data-start=\"2678\" data-end=\"2721\">\u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0644\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0631\u0648\u0628\u0648\u062a\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0633\u0631\u0639\u0629<\/li>\n<li data-section-id=\"1j6yie2\" data-start=\"2722\" data-end=\"2768\">\u064a\u0642\u0644\u0644 \u0645\u0646 \u0627\u0644\u0627\u0646\u062d\u0631\u0627\u0641 \u0627\u0644\u062f\u064a\u0646\u0627\u0645\u064a\u0643\u064a \u0623\u062b\u0646\u0627\u0621 \u0627\u0644\u062d\u0631\u0643\u0629<\/li>\n<\/ul>\n<hr data-start=\"2770\" data-end=\"2773\" \/>\n<h3 data-section-id=\"97w9la\" data-start=\"2775\" data-end=\"2809\">\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0623\u0633\u0637\u062d \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629<\/h3>\n<ul data-start=\"2810\" data-end=\"2905\">\n<li data-section-id=\"1lu1i7j\" data-start=\"2810\" data-end=\"2844\">\u0627\u0644\u0637\u062d\u0646 \u0648\u0627\u0644\u062a\u0644\u0645\u064a\u0639 \u0627\u0644\u062f\u0642\u064a\u0642<\/li>\n<li data-section-id=\"1amctgl\" data-start=\"2845\" data-end=\"2870\">\u062e\u0634\u0648\u0646\u0629 \u0627\u0644\u0633\u0637\u062d \u0627\u0644\u0645\u0646\u062e\u0641\u0636\u0629<\/li>\n<li data-section-id=\"1js4nxo\" data-start=\"2871\" data-end=\"2905\">\u0647\u064a\u0643\u0644 \u0645\u062a\u0648\u0627\u0641\u0642 \u0645\u0639 \u063a\u0631\u0641 \u0627\u0644\u062a\u0639\u0642\u064a\u0645<\/li>\n<\/ul>\n<hr data-start=\"2907\" data-end=\"2910\" \/>\n<h3 data-section-id=\"50i47d\" data-start=\"2912\" data-end=\"2944\">\u0648\u0627\u062c\u0647\u0629 \u0647\u0646\u062f\u0633\u064a\u0629 \u0645\u062e\u0635\u0635\u0629<\/h3>\n<ul data-start=\"2945\" data-end=\"3063\">\n<li data-section-id=\"1dle0c1\" data-start=\"2945\" data-end=\"2981\">\u062a\u0648\u0627\u0641\u0642 \u062a\u0631\u0643\u064a\u0628 \u0630\u0631\u0627\u0639 \u0627\u0644\u0631\u0648\u0628\u0648\u062a<\/li>\n<li data-section-id=\"19fhsyz\" data-start=\"2982\" data-end=\"3018\">\u062a\u0643\u0627\u0645\u0644 \u0645\u0635\u0646\u0639\u064a \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0623\u0635\u0644\u064a\u0629 \u0644\u0623\u0646\u0638\u0645\u0629 AMHS<\/li>\n<li data-section-id=\"3wahd3\" data-start=\"3019\" data-end=\"3063\">\u0645\u0648\u0627\u0636\u0639 \u0627\u0644\u0641\u062a\u062d\u0627\u062a \u0627\u0644\u0645\u062e\u0635\u0635\u0629 \u0648\u062a\u0635\u0645\u064a\u0645 \u0627\u0644\u062a\u0631\u0643\u064a\u0628\u0627\u062a<\/li>\n<\/ul>\n<hr data-start=\"3065\" data-end=\"3068\" \/>\n<h2 data-section-id=\"rb24ym\" data-start=\"3070\" data-end=\"3089\">\u062e\u064a\u0627\u0631\u0627\u062a \u0627\u0644\u0645\u0648\u0627\u062f<\/h2>\n<h3 data-section-id=\"87v3o9\" data-start=\"3091\" data-end=\"3124\">\u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0628\u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0627\u0644\u0642\u0627\u0628\u0644 \u0644\u0644\u062a\u0641\u0643\u064a\u0643 \u0628\u0627\u0644\u062a\u0642\u0646\u064a\u0629 CVD (CVD SiC)<\/h3>\n<ul data-start=\"3125\" data-end=\"3232\">\n<li data-section-id=\"1qjlbs6\" data-start=\"3125\" data-end=\"3146\">\u0646\u0642\u0627\u0621 \u0641\u0627\u0626\u0642 \u0627\u0644\u0646\u0642\u0627\u0621<\/li>\n<li data-section-id=\"1856ohe\" data-start=\"3147\" data-end=\"3198\">\u0627\u0644\u0623\u0641\u0636\u0644 \u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0627\u0644\u0623\u0648\u0631\u0648\u0628\u064a\u0629\/ \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629<\/li>\n<li data-section-id=\"1lwpzbt\" data-start=\"3199\" data-end=\"3232\">\u0645\u0633\u062a\u0648\u0649 \u062a\u0644\u0648\u062b \u0645\u0646\u062e\u0641\u0636 \u0644\u0644\u063a\u0627\u064a\u0629<\/li>\n<\/ul>\n<hr data-start=\"3234\" data-end=\"3237\" \/>\n<h3 data-section-id=\"gwj4n0\" data-start=\"3239\" data-end=\"3274\">\u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0627\u0644\u0645\u0644\u0628\u062f (SSiC)<\/h3>\n<ul data-start=\"3275\" data-end=\"3402\">\n<li data-section-id=\"1hi8oju\" data-start=\"3275\" data-end=\"3312\">\u0642\u0648\u0629 \u0639\u0627\u0644\u064a\u0629 \u0648\u0645\u0642\u0627\u0648\u0645\u0629 \u0639\u0627\u0644\u064a\u0629 \u0644\u0644\u062a\u0622\u0643\u0644<\/li>\n<li data-section-id=\"1rnk9x7\" data-start=\"3313\" data-end=\"3363\">\u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0623\u0646\u0638\u0645\u0629 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0635\u0646\u0627\u0639\u064a\u0629<\/li>\n<li data-section-id=\"67fp04\" data-start=\"3364\" data-end=\"3402\">\u062a\u0648\u0627\u0632\u0646 \u0645\u0645\u062a\u0627\u0632 \u0628\u064a\u0646 \u0627\u0644\u062a\u0643\u0644\u0641\u0629 \u0648\u0627\u0644\u0623\u062f\u0627\u0621<\/li>\n<\/ul>\n<hr data-start=\"3404\" data-end=\"3407\" \/>\n<h2 data-section-id=\"1cgu054\" data-start=\"3409\" data-end=\"3436\">\u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u0641\u0646\u064a\u0629<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3438\" data-end=\"3888\">\n<thead data-start=\"3438\" data-end=\"3462\">\n<tr data-start=\"3438\" data-end=\"3462\">\n<th class=\"last:pe-10\" data-start=\"3438\" data-end=\"3445\" data-col-size=\"sm\">\u0627\u0644\u0628\u0646\u062f<\/th>\n<th class=\"last:pe-10\" data-start=\"3445\" data-end=\"3462\" data-col-size=\"sm\">\u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3487\" data-end=\"3888\">\n<tr data-start=\"3487\" data-end=\"3516\">\n<td data-start=\"3487\" data-end=\"3498\" data-col-size=\"sm\">\u0627\u0644\u0645\u0648\u0627\u062f<\/td>\n<td data-col-size=\"sm\" data-start=\"3498\" data-end=\"3516\">CVD SiC \/ SSiC<\/td>\n<\/tr>\n<tr data-start=\"3517\" data-end=\"3536\">\n<td data-start=\"3517\" data-end=\"3526\" data-col-size=\"sm\">\u0627\u0644\u0646\u0642\u0627\u0621<\/td>\n<td data-start=\"3526\" data-end=\"3536\" data-col-size=\"sm\">&gt;99.5%<\/td>\n<\/tr>\n<tr data-start=\"3537\" data-end=\"3561\">\n<td data-start=\"3537\" data-end=\"3550\" data-col-size=\"sm\">\u062d\u062c\u0645 \u0627\u0644\u062d\u0628\u064a\u0628\u0627\u062a<\/td>\n<td data-col-size=\"sm\" data-start=\"3550\" data-end=\"3561\">4-10 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631<\/td>\n<\/tr>\n<tr data-start=\"3562\" data-end=\"3587\">\n<td data-start=\"3562\" data-end=\"3572\" data-col-size=\"sm\">\u0627\u0644\u0643\u062b\u0627\u0641\u0629<\/td>\n<td data-col-size=\"sm\" data-start=\"3572\" data-end=\"3587\">&gt;3.14 \u062c\u0645\/\u0633\u0645 \u0645\u0643\u0639\u0628<\/td>\n<\/tr>\n<tr data-start=\"3588\" data-end=\"3611\">\n<td data-start=\"3588\" data-end=\"3599\" data-col-size=\"sm\">\u0627\u0644\u0635\u0644\u0627\u0628\u0629<\/td>\n<td data-col-size=\"sm\" data-start=\"3599\" data-end=\"3611\">~\u062d\u0648\u0627\u0644\u064a 2800 \u0641\u0648\u0644\u062a \u0647\u064a\u062f\u0631\u0648\u062c\u064a\u0646\u064a<\/td>\n<\/tr>\n<tr data-start=\"3612\" data-end=\"3643\">\n<td data-start=\"3612\" data-end=\"3632\" data-col-size=\"sm\">\u0642\u0648\u0629 \u0627\u0644\u0627\u0646\u062b\u0646\u0627\u0621<\/td>\n<td data-col-size=\"sm\" data-start=\"3632\" data-end=\"3643\">450 \u0645\u064a\u062c\u0627 \u0628\u0627\u0633\u0643\u0627\u0644<\/td>\n<\/tr>\n<tr data-start=\"3644\" data-end=\"3673\">\n<td data-start=\"3644\" data-end=\"3662\" data-col-size=\"sm\">\u0645\u0639\u0627\u0645\u0644 \u0627\u0644\u0645\u0631\u0648\u0646\u0629<\/td>\n<td data-col-size=\"sm\" data-start=\"3662\" data-end=\"3673\">420 \u062c\u064a\u062c\u0627 \u0628\u0627\u0633\u0643\u0627\u0644<\/td>\n<\/tr>\n<tr data-start=\"3674\" data-end=\"3710\">\n<td data-start=\"3674\" data-end=\"3697\" data-col-size=\"sm\">\u0627\u0644\u062a\u0648\u0635\u064a\u0644 \u0627\u0644\u062d\u0631\u0627\u0631\u064a<\/td>\n<td data-col-size=\"sm\" data-start=\"3697\" data-end=\"3710\">160 \u0648\u0627\u0637\/\u0645-\u0643<\/td>\n<\/tr>\n<tr data-start=\"3711\" data-end=\"3768\">\n<td data-start=\"3711\" data-end=\"3729\" data-col-size=\"sm\">\u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0642\u0635\u0648\u0649<\/td>\n<td data-col-size=\"sm\" data-start=\"3729\" data-end=\"3768\">1600 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 (\u0623\u0643\u0633\u062f\u0629) \/ 1950 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 (\u062e\u0627\u0645\u0644\u0629)<\/td>\n<\/tr>\n<tr data-start=\"3769\" data-end=\"3810\">\n<td data-start=\"3769\" data-end=\"3794\" data-col-size=\"sm\">\u0627\u0644\u0645\u0642\u0627\u0648\u0645\u0627\u062a\u064a\u0629 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629<\/td>\n<td data-col-size=\"sm\" data-start=\"3794\" data-end=\"3810\">10\u2076 -10\u2078 \u03a9-\u0633\u0645<\/td>\n<\/tr>\n<tr data-start=\"3811\" data-end=\"3851\">\n<td data-start=\"3811\" data-end=\"3828\" data-col-size=\"sm\">\u062a\u0634\u0637\u064a\u0628 \u0627\u0644\u0633\u0637\u062d<\/td>\n<td data-col-size=\"sm\" data-start=\"3828\" data-end=\"3851\">\u0645\u0635\u0642\u0648\u0644 \u0641\u0627\u0626\u0642 \u0627\u0644\u0646\u0639\u0648\u0645\u0629<\/td>\n<\/tr>\n<tr data-start=\"3852\" data-end=\"3888\">\n<td data-start=\"3852\" data-end=\"3859\" data-col-size=\"sm\">\u0627\u0644\u062d\u062c\u0645<\/td>\n<td data-start=\"3859\" data-end=\"3888\" data-col-size=\"sm\">\u0645\u062e\u0635\u0635 (\u0631\u0642\u0627\u0642\u0627\u062a 150-450 \u0645\u0645)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3890\" data-end=\"3893\" \/>\n<h2 data-section-id=\"mu966k\" data-start=\"3895\" data-end=\"3910\">\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a<\/h2>\n<h3 data-section-id=\"6yu2ul\" data-start=\"3912\" data-end=\"3943\">\u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/h3>\n<ul data-start=\"3944\" data-end=\"4097\">\n<li data-section-id=\"49bdmt\" data-start=\"3944\" data-end=\"3978\">\u0645\u0646\u0627\u0648\u0644\u0629 \u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0644\u064a\u062b\u0648\u063a\u0631\u0627\u0641\u064a\u0629 \u0628\u0627\u0644\u0627\u0646\u0628\u0639\u0627\u062b \u0627\u0644\u0636\u0648\u0626\u064a \u0627\u0644\u0623\u0648\u0631\u0648\u0628\u064a<\/li>\n<li data-section-id=\"11xdzhh\" data-start=\"3979\" data-end=\"4017\">\u0623\u0646\u0638\u0645\u0629 \u0646\u0642\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0631\u0648\u0628\u0648\u062a\u064a\u0629 300 \u0645\u0645<\/li>\n<li data-section-id=\"ox84z0\" data-start=\"4018\" data-end=\"4060\">\u0623\u062a\u0645\u062a\u0629 \u063a\u0631\u0641\u0629 \u0627\u0644\u062d\u0641\u0631 \u0628\u0627\u0644\u062d\u0645\u0636 \u0627\u0644\u0646\u0648\u0648\u064a \u0627\u0644\u0642\u0627\u0628\u0644 \u0644\u0644\u062a\u0635\u0648\u064a\u0631 \u0628\u0627\u0644\u0623\u0634\u0639\u0629 \u0627\u0644\u0645\u0642\u0637\u0639\u064a\u0629\/\u0627\u0644\u062a\u0641\u062d\u064a\u0645 \u0627\u0644\u0637\u064a\u0641\u064a \u0628\u0627\u0644\u0628\u0637\u0627\u0631\u064a\u0627\u062a \u0627\u0644\u0628\u0648\u0644\u064a \u0641\u064a\u0646\u064a\u0644 \u0641\u0648\u0633\u0641\u0627\u062a\u064a\u0629\/\u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0622\u0644\u064a<\/li>\n<li data-section-id=\"teg2xm\" data-start=\"4061\" data-end=\"4097\">\u0646\u0642\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0645\u0632\u0631\u0648\u0639\u0629 \u0628\u0627\u0644\u0623\u064a\u0648\u0646\u0627\u062a<\/li>\n<\/ul>\n<hr data-start=\"4099\" data-end=\"4102\" \/>\n<h3 data-section-id=\"sf9357\" data-start=\"4104\" data-end=\"4140\">\u0645\u0648\u0627\u062f \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629<\/h3>\n<ul data-start=\"4141\" data-end=\"4248\">\n<li data-section-id=\"iiuum6\" data-start=\"4141\" data-end=\"4176\">\u0645\u0639\u0627\u0644\u062c\u0629 \u0631\u0642\u0627\u0642\u0629 \u0631\u0642\u0627\u0642\u0629 \u062c\u0647\u0627\u0632 \u0627\u0644\u0637\u0627\u0642\u0629 SiC<\/li>\n<li data-section-id=\"se94ot\" data-start=\"4177\" data-end=\"4211\">\u0623\u0646\u0638\u0645\u0629 \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u063a\u0627\u0644\u064a\u0648\u0645 \u0627\u0644\u0645\u0634\u0628\u0639 \u0628\u0627\u0644\u0641\u0644\u0648\u0631 (GaN epitaxy)<\/li>\n<li data-section-id=\"3yciq1\" data-start=\"4212\" data-end=\"4248\">\u0639\u0645\u0644\u064a\u0627\u062a MOCVD \u0630\u0627\u062a \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629<\/li>\n<\/ul>\n<hr data-start=\"4250\" data-end=\"4253\" \/>\n<h3 data-section-id=\"11khwnl\" data-start=\"4255\" data-end=\"4286\">\u0627\u0644\u0635\u0646\u0627\u0639\u0629 \u0627\u0644\u0643\u0647\u0631\u0648\u0636\u0648\u0626\u064a\u0629 \u0648\u0627\u0644\u0635\u0645\u0627\u0645\u0627\u062a \u0627\u0644\u062b\u0646\u0627\u0626\u064a\u0629 \u0627\u0644\u0628\u0627\u0639\u062b\u0629 \u0644\u0644\u0636\u0648\u0621<\/h3>\n<ul data-start=\"4287\" data-end=\"4389\">\n<li data-section-id=\"q29bxq\" data-start=\"4287\" data-end=\"4319\">\u062e\u0637\u0648\u0637 \u0623\u062a\u0645\u062a\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0627\u0644\u0634\u0645\u0633\u064a\u0629<\/li>\n<li data-section-id=\"10mww1v\" data-start=\"4320\" data-end=\"4361\">\u0623\u0646\u0638\u0645\u0629 \u0646\u0642\u0644 \u0627\u0644\u0635\u0645\u0627\u0645\u0627\u062a \u0627\u0644\u062b\u0646\u0627\u0626\u064a\u0629 \u0627\u0644\u0628\u0627\u0639\u062b\u0629 \u0644\u0644\u0636\u0648\u0621 \u0627\u0644\u0635\u063a\u064a\u0631\u0629\/\u0627\u0644\u0645\u0635\u063a\u0631\u0629<\/li>\n<li data-section-id=\"dp5vhg\" data-start=\"4362\" data-end=\"4389\">\u0645\u0646\u0627\u0648\u0644\u0629 \u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u064a\u0627\u0642\u0648\u062a \u0627\u0644\u064a\u0627\u0642\u0648\u062a<\/li>\n<\/ul>\n<hr data-start=\"4391\" data-end=\"4394\" \/>\n<h3 data-section-id=\"j366yc\" data-start=\"4396\" data-end=\"4428\">\u0627\u0644\u0623\u062a\u0645\u062a\u0629 \u0648\u0627\u0644\u0631\u0648\u0628\u0648\u062a\u0627\u062a (AMHS)<\/h3>\n<ul data-start=\"4429\" data-end=\"4533\">\n<li data-section-id=\"fpj2it\" data-start=\"4429\" data-end=\"4459\">\u0623\u0630\u0631\u0639 \u0631\u0648\u0628\u0648\u062a \u0646\u0642\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a<\/li>\n<li data-section-id=\"e4e8u3\" data-start=\"4460\" data-end=\"4492\">\u0623\u0646\u0638\u0645\u0629 \u0623\u062a\u0645\u062a\u0629 \u063a\u0631\u0641 \u0627\u0644\u0623\u0628\u062d\u0627\u062b<\/li>\n<li data-section-id=\"k0rhy6\" data-start=\"4493\" data-end=\"4533\">\u0623\u0646\u0638\u0645\u0629 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0633\u0631\u0639\u0629<\/li>\n<\/ul>\n<hr data-start=\"4535\" data-end=\"4538\" \/>\n<h3 data-section-id=\"1c5bbdr\" data-start=\"4540\" data-end=\"4573\">\u0627\u0644\u0623\u0628\u062d\u0627\u062b \u0648\u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0645\u062a\u0637\u0648\u0631\u0629<\/h3>\n<ul data-start=\"4574\" data-end=\"4679\">\n<li data-section-id=\"1sbej07\" data-start=\"4574\" data-end=\"4604\">\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0643\u0645\u064a\u0629<\/li>\n<li data-section-id=\"5u37w7\" data-start=\"4605\" data-end=\"4641\">\u0623\u0646\u0638\u0645\u0629 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0627\u0644\u0645\u0628\u0631\u062f\u0629<\/li>\n<li data-section-id=\"i12e24\" data-start=\"4642\" data-end=\"4679\">\u0627\u0644\u062a\u0639\u0628\u0626\u0629 \u0648\u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0627\u0644\u0645\u062a\u0642\u062f\u0645 (3D IC \/ MEMS)<\/li>\n<\/ul>\n<hr data-start=\"4681\" data-end=\"4684\" \/>\n<h2 data-section-id=\"vm5qii\" data-start=\"4686\" data-end=\"4715\">\u0645\u0644\u062e\u0635 \u0645\u0632\u0627\u064a\u0627 \u0627\u0644\u0645\u0646\u062a\u062c<\/h2>\n<ul data-start=\"4717\" data-end=\"4996\">\n<li data-section-id=\"r4wmoo\" data-start=\"4717\" data-end=\"4750\">\u0627\u0646\u0639\u062f\u0627\u0645 \u0645\u062e\u0627\u0637\u0631 \u0627\u0644\u062a\u0644\u0648\u062b \u0628\u0627\u0644\u0645\u0639\u0627\u062f\u0646<\/li>\n<li data-section-id=\"w80eyq\" data-start=\"4751\" data-end=\"4797\">\u0635\u0644\u0627\u0628\u0629 \u0641\u0627\u0626\u0642\u0629 \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u0635\u0644\u0627\u0628\u0629 \u0644\u0644\u062a\u0639\u0627\u0645\u0644 \u0627\u0644\u062f\u0642\u064a\u0642<\/li>\n<li data-section-id=\"ovhb2l\" data-start=\"4798\" data-end=\"4842\">\u062b\u0628\u0627\u062a \u062d\u0631\u0627\u0631\u064a \u0648\u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0645\u0645\u062a\u0627\u0632<\/li>\n<li data-section-id=\"1pry50x\" data-start=\"4843\" data-end=\"4878\">\u0639\u0645\u0631 \u0627\u0641\u062a\u0631\u0627\u0636\u064a \u0637\u0648\u064a\u0644 \u0645\u0639 \u0627\u0644\u062d\u062f \u0627\u0644\u0623\u062f\u0646\u0649 \u0645\u0646 \u0627\u0644\u062a\u0622\u0643\u0644<\/li>\n<li data-section-id=\"16clm2x\" data-start=\"4879\" data-end=\"4919\">\u0645\u062a\u0648\u0627\u0641\u0642 \u0645\u0639 \u0623\u062a\u0645\u062a\u0629 \u063a\u0631\u0641 \u0627\u0644\u0623\u0628\u062d\u0627\u062b<\/li>\n<li data-section-id=\"1usfebt\" data-start=\"4920\" data-end=\"4956\">\u0642\u0627\u0628\u0644\u0629 \u0644\u0644\u062a\u062e\u0635\u064a\u0635 \u0644\u062c\u0645\u064a\u0639 \u0623\u062d\u062c\u0627\u0645 \u0627\u0644\u0631\u0642\u0627\u0626\u0642<\/li>\n<li data-section-id=\"whnxc2\" data-start=\"4957\" data-end=\"4996\">\u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0639\u0642\u062f EUV \u0648\u0627\u0644\u0639\u0642\u062f \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629<\/li>\n<\/ul>\n<hr data-start=\"4998\" data-end=\"5001\" \/>\n<h2 data-section-id=\"rnyyeg\" data-start=\"5003\" data-end=\"5027\">\u062e\u064a\u0627\u0631\u0627\u062a \u0627\u0644\u062a\u062e\u0635\u064a\u0635<img decoding=\"async\" class=\"size-medium wp-image-2102 alignright\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2-100x100.png 100w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Customized-SiC-Ceramic-End-Effector-for-Wafer-Handling-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/h2>\n<p data-start=\"5029\" data-end=\"5067\">\u0646\u062d\u0646 \u0646\u062f\u0639\u0645 \u0627\u0644\u062a\u062e\u0635\u064a\u0635 \u0627\u0644\u0643\u0627\u0645\u0644 \u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0623\u0635\u0644\u064a\u0629\/\u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u062d\u0633\u0628 \u0627\u0644\u0637\u0644\u0628:<\/p>\n<ul data-start=\"5069\" data-end=\"5319\">\n<li data-section-id=\"pzy3qt\" data-start=\"5069\" data-end=\"5127\">\u0647\u0646\u062f\u0633\u0629 \u0627\u0644\u0645\u0633\u062a\u062c\u064a\u0628 \u0627\u0644\u0637\u0631\u0641\u064a (\u0642\u0628\u0636\u0629 \u0645\u0633\u0637\u062d\u0629\/\u0642\u0628\u0636\u0629 \u0627\u0644\u062d\u0627\u0641\u0629\/\u0645\u062d\u0627\u0630\u0627\u0629 \u0627\u0644\u0634\u0642)<\/li>\n<li data-section-id=\"173oufn\" data-start=\"5128\" data-end=\"5168\">\u062a\u0648\u0627\u0641\u0642 \u062d\u062c\u0645 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 (150-450 \u0645\u0645)<\/li>\n<li data-section-id=\"1sh3bgb\" data-start=\"5169\" data-end=\"5195\">\u062a\u0635\u0645\u064a\u0645 \u0648\u0627\u062c\u0647\u0629 \u0627\u0644\u0631\u0648\u0628\u0648\u062a<\/li>\n<li data-section-id=\"1ma3ck\" data-start=\"5196\" data-end=\"5252\">\u0637\u0644\u0627\u0621 \u0627\u0644\u0633\u0637\u062d (\u0645\u0636\u0627\u062f \u0644\u0644\u0643\u0647\u0631\u0628\u0627\u0621 \u0627\u0644\u0633\u0627\u0643\u0646\u0629\/\u0645\u0636\u0627\u062f \u0644\u0644\u0645\u0627\u0621 \u0627\u062e\u062a\u064a\u0627\u0631\u064a)<\/li>\n<li data-section-id=\"7mw706\" data-start=\"5253\" data-end=\"5289\">\u062a\u062d\u0633\u064a\u0646 \u062f\u0642\u0629 \u0627\u0644\u062a\u062d\u0645\u0644<\/li>\n<li data-section-id=\"w4j63d\" data-start=\"5290\" data-end=\"5319\">\u062a\u0634\u0637\u064a\u0628\u0627\u062a \u0645\u0646 \u0627\u0644\u062f\u0631\u062c\u0629 \u0627\u0644\u0646\u0638\u064a\u0641\u0629<\/li>\n<\/ul>\n<hr data-start=\"5321\" data-end=\"5324\" \/>\n<h2 data-section-id=\"1hryhf7\" data-start=\"5326\" data-end=\"5332\">\u0627\u0644\u0623\u0633\u0626\u0644\u0629 \u0627\u0644\u0634\u0627\u0626\u0639\u0629<\/h2>\n<h3 data-section-id=\"1mpzh4o\" data-start=\"5334\" data-end=\"5384\">\u06331: \u0644\u0645\u0627\u0630\u0627 \u0627\u0633\u062a\u062e\u062f\u0627\u0645 SiC \u0628\u062f\u0644\u0627\u064b \u0645\u0646 \u0627\u0644\u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645 \u0623\u0648 \u0627\u0644\u0643\u0648\u0627\u0631\u062a\u0632\u061f<\/h3>\n<ul data-start=\"5385\" data-end=\"5556\">\n<li data-section-id=\"1xvhlf0\" data-start=\"5385\" data-end=\"5437\">\u0627\u0644\u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645: \u062a\u0648\u0644\u064a\u062f \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a + \u0645\u0634\u0627\u0643\u0644 \u0627\u0644\u0623\u0643\u0633\u062f\u0629<\/li>\n<li data-section-id=\"1q7gghy\" data-start=\"5438\" data-end=\"5489\">\u0627\u0644\u0643\u0648\u0627\u0631\u062a\u0632: \u0647\u0634 + \u0645\u0642\u0627\u0648\u0645\u0629 \u0636\u0639\u064a\u0641\u0629 \u0644\u0644\u0635\u062f\u0645\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/li>\n<li data-section-id=\"vgt2b3\" data-start=\"5490\" data-end=\"5556\">SiC: \u0623\u0641\u0636\u0644 \u0645\u0632\u064a\u062c \u0645\u0646 \u0627\u0644\u0635\u0644\u0627\u0628\u0629 \u0648\u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0648\u0627\u0644\u0645\u062a\u0627\u0646\u0629<\/li>\n<\/ul>\n<hr data-start=\"5558\" data-end=\"5561\" \/>\n<h3 data-section-id=\"1cxfupn\" data-start=\"5563\" data-end=\"5599\">\u06332: \u0647\u0644 \u064a\u0645\u0643\u0646\u0647\u0627 \u062f\u0639\u0645 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0645\u0642\u0627\u0633 450 \u0645\u0645\u061f<\/h3>\n<p data-start=\"5600\" data-end=\"5667\">\u0646\u0639\u0645\u060c \u062a\u062a\u0648\u0641\u0631 \u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0645\u062e\u0635\u0635\u0629 \u0644\u0623\u0646\u0638\u0645\u0629 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0645\u0642\u0627\u0633 450 \u0645\u0645.<\/p>\n<hr data-start=\"5669\" data-end=\"5672\" \/>\n<h3 data-section-id=\"a4nxop\" data-start=\"5674\" data-end=\"5717\">\u06333: \u0647\u0644 \u0647\u064a \u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0628\u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629\u061f<\/h3>\n<p data-start=\"5718\" data-end=\"5803\">\u0646\u0639\u0645. \u062a\u0641\u064a \u0627\u0644\u0645\u0633\u062a\u062c\u064a\u0628\u0627\u062a \u0627\u0644\u0637\u0631\u0641\u064a\u0629 \u0627\u0644\u0645\u0635\u0646\u0648\u0639\u0629 \u0645\u0646 SiC \u0628\u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u062a\u0648\u0627\u0641\u0642 \u0645\u0639 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0627\u0644\u0645\u0646\u062e\u0641\u0636\u0629 \u0644\u0644\u063a\u0627\u064a\u0629 \u0648\u0627\u0644\u062a\u0648\u0627\u0641\u0642 \u0645\u0639 \u0627\u0644\u062a\u0641\u0631\u064a\u063a.<\/p>\n<hr data-start=\"5805\" data-end=\"5808\" \/>\n<h3 data-section-id=\"1ajqsm3\" data-start=\"5810\" data-end=\"5872\">\u06334: \u0647\u0644 \u064a\u0645\u0643\u0646 \u0627\u0633\u062a\u062e\u062f\u0627\u0645\u0647 \u0641\u064a \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0648\u0627\u0644\u0623\u0646\u0638\u0645\u0629 \u0630\u0627\u062a \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629\u061f<\/h3>\n<p data-start=\"5873\" data-end=\"5951\">\u0646\u0639\u0645\u060c \u064a\u0639\u0645\u0644 SiC \u0628\u062b\u0628\u0627\u062a \u0641\u064a \u0628\u064a\u0626\u0627\u062a \u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0648\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0648\u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629.<\/p>","protected":false},"excerpt":{"rendered":"<p>The Silicon Carbide (SiC) Ceramic End Effector is a high-precision wafer handling component designed for semiconductor automation systems, including wafer transfer robots, AMHS systems, EUV lithography equipment, and high-temperature process tools. Made from high-purity CVD SiC or engineered SSiC, this end effector delivers exceptional rigidity, ultra-low particle generation, and outstanding thermal and chemical stability. It [&hellip;]<\/p>\n","protected":false},"featured_media":2104,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[23],"product_tag":[192,191,190,193,194,195,188,104,189,187],"class_list":["post-2100","product","type-product","status-publish","has-post-thumbnail","product_cat-silicon-carbide-sic","product_tag-300mm-wafer-robot-arm","product_tag-amhs-wafer-transfer-tool","product_tag-cvd-sic-end-effector","product_tag-euv-wafer-handling-component","product_tag-high-precision-ceramic-end-effector","product_tag-semiconductor-automation-parts","product_tag-semiconductor-robot-arm","product_tag-sic-ceramic-end-effector","product_tag-silicon-carbide-wafer-handler","product_tag-wafer-handling-end-effector","desktop-align-left","tablet-align-left","mobile-align-left","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/product\/2100","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/comments?post=2100"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/media\/2104"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/media?parent=2100"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/product_brand?post=2100"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/product_cat?post=2100"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/product_tag?post=2100"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}