{"id":2142,"date":"2026-05-13T01:58:38","date_gmt":"2026-05-13T01:58:38","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2142"},"modified":"2026-05-13T01:58:38","modified_gmt":"2026-05-13T01:58:38","slug":"advanced-ceramic-materials-in-semiconductor-manufacturing-high-purity-extreme-heat-resistance-and-ultra-hard-performance","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ar\/advanced-ceramic-materials-in-semiconductor-manufacturing-high-purity-extreme-heat-resistance-and-ultra-hard-performance\/","title":{"rendered":"\u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u062e\u0632\u0641\u064a\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a: \u0627\u0644\u0646\u0642\u0627\u0621 \u0627\u0644\u0639\u0627\u0644\u064a \u0648\u0627\u0644\u0645\u0642\u0627\u0648\u0645\u0629 \u0627\u0644\u0634\u062f\u064a\u062f\u0629 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\u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0628\u0634\u0643\u0644 \u0643\u0628\u064a\u0631. \u062a\u062a\u0637\u0644\u0628 \u0628\u064a\u0626\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u062d\u062f\u064a\u062b\u0629 \u0645\u0648\u0627\u062f \u0642\u0627\u062f\u0631\u0629 \u0639\u0644\u0649 \u062a\u062d\u0645\u0644 \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0642\u0635\u0648\u0649\u060c \u0648\u0627\u0644\u062a\u0639\u0631\u0636 \u0644\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0645\u0633\u0628\u0628\u0629 \u0644\u0644\u062a\u0622\u0643\u0644\u060c \u0648\u0638\u0631\u0648\u0641 \u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u0646\u0642\u0627\u0621\u060c \u0648\u0627\u0644\u0625\u062c\u0647\u0627\u062f \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0627\u0644\u0639\u0627\u0644\u064a \u0645\u0639 \u0627\u0644\u062d\u0641\u0627\u0638 \u0639\u0644\u0649 \u062b\u0628\u0627\u062a \u0627\u0644\u0623\u0628\u0639\u0627\u062f \u0648\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u062a\u0644\u0648\u062b.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0645\u0646 \u0628\u064a\u0646 \u0627\u0644\u0639\u062f\u064a\u062f \u0645\u0646 \u062d\u0644\u0648\u0644 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u062a\u0627\u062d\u0629 \u0627\u0644\u064a\u0648\u0645\u060c \u0623\u0635\u0628\u062d \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u062a\u0637\u0648\u0631 \u0644\u0627 \u063a\u0646\u0649 \u0639\u0646\u0647 \u0641\u064a \u0645\u0639\u062f\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0628\u0633\u0628\u0628 \u0645\u0632\u064a\u062c\u0647\u0627 \u0627\u0644\u0627\u0633\u062a\u062b\u0646\u0627\u0626\u064a \u0645\u0646 \u0627\u0644\u062e\u0648\u0627\u0635 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 \u0648\u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 \u0648\u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0629.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0645\u0646 \u0623\u0646\u0638\u0645\u0629 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0648\u063a\u0631\u0641 \u0627\u0644\u062d\u0641\u0631 \u0625\u0644\u0649 \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0648\u0623\u0641\u0631\u0627\u0646 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629\u060c \u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u062e\u0632\u0641\u064a\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a \u062c\u0645\u064a\u0639 \u0645\u0631\u0627\u062d\u0644 \u0633\u0644\u0633\u0644\u0629 \u0625\u0646\u062a\u0627\u062c \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment.png\" alt=\"\" class=\"wp-image-2114\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment.png 1000w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-300x300.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-150x150.png 150w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-768x768.png 768w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-12x12.png 12w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-600x600.png 600w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Full-CVD-SiC-Wafer-Carrier-Tray-Plate-for-Semiconductor-MOCVD-Etching-Equipment-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h1 class=\"wp-block-heading\">\u0644\u0645\u0627\u0630\u0627 \u064a\u0639\u062a\u0628\u0631 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u062a\u0642\u062f\u0645 \u0636\u0631\u0648\u0631\u064a\u064b\u0627 \u0641\u064a \u0645\u0639\u062f\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u0623\u0635\u0628\u062d\u062a \u0645\u0639\u062f\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u062f\u0642\u064a\u0642\u0629 \u0648\u0645\u062a\u0637\u0648\u0631\u0629 \u0628\u0634\u0643\u0644 \u0645\u062a\u0632\u0627\u064a\u062f. \u0648\u063a\u0627\u0644\u0628\u0627\u064b \u0645\u0627 \u062a\u0639\u0627\u0646\u064a \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u0639\u062f\u0646\u064a\u0629 \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629 \u0641\u064a \u0638\u0644 \u0627\u0644\u0638\u0631\u0648\u0641 \u0627\u0644\u0642\u0627\u0633\u064a\u0629 \u0627\u0644\u0645\u0648\u062c\u0648\u062f\u0629 \u0641\u064a \u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627\u060c \u0648\u0627\u0644\u062f\u0648\u0631\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629\u060c \u0648\u0627\u0644\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u0639\u062f\u0648\u0627\u0646\u064a\u0629 \u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0627\u064b.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u0648\u0641\u0631 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u062a\u0642\u062f\u0645 \u0627\u0644\u0639\u062f\u064a\u062f \u0645\u0646 \u0627\u0644\u0645\u0632\u0627\u064a\u0627 \u0627\u0644\u0647\u0627\u0645\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0635\u0644\u0627\u0628\u0629 \u0639\u0627\u0644\u064a\u0629 \u0644\u0644\u063a\u0627\u064a\u0629 \u0648\u0645\u0642\u0627\u0648\u0645\u0629 \u0644\u0644\u062a\u0622\u0643\u0644<\/li>\n\n\n\n<li>\u0639\u0632\u0644 \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0645\u0645\u062a\u0627\u0632<\/li>\n\n\n\n<li>\u062b\u0628\u0627\u062a \u062d\u0631\u0627\u0631\u064a \u0645\u062a\u0645\u064a\u0632<\/li>\n\n\n\n<li>\u062a\u0645\u062f\u062f \u062d\u0631\u0627\u0631\u064a \u0645\u0646\u062e\u0641\u0636<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u0641\u0627\u0626\u0642\u0629 \u0644\u0644\u062a\u0622\u0643\u0644<\/li>\n\n\n\n<li>\u062a\u0648\u0644\u064a\u062f \u062c\u0633\u064a\u0645\u0627\u062a \u0645\u0646\u062e\u0641\u0636\u0629<\/li>\n\n\n\n<li>\u062b\u0628\u0627\u062a \u0639\u0627\u0644\u064a \u0627\u0644\u0623\u0628\u0639\u0627\u062f \u0641\u064a \u0627\u0644\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u0641\u0631\u0627\u063a\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u0627\u0644\u062a\u0622\u0643\u0644 \u0628\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0648\u0628\u0633\u0628\u0628 \u0647\u0630\u0647 \u0627\u0644\u062e\u0635\u0627\u0626\u0635\u060c \u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u062f\u0642\u064a\u0642\u0629 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0623\u0646\u0638\u0645\u0629 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a<\/li>\n\n\n\n<li>\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062d\u0641\u0631<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0628\u0627\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a (CVD)<\/li>\n\n\n\n<li>\u063a\u0631\u0641 \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a \u0644\u0644\u0628\u062e\u0627\u0631 (PVD)<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0632\u0631\u0639 \u0627\u0644\u0623\u064a\u0648\u0646\u064a<\/li>\n\n\n\n<li>\u0623\u0641\u0631\u0627\u0646 \u0627\u0644\u0627\u0646\u062a\u0634\u0627\u0631 \u0648\u0627\u0644\u0623\u0643\u0633\u062f\u0629<\/li>\n\n\n\n<li>\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0635\u0642\u0644 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a (CMP)<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0641\u064a \u0627\u0644\u0639\u062f\u064a\u062f \u0645\u0646 \u0623\u062f\u0648\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u062a\u0645\u062b\u0644 \u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u062e\u0632\u0641\u064a\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u062c\u0632\u0621\u064b\u0627 \u0643\u0628\u064a\u0631\u064b\u0627 \u0645\u0646 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0648\u0638\u064a\u0641\u064a\u0629 \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629 \u0648\u062a\u0624\u062b\u0631 \u0628\u0634\u0643\u0644 \u0645\u0628\u0627\u0634\u0631 \u0639\u0644\u0649 \u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0648\u0627\u0644\u0639\u0627\u0626\u062f \u0648\u0639\u0645\u0631 \u0627\u0644\u0645\u0639\u062f\u0627\u062a.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u0627\u0644\u062a\u062d\u062f\u064a\u0627\u062a \u0627\u0644\u062a\u0642\u0646\u064a\u0629 \u0644\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u062e\u0632\u0641\u064a\u0629 \u0644\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u062e\u0632\u0641\u064a\u0629<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u0644\u062a\u0644\u0628\u064a\u0629 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0635\u0646\u0627\u0639\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u064a\u062c\u0628 \u0623\u0646 \u062a\u0644\u0628\u064a \u0645\u0648\u0627\u062f \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u062b\u0644\u0627\u062b\u0629 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u062a\u0642\u0646\u064a\u0629 \u0631\u0626\u064a\u0633\u064a\u0629:<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">1. \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0623\u062f\u0627\u0621 \u0627\u0644\u0645\u0648\u0627\u062f<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u062c\u0628 \u0623\u0646 \u062a\u062d\u0627\u0641\u0638 \u0645\u0648\u0627\u062f \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0639\u0644\u0649 \u0623\u062f\u0627\u0621 \u0645\u0633\u062a\u0642\u0631 \u0641\u064a \u0638\u0644:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0645\u0631\u062a\u0641\u0639\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u0625\u062c\u0647\u0627\u062f \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a<\/li>\n\n\n\n<li>\u0627\u0644\u062a\u0639\u0631\u0636 \u0644\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/li>\n\n\n\n<li>\u0627\u0644\u062a\u0622\u0643\u0644 \u0627\u0644\u062d\u0645\u0636\u064a \u0648\u0627\u0644\u0642\u0644\u0648\u064a<\/li>\n\n\n\n<li>\u0628\u064a\u0626\u0627\u062a \u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062a\u0631\u062f\u062f<\/li>\n\n\n\n<li>\u0638\u0631\u0648\u0641 \u0627\u0644\u0635\u062f\u0645\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0648\u064a\u062a\u0637\u0644\u0628 \u0630\u0644\u0643 \u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u062a\u0648\u0627\u0632\u0646 \u0627\u0644\u0623\u0645\u062b\u0644 \u0628\u064a\u0646 \u0627\u0644\u062e\u0648\u0627\u0635 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 \u0648\u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 \u0648\u0627\u0644\u0639\u0627\u0632\u0644\u0629 \u0648\u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0629.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2. \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u062f\u0642\u064a\u0642 \u0644\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0635\u0644\u0628\u0629 \u0648\u0627\u0644\u0647\u0634\u0629<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u0645\u0646 \u0627\u0644\u0645\u0639\u0631\u0648\u0641 \u0635\u0639\u0648\u0628\u0629 \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u062a\u0642\u062f\u0645 \u0628\u0633\u0628\u0628 \u0635\u0644\u0627\u0628\u062a\u0647 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u0648\u0647\u0634\u0627\u0634\u062a\u0647. \u062a\u062a\u0637\u0644\u0628 \u0645\u0639\u062f\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u062f\u0642\u0629 \u0623\u0628\u0639\u0627\u062f \u0641\u0627\u0626\u0642\u0629 \u0648\u062a\u0641\u0627\u0648\u062a\u0627\u062a \u0636\u064a\u0642\u0629 \u0648\u0623\u0634\u0643\u0627\u0644 \u0647\u0646\u062f\u0633\u064a\u0629 \u0645\u0639\u0642\u062f\u0629\u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0622\u0644\u064a \u0627\u0644\u062f\u0642\u064a\u0642 \u0623\u062d\u062f \u0623\u0643\u0628\u0631 \u0627\u0644\u062a\u062d\u062f\u064a\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u0648\u0627\u062c\u0647 \u0627\u0644\u0635\u0646\u0627\u0639\u0629.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. \u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0623\u0633\u0637\u062d \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u0648\u062c\u062f \u0627\u0644\u0639\u062f\u064a\u062f \u0645\u0646 \u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0628\u0627\u0644\u0642\u0631\u0628 \u0645\u0646 \u0631\u0642\u0627\u0626\u0642 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0623\u0648 \u0639\u0644\u0649 \u062a\u0645\u0627\u0633 \u0645\u0628\u0627\u0634\u0631 \u0645\u0639\u0647\u0627. \u0648\u0644\u0630\u0644\u0643\u060c \u0641\u0625\u0646 \u0627\u0644\u0631\u0642\u0627\u0628\u0629 \u0627\u0644\u0635\u0627\u0631\u0645\u0629 \u0639\u0644\u0649:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u0644\u0648\u062b \u0623\u064a\u0648\u0646\u0627\u062a \u0627\u0644\u0641\u0644\u0632\u0627\u062a<\/li>\n\n\n\n<li>\u062e\u0634\u0648\u0646\u0629 \u0627\u0644\u0633\u0637\u062d<\/li>\n\n\n\n<li>\u062a\u0648\u0644\u064a\u062f \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a<\/li>\n\n\n\n<li>\u0639\u064a\u0648\u0628 \u0627\u0644\u0633\u0637\u062d<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0636\u0631\u0648\u0631\u064a \u0628\u0639\u062f \u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0622\u0644\u064a \u0648\u0627\u0644\u0635\u0642\u0644.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u0645\u0648\u0627\u062f \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0627\u0644\u0645\u0633\u062a\u062e\u062f\u0645\u0629 \u0641\u064a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">1. \u0627\u0644\u0623\u0644\u0648\u0645\u064a\u0646\u0627 (Al\u2082O\u2083)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0635\u0644\u0627\u0628\u0629 \u0639\u0627\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u0645\u0645\u062a\u0627\u0632\u0629 \u0644\u0644\u062a\u0622\u0643\u0644<\/li>\n\n\n\n<li>\u0639\u0632\u0644 \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0642\u0648\u064a<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u062b\u0628\u0627\u062a \u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0645\u0645\u062a\u0627\u0632<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0642\u0648\u0627\u0631\u0628 \u0627\u0644\u0648\u064a\u0641\u0631<\/li>\n\n\n\n<li>\u0627\u0644\u0639\u0648\u0627\u0632\u0644 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0643\u0648\u0646\u0627\u062a CMP<\/li>\n\n\n\n<li>\u0631\u0643\u0627\u0626\u0632 \u062a\u063a\u0644\u064a\u0641 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u0638\u0644 \u0627\u0644\u0623\u0644\u0648\u0645\u064a\u0646\u0627 \u0623\u062d\u062f \u0623\u0643\u062b\u0631 \u0623\u0646\u0648\u0627\u0639 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0647\u0646\u062f\u0633\u064a \u0627\u0633\u062a\u062e\u062f\u0627\u0645\u064b\u0627 \u0628\u0633\u0628\u0628 \u0623\u062f\u0627\u0626\u0647\u0627 \u0627\u0644\u0645\u062a\u0648\u0627\u0632\u0646 \u0648\u0641\u0639\u0627\u0644\u064a\u062a\u0647\u0627 \u0645\u0646 \u062d\u064a\u062b \u0627\u0644\u062a\u0643\u0644\u0641\u0629.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2. \u0646\u064a\u062a\u0631\u064a\u062f \u0627\u0644\u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645 (AlN)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0645\u0648\u0635\u0644\u064a\u0629 \u062d\u0631\u0627\u0631\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0644\u0644\u063a\u0627\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0639\u0627\u0645\u0644 \u062a\u0645\u062f\u062f \u062d\u0631\u0627\u0631\u064a \u0645\u0646\u062e\u0641\u0636<\/li>\n\n\n\n<li>\u0639\u0632\u0644 \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0645\u0645\u062a\u0627\u0632<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u062c\u064a\u062f\u0629 \u0644\u0644\u0635\u062f\u0645\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0631\u0643\u0627\u0626\u0632 \u062a\u063a\u0644\u064a\u0641 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/li>\n\n\n\n<li>\u0627\u0644\u0645\u0634\u062a\u062a\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0637\u0627\u0642\u0629<\/li>\n\n\n\n<li>\u0633\u062e\u0627\u0646\u0627\u062a \u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u0639\u062a\u0628\u0631 \u0646\u064a\u062a\u0631\u064a\u062f \u0627\u0644\u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645 \u0630\u0648 \u0642\u064a\u0645\u0629 \u062e\u0627\u0635\u0629 \u0641\u064a \u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0625\u062f\u0627\u0631\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 \u062d\u064a\u062b \u064a\u0643\u0648\u0646 \u0627\u0644\u062a\u0628\u062f\u064a\u062f \u0627\u0644\u0633\u0631\u064a\u0639 \u0644\u0644\u062d\u0631\u0627\u0631\u0629 \u0623\u0645\u0631\u064b\u0627 \u0628\u0627\u0644\u063a \u0627\u0644\u0623\u0647\u0645\u064a\u0629.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 (SiC)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0635\u0644\u0627\u0628\u0629 \u0639\u0627\u0644\u064a\u0629 \u062c\u062f\u0627\u064b<\/li>\n\n\n\n<li>\u062b\u0628\u0627\u062a \u0645\u0645\u062a\u0627\u0632 \u0641\u064a \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0648\u0635\u0644\u064a\u0629 \u062d\u0631\u0627\u0631\u064a\u0629 \u0639\u0627\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u0645\u0645\u062a\u0627\u0632\u0629 \u0644\u0644\u062a\u0622\u0643\u0644<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u0641\u0627\u0626\u0642\u0629 \u0644\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0645\u0643\u0648\u0646\u0627\u062a \u062d\u062c\u0631\u0629 \u0627\u0644\u062d\u0641\u0631<\/li>\n\n\n\n<li>\u0645\u0633\u062a\u0642\u0628\u0644\u0627\u062a \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0627\u0644\u062d\u0633\u0627\u0633\u0629<\/li>\n\n\n\n<li>\u0633\u062e\u0627\u0646\u0627\u062a \u0630\u0627\u062a \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0639\u0627\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0643\u0648\u0646\u0627\u062a \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0629<\/li>\n\n\n\n<li>\u0631\u0643\u0627\u0626\u0632 \u0623\u0634\u0628\u0627\u0647 \u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0644\u0642\u062f \u0623\u0635\u0628\u062d \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0623\u062d\u062f \u0623\u0647\u0645 \u0627\u0644\u0645\u0648\u0627\u062f \u0641\u064a \u0645\u0639\u0627\u0644\u062c\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629\u060c \u062e\u0627\u0635\u0629\u064b \u0641\u064a \u0627\u0644\u0628\u064a\u0626\u0627\u062a \u0643\u062b\u064a\u0641\u0629 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4. \u0646\u064a\u062a\u0631\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 (Si\u2083N\u2084)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0642\u0648\u0629 \u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 \u0639\u0627\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u0635\u0644\u0627\u0628\u0629 \u0643\u0633\u0631 \u0645\u0645\u062a\u0627\u0632\u0629<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u0641\u0627\u0626\u0642\u0629 \u0644\u0644\u0635\u062f\u0645\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u0627\u0644\u062a\u0622\u0643\u0644 \u0627\u0644\u0645\u062a\u0645\u064a\u0632\u0629<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0647\u064a\u0643\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u062d\u0627\u0645\u0644\u0629<\/li>\n\n\n\n<li>\u0645\u0648\u0627\u062f \u062a\u063a\u0644\u064a\u0641 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0645\u0648\u062b\u0648\u0642\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0625\u062f\u0627\u0631\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u064f\u0633\u062a\u062e\u062f\u0645 \u0646\u064a\u062a\u0631\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u062d\u064a\u062b\u0645\u0627 \u062a\u0643\u0648\u0646 \u0627\u0644\u0642\u0648\u0629 \u0648\u0627\u0644\u0645\u0648\u062b\u0648\u0642\u064a\u0629 \u0645\u0637\u0644\u0648\u0628\u0629 \u0641\u064a \u0638\u0631\u0648\u0641 \u0627\u0644\u062a\u0634\u063a\u064a\u0644 \u0627\u0644\u0642\u0627\u0633\u064a\u0629.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">5. \u0632\u0631\u0643\u0648\u0646\u064a\u0627 (ZrO\u2082)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0635\u0644\u0627\u0628\u0629 \u0639\u0627\u0644\u064a\u0629 \u0644\u0644\u0643\u0633\u0631<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u0645\u0645\u062a\u0627\u0632\u0629 \u0644\u0644\u062a\u0622\u0643\u0644<\/li>\n\n\n\n<li>\u062b\u0628\u0627\u062a \u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0642\u0648\u064a<\/li>\n\n\n\n<li>\u0623\u062f\u0627\u0621 \u062c\u064a\u062f \u0641\u064a \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0645\u0643\u0648\u0646\u0627\u062a CMP<\/li>\n\n\n\n<li>\u0623\u062c\u0632\u0627\u0621 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u0642\u0627\u0648\u0645\u0629 \u0644\u0644\u062a\u0622\u0643\u0644<\/li>\n\n\n\n<li>\u0645\u0633\u062a\u0634\u0639\u0631\u0627\u062a \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0628\u0641\u0636\u0644 \u0622\u0644\u064a\u0629 \u0627\u0644\u062a\u0642\u0648\u064a\u0629 \u0627\u0644\u062a\u062d\u0648\u064a\u0644\u064a\u0629\u060c \u064a\u0648\u0641\u0631 \u0627\u0644\u0632\u0631\u0643\u0648\u0646\u064a\u0627 \u0645\u0642\u0627\u0648\u0645\u0629 \u0641\u0627\u0626\u0642\u0629 \u0644\u0627\u0646\u062a\u0634\u0627\u0631 \u0627\u0644\u062a\u0634\u0642\u0642 \u0645\u0642\u0627\u0631\u0646\u0629\u064b \u0628\u0627\u0644\u0639\u062f\u064a\u062f \u0645\u0646 \u0623\u0646\u0648\u0627\u0639 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0623\u062e\u0631\u0649.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6. \u0623\u0643\u0633\u064a\u062f \u0627\u0644\u0628\u0631\u064a\u0644\u064a\u0648\u0645 (BeO)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0645\u0648\u0635\u0644\u064a\u0629 \u062d\u0631\u0627\u0631\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0644\u0644\u063a\u0627\u064a\u0629<\/li>\n\n\n\n<li>\u0639\u0632\u0644 \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0645\u0645\u062a\u0627\u0632<\/li>\n\n\n\n<li>\u062b\u0627\u0628\u062a \u0639\u0627\u0632\u0644 \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0645\u0646\u062e\u0641\u0636<\/li>\n\n\n\n<li>\u062b\u0628\u0627\u062a \u0641\u064a \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u063a\u0644\u064a\u0641 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0637\u0627\u0642\u0629<\/li>\n\n\n\n<li>\u0631\u0643\u0627\u0626\u0632 \u0627\u0644\u062a\u0631\u062f\u062f\u0627\u062a \u0627\u0644\u0644\u0627\u0633\u0644\u0643\u064a\u0629 \u0648\u0627\u0644\u0645\u0648\u062c\u0627\u062a \u0627\u0644\u062f\u0642\u064a\u0642\u0629<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0625\u062f\u0627\u0631\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u062c\u0645\u0639 \u0623\u0643\u0633\u064a\u062f \u0627\u0644\u0628\u0631\u064a\u0644\u064a\u0648\u0645 \u0628\u064a\u0646 \u0627\u0644\u0645\u0648\u0635\u0644\u064a\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 \u0627\u0644\u0634\u0628\u064a\u0647\u0629 \u0628\u0627\u0644\u0645\u0639\u062f\u0646 \u0648\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0639\u0632\u0644 \u0627\u0644\u062e\u0632\u0641\u064a\u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647 \u0641\u0639\u0627\u0644\u0627\u064b \u0644\u0644\u063a\u0627\u064a\u0629 \u0641\u064a \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0627\u0644\u0645\u062a\u062e\u0635\u0635\u0629.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">7. \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0643\u0647\u0631\u0636\u063a\u0637\u064a\u0629 (PZT)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0627\u0633\u062a\u062c\u0627\u0628\u0629 \u0643\u0647\u0631\u0636\u063a\u0637\u064a\u0629 \u0645\u0645\u062a\u0627\u0632\u0629<\/li>\n\n\n\n<li>\u062d\u0633\u0627\u0633\u064a\u0629 \u0639\u0627\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u0642\u062f\u0631\u0629 \u0639\u0644\u0649 \u0627\u0644\u062a\u0634\u063a\u064a\u0644 \u0627\u0644\u0633\u0631\u064a\u0639<\/li>\n\n\n\n<li>\u062b\u0628\u0627\u062a \u062c\u064a\u062f \u0644\u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0623\u0646\u0638\u0645\u0629 \u062a\u062d\u062f\u064a\u062f \u0627\u0644\u0645\u0648\u0627\u0642\u0639 \u0627\u0644\u062f\u0642\u064a\u0642\u0629<\/li>\n\n\n\n<li>\u0645\u0633\u062a\u0634\u0639\u0631\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/li>\n\n\n\n<li>\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0645\u0648\u062c\u0627\u062a \u0627\u0644\u0635\u0648\u062a\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0634\u063a\u0644\u0627\u062a \u062f\u0642\u064a\u0642\u0629<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u0644\u0639\u0628 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0643\u0647\u0631\u0648\u0636\u063a\u0637\u064a\u0629 \u062f\u0648\u0631\u064b\u0627 \u0645\u0647\u0645\u064b\u0627 \u0641\u064a \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u062d\u0631\u0643\u0629 \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u062f\u0642\u0629 \u0627\u0644\u0645\u0633\u062a\u062e\u062f\u0645\u0629 \u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">8. \u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0643\u0648\u0627\u0631\u062a\u0632 (SiO\u2082)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0646\u0642\u0627\u0621 \u0641\u0627\u0626\u0642 \u0627\u0644\u0646\u0642\u0627\u0621<\/li>\n\n\n\n<li>\u062a\u0645\u062f\u062f \u062d\u0631\u0627\u0631\u064a \u0645\u0646\u062e\u0641\u0636 \u0644\u0644\u063a\u0627\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u062d\u0631\u0627\u0631\u064a\u0629 \u0645\u0645\u062a\u0627\u0632\u0629<\/li>\n\n\n\n<li>\u062b\u0628\u0627\u062a \u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0645\u062a\u0645\u064a\u0632<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0623\u0646\u0627\u0628\u064a\u0628 \u0641\u0631\u0646 \u0627\u0644\u0627\u0646\u062a\u0634\u0627\u0631<\/li>\n\n\n\n<li>\u0645\u0643\u0648\u0646\u0627\u062a \u0646\u0638\u0627\u0645 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629<\/li>\n\n\n\n<li>\u062d\u0627\u0645\u0644\u0627\u062a \u0627\u0644\u0631\u0642\u0627\u0626\u0642<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u064f\u0639\u062f \u0645\u0648\u0627\u062f \u0627\u0644\u0643\u0648\u0627\u0631\u062a\u0632 \u0645\u0647\u0645\u0629 \u0628\u0634\u0643\u0644 \u062e\u0627\u0635 \u0641\u064a \u0628\u064a\u0626\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0648\u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">9. \u0646\u064a\u062a\u0631\u064a\u062f \u0627\u0644\u0628\u0648\u0631\u0648\u0646 (BN)<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0645\u0648\u0635\u0644\u064a\u0629 \u062d\u0631\u0627\u0631\u064a\u0629 \u0639\u0627\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u062b\u0627\u0628\u062a \u0639\u0627\u0632\u0644 \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0645\u0646\u062e\u0641\u0636<\/li>\n\n\n\n<li>\u062e\u0635\u0627\u0626\u0635 \u062a\u0634\u062d\u064a\u0645 \u0645\u0645\u062a\u0627\u0632\u0629<\/li>\n\n\n\n<li>\u0645\u0642\u0627\u0648\u0645\u0629 \u0641\u0627\u0626\u0642\u0629 \u0644\u0644\u0635\u062f\u0645\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0627\u0644\u0639\u0632\u0644 \u0641\u064a \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0625\u062f\u0627\u0631\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/li>\n\n\n\n<li>\u0623\u062c\u0632\u0627\u0621 \u0627\u0644\u062a\u0634\u062d\u064a\u0645 \u0641\u064a \u0645\u0639\u062f\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0648\u064a\u064f\u0639\u062f \u0646\u064a\u062a\u0631\u064a\u062f \u0627\u0644\u0628\u0648\u0631\u0648\u0646 \u0645\u0641\u064a\u062f\u064b\u0627 \u0628\u0634\u0643\u0644 \u062e\u0627\u0635 \u0641\u064a \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u062a\u0637\u0644\u0628 \u062b\u0628\u0627\u062a\u064b\u0627 \u062d\u0631\u0627\u0631\u064a\u064b\u0627 \u0648\u0633\u0644\u0648\u0643\u064b\u0627 \u063a\u064a\u0631 \u062a\u0641\u0627\u0639\u0644\u064a.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u0645\u0633\u062a\u0642\u0628\u0644 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u062a\u0642\u062f\u0645 \u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u0645\u0639 \u062a\u0642\u062f\u0645 \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0646\u062d\u0648:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0639\u0642\u062f \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0623\u0635\u063a\u0631<\/li>\n\n\n\n<li>\u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0623\u0639\u0644\u0649 \u0644\u0644\u0631\u0642\u0627\u0642\u0629<\/li>\n\n\n\n<li>\u0645\u0639\u0627\u0644\u062c\u0629 \u0628\u0644\u0627\u0632\u0645\u0627 \u0623\u0643\u062b\u0631 \u0639\u062f\u0648\u0627\u0646\u064a\u0629<\/li>\n\n\n\n<li>\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u062a\u0639\u0628\u0626\u0629 \u0648\u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629<\/li>\n\n\n\n<li>\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0630\u0627\u062a \u0627\u0644\u0641\u062c\u0648\u0629 \u0627\u0644\u0648\u0627\u0633\u0639\u0629 \u0627\u0644\u0646\u0637\u0627\u0642<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0633\u062a\u0633\u062a\u0645\u0631 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u0623\u062f\u0627\u0621 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\u062d\u062c\u0645\u0627\u064b \u0648\u0623\u0643\u062b\u0631 \u062a\u0639\u0642\u064a\u062f\u0627\u064b<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u0631\u0643\u0628\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629<\/li>\n\n\n\n<li>\u062a\u0643\u0627\u0645\u0644 \u0623\u0643\u0628\u0631 \u0645\u0639 \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0642\u0627\u0626\u0645\u0629 \u0639\u0644\u0649 \u0627\u0644\u0630\u0643\u0627\u0621 \u0627\u0644\u0627\u0635\u0637\u0646\u0627\u0639\u064a<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0644\u0645 \u064a\u0639\u062f \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u062a\u0642\u062f\u0645 \u0645\u062c\u0631\u062f \u0645\u0648\u0627\u062f \u062f\u0627\u0639\u0645\u0629\u060c \u0628\u0644 \u0623\u0635\u0628\u062d \u0645\u0646 \u0627\u0644\u062a\u0642\u0646\u064a\u0627\u062a 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\u0627\u0644\u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0627\u0644\u062d\u0631\u0627\u0631\u064a \u0648\u0627\u0644\u0639\u0632\u0644 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0648\u0627\u0644\u0642\u0648\u0629 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 \u0648\u0627\u0644\u0645\u0642\u0627\u0648\u0645\u0629 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0629.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u0648\u0641\u0631 \u0643\u0644 \u0645\u0627\u062f\u0629 \u0645\u062b\u0644 \u0627\u0644\u0623\u0644\u0648\u0645\u064a\u0646\u0627 \u0648\u0646\u062a\u0631\u064a\u062f \u0627\u0644\u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645 \u0648\u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0648\u0646\u062a\u0631\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0648\u0646\u062a\u0631\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0648\u0627\u0644\u0632\u0631\u0643\u0648\u0646\u064a\u0627 \u0648\u0627\u0644\u0643\u0648\u0627\u0631\u062a\u0632 \u0648\u0646\u062a\u0631\u064a\u062f \u0627\u0644\u0628\u0648\u0631\u0648\u0646 \u0645\u0632\u0627\u064a\u0627 \u0641\u0631\u064a\u062f\u0629 \u0644\u0639\u0645\u0644\u064a\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u062d\u062f\u062f\u0629.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0645\u0639 \u0627\u0633\u062a\u0645\u0631\u0627\u0631 \u0635\u0646\u0627\u0639\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0641\u064a \u0627\u0644\u0633\u0639\u064a \u0644\u062a\u062d\u0642\u064a\u0642 \u062f\u0642\u0629 \u0623\u0639\u0644\u0649 \u0648\u0643\u0641\u0627\u0621\u0629 \u0623\u0639\u0644\u0649 \u0648\u0645\u0648\u062b\u0648\u0642\u064a\u0629 \u0623\u0643\u0628\u0631\u060c \u0633\u064a\u0638\u0644 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u062a\u0642\u062f\u0645 \u0641\u064a \u0645\u0631\u0643\u0632 \u0627\u0644\u0627\u0628\u062a\u0643\u0627\u0631 \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a \u0648\u062a\u0637\u0648\u064a\u0631 \u0627\u0644\u0645\u0639\u062f\u0627\u062a.<\/p>","protected":false},"excerpt":{"rendered":"<p>As semiconductor technology continues to evolve toward smaller nodes, higher integration density, and more complex manufacturing processes, the demand for advanced materials inside semiconductor equipment has increased dramatically. Modern semiconductor fabrication environments require materials capable of withstanding extreme temperatures, corrosive plasma exposure, ultra-clean vacuum conditions, and high mechanical stress while maintaining dimensional stability and contamination 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