{"id":2036,"date":"2026-05-08T05:18:41","date_gmt":"2026-05-08T05:18:41","guid":{"rendered":"https:\/\/www.xkh-ceramics.com\/?p=2036"},"modified":"2026-05-08T05:19:21","modified_gmt":"2026-05-08T05:19:21","slug":"advanced-ceramic-components-in-semiconductor-manufacturing-electrostatic-chuck-principles-and-trends","status":"publish","type":"post","link":"https:\/\/www.xkh-ceramics.com\/ar\/advanced-ceramic-components-in-semiconductor-manufacturing-electrostatic-chuck-principles-and-trends\/","title":{"rendered":"\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a: \u0645\u0628\u0627\u062f\u0626 \u0648\u0627\u062a\u062c\u0627\u0647\u0627\u062a \u0627\u0644\u062a\u0634\u0627\u0643 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a"},"content":{"rendered":"<h2 class=\"wp-block-heading\">1. \u0645\u0642\u062f\u0645\u0629: \u062f\u0648\u0631 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0645\u062a\u0637\u0648\u0631 \u0641\u064a \u0645\u0639\u062f\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u0641\u064a \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u062d\u062f\u064a\u062b \u0644\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u062a\u0639\u0645\u0644 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0641\u064a \u0638\u0644 \u0638\u0631\u0648\u0641 \u0642\u0627\u0633\u064a\u0629 \u0645\u062b\u0644 \u0628\u064a\u0626\u0627\u062a \u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0648\u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u0648\u0627\u0644\u062a\u0639\u0631\u0636 \u0644\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0648\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u062d\u0631\u0643\u0629 \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u062f\u0642\u0629. \u0648\u063a\u0627\u0644\u0628\u064b\u0627 \u0645\u0627 \u062a\u0641\u0634\u0644 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u0639\u062f\u0646\u064a\u0629 \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629 \u0641\u064a \u062a\u0644\u0628\u064a\u0629 \u0627\u0644\u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u0645\u0634\u062a\u0631\u0643\u0629 \u0644\u0644\u062b\u0628\u0627\u062a \u0648\u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0648\u0627\u0644\u0639\u0632\u0644 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0648\u0627\u0644\u0625\u062f\u0627\u0631\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0648\u0644\u0630\u0644\u0643\u060c \u0623\u0635\u0628\u062d \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u0647\u0646\u062f\u0633\u064a \u0627\u0644\u0645\u062a\u0642\u062f\u0645 - \u0645\u062b\u0644 \u0627\u0644\u0623\u0644\u0648\u0645\u064a\u0646\u0627 (Al\u2082O\u2083) \u0648\u0646\u062a\u0631\u064a\u062f \u0627\u0644\u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645 (AlN) \u0648\u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 (SiC) - \u0645\u0648\u0627\u062f \u0623\u0633\u0627\u0633\u064a\u0629 \u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u062d\u0631\u062c\u0629. \u0628\u0639\u062f \u0627\u0644\u062a\u0634\u0643\u064a\u0644 \u0627\u0644\u062f\u0642\u064a\u0642 \u0648\u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0622\u0644\u064a \u0641\u0627\u0626\u0642 \u0627\u0644\u062f\u0642\u0629\u060c \u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0647\u0630\u0647 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0628\u0645\u0627 \u0641\u064a \u0630\u0644\u0643 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0648\u0627\u0644\u062d\u0641\u0631 \u0648\u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0628\u0627\u0644\u063a\u0634\u0627\u0621 \u0627\u0644\u0631\u0642\u064a\u0642 \u0648\u0632\u0631\u0639 \u0627\u0644\u0623\u064a\u0648\u0646\u0627\u062a \u0648\u0627\u0644\u062a\u062e\u0637\u064a\u0637 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a (CMP).<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0648\u0645\u0646 \u0628\u064a\u0646 \u0647\u0630\u0647 \u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a\u060c \u064a\u0645\u062b\u0644 \u0627\u0644\u0638\u0631\u0641 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a (ESC) \u0623\u062d\u062f \u0623\u0647\u0645 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0648\u0638\u064a\u0641\u064a\u0629 \u0627\u0644\u0642\u0627\u0626\u0645\u0629 \u0639\u0644\u0649 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"426\" height=\"238\" src=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Electrostatic-Chuck-Principles-and-Trends-1.png\" alt=\"\" class=\"wp-image-2038\" srcset=\"https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Electrostatic-Chuck-Principles-and-Trends-1.png 426w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Electrostatic-Chuck-Principles-and-Trends-1-300x168.png 300w, https:\/\/www.xkh-ceramics.com\/wp-content\/uploads\/2026\/05\/Electrostatic-Chuck-Principles-and-Trends-1-18x10.png 18w\" sizes=\"(max-width: 426px) 100vw, 426px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">2. \u0648\u0638\u064a\u0641\u0629 \u0648\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0627\u0644\u0637\u0628\u0637\u0628\u0627\u062a \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a\u0629<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u0623\u0646 <a href=\"https:\/\/www.xkh-ceramics.com\/ar\/%d8%a7%d9%84%d9%85%d9%86%d8%aa%d8%ac%d8%a7%d8%aa\/\" data-type=\"page\" data-id=\"1921\">\u0638\u0631\u0641 \u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a<\/a> \u0647\u0648 \u062c\u0647\u0627\u0632 \u0645\u0646\u0627\u0648\u0644\u0629 \u0648\u062a\u062b\u0628\u064a\u062a \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0645\u0635\u0645\u0645 \u0644\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0623\u0648 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627. \u0648\u0647\u0648 \u064a\u062a\u064a\u062d \u062a\u062b\u0628\u064a\u062a \u0631\u0642\u0627\u0642\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0631\u0642\u064a\u0642\u0629 \u0644\u0644\u063a\u0627\u064a\u0629 \u062f\u0648\u0646 \u062a\u0644\u0627\u0645\u0633 \u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u0633\u062a\u062e\u062f\u0645 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a \u0639\u0645\u0644\u064a\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0645\u062b\u0644:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0627\u0644\u062d\u0641\u0631 \u0628\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 (ETCH)<\/li>\n\n\n\n<li>\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a (PVD)<\/li>\n\n\n\n<li>\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0627\u0644\u0645\u0639\u0632\u0632 \u0628\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 (PECVD)<\/li>\n\n\n\n<li>\u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0628\u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0642\u0635\u0648\u0649 (EUVL)<\/li>\n\n\n\n<li>\u0627\u0644\u0632\u0631\u0639 \u0627\u0644\u0623\u064a\u0648\u0646\u064a<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0641\u064a \u0647\u0630\u0647 \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a\u060c \u062a\u062a\u0639\u0631\u0636 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0646\u0634\u0637\u0629 \u0648\u0623\u062d\u0645\u0627\u0644 \u062d\u0631\u0627\u0631\u064a\u0629. \u0648\u0644\u0630\u0644\u0643\u060c \u064a\u062c\u0628 \u0623\u0646 \u064a\u0636\u0645\u0646 \u0627\u0644\u0638\u0631\u0641 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a \u0643\u0644\u0627\u064b \u0645\u0646 \u0627\u0644\u062b\u0628\u0627\u062a \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0648\u0627\u0644\u062a\u062d\u0643\u0645 \u0627\u0644\u062d\u0631\u0627\u0631\u064a \u0627\u0644\u062f\u0642\u064a\u0642.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. \u0645\u0628\u062f\u0623 \u0627\u0644\u0639\u0645\u0644: \u0627\u0644\u0642\u0648\u0629 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a\u0629 \u0648\u0627\u0644\u0625\u062f\u0627\u0631\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u0639\u0645\u0644 \u0627\u0644\u0638\u0631\u0641 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a \u0639\u0644\u0649 \u0623\u0633\u0627\u0633 \u0627\u0644\u062a\u062c\u0627\u0630\u0628 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a \u0627\u0644\u0646\u0627\u062a\u062c \u0639\u0646 \u0645\u062c\u0627\u0644 \u0643\u0647\u0631\u0628\u0627\u0626\u064a. \u062a\u064f\u0646\u0634\u0626 \u0627\u0644\u0623\u0633\u0637\u062d \u0627\u0644\u0645\u0634\u062d\u0648\u0646\u0629 \u0628\u0634\u0643\u0644 \u0645\u062a\u0642\u0627\u0628\u0644 \u0642\u0648\u0629 \u062c\u0627\u0630\u0628\u0629 \u062a\u062b\u0628\u062a \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0641\u064a \u0645\u0643\u0627\u0646\u0647\u0627 \u0628\u0625\u062d\u0643\u0627\u0645.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u0645\u0643\u0646 \u0648\u0635\u0641 \u0627\u0644\u062a\u0641\u0627\u0639\u0644 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a \u0627\u0644\u0623\u0633\u0627\u0633\u064a \u0639\u0644\u0649 \u0627\u0644\u0646\u062d\u0648 \u0627\u0644\u062a\u0627\u0644\u064a:<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>F<\/mi><mo>=<\/mo><mi>k<\/mi><mfrac><mrow><msub><mi>q<\/mi><mn>1<\/mn><\/msub><msub><mi>q<\/mi><mn>2<\/mn><\/msub><\/mrow><msup><mi>r<\/mi><mn>2<\/mn><\/msup><\/mfrac><\/mrow><annotation encoding=\"application\/x-tex\">\u0641 = \u0643 \\\u0641\u0631\u0627\u0643{\u0642_1_1_2}{\u0631^2}<\/annotation><\/semantics><\/math>\u0641=\u06432\u06432\u06431\u06432<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><msub><mi>q<\/mi><mn>1<\/mn><\/msub><\/mrow><annotation encoding=\"application\/x-tex\">q_1<\/annotation><\/semantics><\/math>q1<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><msub><mi>q<\/mi><mn>2<\/mn><\/msub><\/mrow><annotation encoding=\"application\/x-tex\">q_2<\/annotation><\/semantics><\/math>q2<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>r<\/mi><\/mrow><annotation encoding=\"application\/x-tex\">r<\/annotation><\/semantics><\/math>r<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>F<\/mi><mo>=<\/mo><mi>k<\/mi><mfrac><mrow><msub><mi>q<\/mi><mn>1<\/mn><\/msub><msub><mi>q<\/mi><mn>2<\/mn><\/msub><\/mrow><msup><mi>r<\/mi><mn>2<\/mn><\/msup><\/mfrac><mo>\u2248<\/mo><mo>\u2212<\/mo><mn>5.06<\/mn><\/mrow><annotation encoding=\"application\/x-tex\">F = k\\frac{q_1_1_Q_2}{r^2} \\ \u062a\u0642\u0631\u064a\u0628\u064b\u0627 -5.06<\/annotation><\/semantics><\/math>\u0648= \u0643 \u06312\u06431\u06431\u06432\u2248-5.06+-<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0623\u064a\u0646:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>F<\/mi><\/mrow><annotation encoding=\"application\/x-tex\">F<\/annotation><\/semantics><\/math>F: \u0627\u0644\u0642\u0648\u0629 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a\u0629<\/li>\n\n\n\n<li><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><msub><mi>q<\/mi><mn>1<\/mn><\/msub><mo separator=\"true\">,<\/mo><msub><mi>q<\/mi><mn>2<\/mn><\/msub><\/mrow><annotation encoding=\"application\/x-tex\">\u0633_1\u060c \u06332<\/annotation><\/semantics><\/math>\u06331\u060c \u06332: \u0627\u0644\u0634\u062d\u0646\u0627\u062a \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629<\/li>\n\n\n\n<li><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>r<\/mi><\/mrow><annotation encoding=\"application\/x-tex\">r<\/annotation><\/semantics><\/math>r: \u0627\u0644\u0645\u0633\u0627\u0641\u0629 \u0628\u064a\u0646 \u0627\u0644\u0634\u062d\u0646\u0627\u062a<\/li>\n\n\n\n<li><math xmlns=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><semantics><mrow><mi>k<\/mi><\/mrow><annotation encoding=\"application\/x-tex\">k<\/annotation><\/semantics><\/math>k: \u062b\u0627\u0628\u062a \u0643\u0648\u0644\u0648\u0645<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0645\u0646 \u0627\u0644\u0646\u0627\u062d\u064a\u0629 \u0627\u0644\u0647\u064a\u0643\u0644\u064a\u0629\u060c \u064a\u062a\u0643\u0648\u0646 \u0627\u0644\u0638\u0631\u0641 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a \u0639\u0627\u062f\u0629\u064b \u0645\u0646 \u062b\u0644\u0627\u062b \u0637\u0628\u0642\u0627\u062a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u0637\u0628\u0642\u0629 \u0639\u0627\u0632\u0644\u0629<\/strong>:: \u064a\u062d\u062f\u062f \u0627\u0644\u0639\u0632\u0644 \u0648\u062a\u0648\u0632\u064a\u0639 \u0627\u0644\u0645\u062c\u0627\u0644 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a<\/li>\n\n\n\n<li><strong>\u0637\u0628\u0642\u0629 \u0627\u0644\u0642\u0637\u0628 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a<\/strong>:: \u064a\u0648\u0644\u062f \u0627\u0644\u0645\u062c\u0627\u0644 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a<\/li>\n\n\n\n<li><strong>\u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629<\/strong>:: \u064a\u0648\u0641\u0631 \u0627\u0644\u062f\u0639\u0645 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0648\u0627\u0644\u062a\u0648\u0635\u064a\u0644 \u0627\u0644\u062d\u0631\u0627\u0631\u064a<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0644\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0623\u062d\u0645\u0627\u0644 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 \u0623\u062b\u0646\u0627\u0621 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629\u060c \u0639\u0627\u062f\u0629\u064b \u0645\u0627 \u064a\u062a\u0645 \u0625\u062f\u062e\u0627\u0644 \u062a\u0628\u0631\u064a\u062f \u0627\u0644\u062c\u0627\u0646\u0628 \u0627\u0644\u062e\u0644\u0641\u064a \u0645\u0646 \u0627\u0644\u0647\u064a\u0644\u064a\u0648\u0645 \u0644\u062a\u062d\u0633\u064a\u0646 \u0646\u0642\u0644 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0628\u064a\u0646 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0648\u0633\u0637\u062d \u0627\u0644\u0638\u0631\u0641.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4. \u0627\u0644\u062a\u0635\u0646\u064a\u0641: \u0646\u0648\u0639 \u0643\u0648\u0644\u0648\u0645 \u0648\u0646\u0648\u0639 \u062c\u0648\u0646\u0633\u0646-\u0631\u0627\u0647\u0628\u0643 ESC \u0645\u0646 \u0646\u0648\u0639 \u0643\u0648\u0644\u0648\u0645 \u0648\u062c\u0648\u0646\u0633\u0646-\u0631\u0627\u0647\u0628\u0643 ESC<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u064f\u0635\u0646\u064e\u0651\u0641 \u0627\u0644\u0623\u0638\u0631\u0641 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a\u0629 \u0639\u0645\u0648\u0645\u064b\u0627 \u0625\u0644\u0649 \u0646\u0648\u0639\u064a\u0646 \u0628\u0646\u0627\u0621\u064b \u0639\u0644\u0649 \u0633\u0644\u0648\u0643\u0647\u0627 \u0627\u0644\u0639\u0627\u0632\u0644:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(1) \u062c\u0647\u0627\u0632 \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0645\u0646 \u0646\u0648\u0639 \u0643\u0648\u0644\u0648\u0645<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u0639\u062a\u0645\u062f \u0647\u0630\u0627 \u0627\u0644\u0646\u0648\u0639 \u0639\u0644\u0649 \u0627\u0644\u0642\u0648\u0629 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a\u0629 \u0641\u0642\u0637 \u0644\u062a\u0634\u0628\u064a\u0643 \u0627\u0644\u0631\u0642\u0627\u0642\u0629. \u064a\u062a\u0645\u064a\u0632 \u0628\u0647\u064a\u0643\u0644 \u0623\u0628\u0633\u0637 \u0648\u0644\u0643\u0646\u0647 \u064a\u0648\u0641\u0631 \u0642\u0648\u0629 \u062a\u0634\u0628\u064a\u0643 \u0623\u0642\u0644 \u0646\u0633\u0628\u064a\u064b\u0627.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(2) \u062c\u0648\u0646\u0633\u0646-\u0631\u0627\u0647\u0628\u064a\u0643 (J-R) \u0645\u0646 \u0646\u0648\u0639 ESC<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u0642\u062f\u0645 \u0647\u0630\u0627 \u0627\u0644\u0646\u0648\u0639 \u062a\u0648\u0635\u064a\u0644\u064b\u0627 \u0643\u0647\u0631\u0628\u0627\u0626\u064a\u064b\u0627 \u0637\u0641\u064a\u0641\u064b\u0627 \u062f\u0627\u062e\u0644 \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0639\u0627\u0632\u0644\u0629\u060c \u0645\u0645\u0627 \u064a\u0639\u0632\u0632 \u062a\u0623\u062b\u064a\u0631\u0627\u062a \u0627\u0644\u0627\u0633\u062a\u0642\u0637\u0627\u0628 \u0648\u064a\u0632\u064a\u062f \u0645\u0646 \u0642\u0648\u0629 \u0627\u0644\u062a\u062b\u0628\u064a\u062a.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u0634\u0645\u0644 \u0627\u0644\u0645\u0632\u0627\u064a\u0627 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0642\u0648\u0629 \u062a\u0634\u0628\u064a\u0643 \u0623\u0639\u0644\u0649 \u0639\u0646\u062f \u062c\u0647\u062f \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0623\u0642\u0644<\/li>\n\n\n\n<li>\u062a\u062d\u0633\u064a\u0646 \u062b\u0628\u0627\u062a \u062a\u0644\u0627\u0645\u0633 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0645\u062d\u0633\u0646\u0629<\/li>\n\n\n\n<li>\u0623\u062f\u0627\u0621 \u0623\u0641\u0636\u0644 \u0641\u064a \u0639\u064f\u0642\u064e\u062f \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0648\u0645\u0639 \u0630\u0644\u0643\u060c \u0641\u0625\u0646\u0647 \u064a\u062a\u0637\u0644\u0628 \u062a\u0648\u062d\u064a\u062f\u064b\u0627 \u0623\u0639\u0644\u0649 \u0644\u0644\u0645\u0648\u0627\u062f \u0648\u0639\u0645\u0644\u064a\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0643\u062b\u0631 \u062a\u0639\u0642\u064a\u062f\u064b\u0627.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">5. \u062a\u0637\u0648\u0631 \u0627\u0644\u0635\u0646\u0627\u0639\u0629 \u0648\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0633\u0648\u0642<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u0633\u062a\u0645\u0631 \u0633\u0648\u0642 \u0627\u0644\u0638\u0631\u0641 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a \u0641\u064a \u0627\u0644\u0646\u0645\u0648 \u0628\u0634\u0643\u0644 \u0645\u0637\u0631\u062f\u060c \u0645\u062f\u0641\u0648\u0639\u064b\u0627 \u0628\u0627\u0644\u062a\u0648\u0633\u0639 \u0627\u0644\u0633\u0631\u064a\u0639 \u0641\u064a \u0642\u062f\u0631\u0629 \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0648\u0627\u0644\u0637\u0644\u0628 \u0627\u0644\u0645\u062a\u0632\u0627\u064a\u062f \u0639\u0644\u0649 \u0627\u0644\u0639\u0642\u062f \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u0634\u0645\u0644 \u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0635\u0646\u0627\u0639\u0629 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(1) \u0627\u0644\u062d\u0648\u0627\u062c\u0632 \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u062f\u0645\u062c \u0647\u0630\u0647 \u0627\u0644\u062a\u0642\u0646\u064a\u0629 \u0628\u064a\u0646 \u0639\u0644\u0648\u0645 \u0627\u0644\u0645\u0648\u0627\u062f \u0648\u0627\u0644\u0647\u0646\u062f\u0633\u0629 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u0625\u062f\u0627\u0631\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 \u0648\u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0622\u0644\u064a \u0641\u0627\u0626\u0642 \u0627\u0644\u062f\u0642\u0629.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(2) \u0627\u0644\u062a\u0631\u0643\u064a\u0632 \u0627\u0644\u0639\u0627\u0644\u064a \u0641\u064a \u0627\u0644\u0633\u0648\u0642<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u0647\u064a\u0645\u0646 \u0639\u0644\u0649 \u0627\u0644\u0633\u0648\u0642 \u0627\u0644\u0639\u0627\u0644\u0645\u064a\u0629 \u0639\u062f\u062f \u0645\u062d\u062f\u0648\u062f \u0645\u0646 \u0627\u0644\u0634\u0631\u0643\u0627\u062a \u0627\u0644\u0645\u0635\u0646\u0639\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0630\u0627\u062a \u0627\u0644\u0642\u062f\u0631\u0627\u062a \u0627\u0644\u062a\u0643\u0627\u0645\u0644\u064a\u0629 \u0627\u0644\u0642\u0648\u064a\u0629.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(3) \u0627\u0644\u062a\u062e\u0635\u0635 \u0627\u0644\u0625\u0642\u0644\u064a\u0645\u064a<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u064a\u062a\u0631\u0643\u0632 \u0627\u0644\u062a\u0635\u0645\u064a\u0645 \u0627\u0644\u0645\u062a\u0637\u0648\u0631 \u0648\u062a\u0643\u0627\u0645\u0644 \u0627\u0644\u0623\u0646\u0638\u0645\u0629 \u0641\u064a \u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627\u064b\u060c \u0628\u064a\u0646\u0645\u0627 \u064a\u062a\u062d\u0648\u0644 \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0627\u0644\u062f\u0642\u064a\u0642 \u0628\u0634\u0643\u0644 \u0645\u062a\u0632\u0627\u064a\u062f \u0646\u062d\u0648 \u0622\u0633\u064a\u0627.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(4) \u062a\u0646\u0627\u0645\u064a \u0627\u062a\u062c\u0627\u0647 \u0627\u0644\u062a\u0648\u0637\u064a\u0646 \u0627\u0644\u0645\u062a\u0632\u0627\u064a\u062f<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u0645\u0639 \u0627\u0644\u062a\u0648\u0633\u0639 \u0641\u064a \u0627\u0644\u0646\u0638\u0645 \u0627\u0644\u0625\u064a\u0643\u0648\u0644\u0648\u062c\u064a\u0629 \u0627\u0644\u0645\u062d\u0644\u064a\u0629 \u0644\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u0628\u062f\u0623 \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0645\u062d\u0644\u064a \u0644\u0644\u0623\u0638\u0631\u0641 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a\u0629 \u0641\u064a \u0627\u0644\u0638\u0647\u0648\u0631\u060c \u0639\u0644\u0649 \u0627\u0644\u0631\u063a\u0645 \u0645\u0646 \u0623\u0646 \u0627\u0644\u062a\u062d\u062f\u064a\u0627\u062a \u0644\u0627 \u062a\u0632\u0627\u0644 \u0642\u0627\u0626\u0645\u0629 \u0641\u064a \u0627\u0644\u0645\u0648\u062b\u0648\u0642\u064a\u0629 \u0637\u0648\u064a\u0644\u0629 \u0627\u0644\u0623\u062c\u0644 \u0648\u062a\u0648\u0627\u0641\u0642 \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0645\u062a\u0637\u0648\u0631\u0629.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6. \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0648\u0627\u062a\u062c\u0627\u0647\u0627\u062a \u0627\u0644\u062a\u0646\u0645\u064a\u0629 \u0627\u0644\u0645\u0633\u062a\u0642\u0628\u0644\u064a\u0629<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u0633\u064a\u0631\u0643\u0632 \u0627\u0644\u062a\u0637\u0648\u064a\u0631 \u0627\u0644\u0645\u0633\u062a\u0642\u0628\u0644\u064a \u0644\u0644\u062e\u0631\u0627\u0637\u064a\u0634 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a\u0629 \u0648\u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u062e\u0632\u0641\u064a\u0629 \u0639\u0644\u0649:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(1) \u0633\u064a\u0631\u0627\u0645\u064a\u0643 \u0639\u0627\u0644\u064a \u0627\u0644\u062a\u0648\u0635\u064a\u0644 \u0627\u0644\u062d\u0631\u0627\u0631\u064a<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u062d\u0633\u064a\u0646 \u062a\u0648\u062d\u064a\u062f \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0645\u0646 \u062e\u0644\u0627\u0644 \u0645\u0648\u0627\u062f AlN \u0648 SiC \u0627\u0644\u0645\u062d\u0633\u0651\u0646\u0629.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(2) \u0646\u0642\u0627\u0648\u0629 \u0639\u0627\u0644\u064a\u0629 \u0644\u0644\u063a\u0627\u064a\u0629 \u0648\u0643\u062b\u0627\u0641\u0629 \u0639\u064a\u0648\u0628 \u0645\u0646\u062e\u0641\u0636\u0629<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u0642\u0644\u064a\u0644 \u0627\u0644\u0634\u0648\u0627\u0626\u0628 \u0648\u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u062f\u0642\u064a\u0642\u0629 \u0644\u062a\u062d\u0633\u064a\u0646 \u0645\u0642\u0627\u0648\u0645\u0629 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0648\u062b\u0628\u0627\u062a\u0647\u0627.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(3) \u0647\u064a\u0627\u0643\u0644 \u0645\u0631\u0643\u0628\u0629 \u0645\u062a\u0639\u062f\u062f\u0629 \u0627\u0644\u0637\u0628\u0642\u0627\u062a<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u062a\u0648\u0627\u0632\u0646 \u0628\u064a\u0646 \u0627\u0644\u0639\u0632\u0644 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0648\u0627\u0644\u0642\u0648\u0629 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 \u0648\u0627\u0644\u0623\u062f\u0627\u0621 \u0627\u0644\u062d\u0631\u0627\u0631\u064a.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">(4) \u0639\u0645\u0631 \u062e\u062f\u0645\u0629 \u0645\u0645\u062a\u062f<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u0639\u0632\u064a\u0632 \u0645\u0642\u0627\u0648\u0645\u0629 \u0627\u0644\u062a\u062f\u0648\u064a\u0631 \u0627\u0644\u062d\u0631\u0627\u0631\u064a \u0648\u062a\u0622\u0643\u0644 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0644\u062a\u0642\u0644\u064a\u0644 \u062a\u0643\u0631\u0627\u0631 \u0627\u0644\u0627\u0633\u062a\u0628\u062f\u0627\u0644.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">7. \u0627\u0644\u062e\u0627\u062a\u0645\u0629<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u062a\u062f\u0645\u062c \u0627\u0644\u0623\u0638\u0631\u0641 \u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a\u0629\u060c \u0643\u0645\u0643\u0648\u0646\u0627\u062a \u0648\u0638\u064a\u0641\u064a\u0629 \u062e\u0632\u0641\u064a\u0629 \u0623\u0633\u0627\u0633\u064a\u0629 \u0641\u064a \u0645\u0639\u062f\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u0628\u064a\u0646 \u0639\u0644\u0648\u0645 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0648\u0627\u0644\u0643\u0647\u0631\u0648\u0633\u062a\u0627\u062a\u064a\u0643\u064a\u0629 \u0648\u0627\u0644\u0647\u0646\u062f\u0633\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629. \u0648\u064a\u0624\u062b\u0631 \u0623\u062f\u0627\u0624\u0647\u0627 \u0628\u0634\u0643\u0644 \u0645\u0628\u0627\u0634\u0631 \u0639\u0644\u0649 \u062f\u0642\u0629 \u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0648\u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0627\u0644\u062a\u0635\u0646\u064a\u0639.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0645\u0639 \u0627\u0633\u062a\u0645\u0631\u0627\u0631 \u062a\u0637\u0648\u0631 \u0639\u0645\u0644\u064a\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0646\u062d\u0648 \u062f\u0642\u0629 \u0623\u0639\u0644\u0649 \u0648\u0639\u0642\u062f \u0623\u0635\u063a\u0631\u060c \u0633\u064a\u0633\u062a\u0645\u0631 \u0627\u0644\u0637\u0644\u0628 \u0639\u0644\u0649 \u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u062e\u0632\u0641\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0623\u062f\u0627\u0621 \u0641\u064a \u0627\u0644\u0646\u0645\u0648\u060c \u0645\u0645\u0627 \u064a\u062f\u0641\u0639 \u0627\u0644\u0627\u0628\u062a\u0643\u0627\u0631 \u0627\u0644\u0645\u0633\u062a\u0645\u0631 \u0641\u064a \u0627\u0644\u0645\u0648\u0627\u062f \u0648\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u062a\u0635\u0646\u064a\u0639.<\/p>","protected":false},"excerpt":{"rendered":"<p>1. Introduction: Role of Advanced Ceramics in Semiconductor Equipment In modern semiconductor manufacturing, equipment operates under extreme conditions such as vacuum environments, high temperatures, plasma exposure, and ultra-precision motion control. Traditional metallic materials often fail to meet the combined requirements of stability, cleanliness, electrical insulation, and thermal management. Advanced engineering ceramics\u2014such as alumina (Al\u2082O\u2083), aluminum [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2038,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[3],"tags":[46,37,102,96,91,68,103,93,92,101,95,89,98,55,90,78,94,100,97,99],"class_list":["post-2036","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-advanced-ceramics","tag-alumina-ceramics","tag-aluminum-nitride","tag-coulomb-force","tag-dielectric-materials","tag-electrostatic-chuck","tag-esc","tag-etching-process","tag-helium-cooling","tag-ion-implantation","tag-johnsen-rahbek","tag-plasma-process","tag-precision-machining","tag-semiconductor","tag-semiconductor-equipment","tag-silicon-carbide","tag-thermal-management","tag-thin-film-deposition","tag-vacuum-environment","tag-wafer-handling"],"_links":{"self":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/posts\/2036","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/comments?post=2036"}],"version-history":[{"count":2,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/posts\/2036\/revisions"}],"predecessor-version":[{"id":2040,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/posts\/2036\/revisions\/2040"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/media\/2038"}],"wp:attachment":[{"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/media?parent=2036"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/categories?post=2036"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xkh-ceramics.com\/ar\/wp-json\/wp\/v2\/tags?post=2036"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}